BALZERS Products

  • PFEIFFER / BALZERS: TPU 170

    Details
    ID#:
    9094727
    Category:
    Pumps
    Turbo molecular pump | ISO100 Inlet Flange, KF25 Outlet Flange | Pumping speed: for N2 170 l/s | Ultimate pressure with rotary vane pump < 1x10-10 mbar | Air or Water Cooling available | Pump equipped with two ceramic bearings | The installation attitude can be selected from vertical to horizontal | Pfeiffer Balzers TCP -310 Turbo Pump controller not included.
  • PFEIFFER / BALZERS: TPU 240

    Details
    ID#:
    9094724
    Category:
    Pumps
    Turbo pump | Pumping speed: for N2 230 l/s | Ultimate pressure with rotary vane pump 1x10-10 mbar | Recommended Backing Pump 1.5-16 m3 | Air or Water Cooling available | Turbo Pump part number: P01 330 | The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side | Turbo pump designed for a wide range of applications in research industry | Pfeiffer Balzers controller not included.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • BALZERS: UMS 500

    Details
    ID#:
    144768
    Category:
    Evaporators
    Special Ultra High Vacuum System | With a pressure < 3x 10e-11mbar | (1) Balzers Electron Beam Power Supply EHV 110A | (2) Balzers Electron Gun Control EKS 110A | (1) Balzers RTC 110 Rate Controller | (2) Balzers ES300 E-Guns | (1) Balzers Ion Gauge Control IMG 070 | (1) Balzers Sublimation Control USS 110 | (1) Balzers UMS Control UMC 101 | (1) Pfeifer Turbo Pump Power Supply TCP 300 | (1) Balzers Heater Control Unit UAS 301 | (1) Advanced Energy ID 2500 Ion Beam Drive | (1) Ion Beam Source | (1) Balzers Quadrupole Mass Spectrometer QMG511 | (1) Varian TSP control Unit Model VT922-0052 | (1) Balzers Temperature Control Unit 0° to 400°C | | Water Distributor Rack | | Includes Documentation with drawing and schematics.
  • BALZERS / EVATEC: BAK 760 C

    Details
    ID#:
    9137693
    Category:
    Evaporators
    Evaporator | (1) Chamber | System Controller Type: BPU431 | Software version: V04R26 | | Gas/ process controller: MKS 270 | Gas/ chemical analyzer: Balzers QMA400 | Line 1 Ar 200 sccm Unit | | (2) Zone lamp heater | T/C Configuration: inside process chamber | | Vacuum: | Pressure controller | Chamber Vacuum Pumps | Cryo Compressor | Foreline Pumps | | Power distribution unit | (2) Roughing pumps | Cryo compressor | EH215 | ECS200 | EFS200 | Electronics cabinet | Water battery | RF generator and matchbox | Loadarm calotte | | 3 phase, 50Hz, 400V 80A. |
  • BALZERS: BAK 760

    Details
    ID#:
    9071169
    Category:
    Evaporators
    Evaporator | E-beam and substrate heating | | Compact High Vacuum Coater | (1) Rotary drive motor | (1) Substrate holder 4" | (1) High-Vac plate valve DN 500 mm | (1) Fore-vacuum valve | (1) Bypass valve | (1) Vent valve for N2 | (1) Chevron | Vacuum measurement cells: Leybold 1 | (2) TPR280 foreline and high vac pump | PKR251 Chamber | | Vacuum Pumps | Medium pump stand | EDWARDS GV80 EH 500 Dry pump/Roots blower 250 m3/h | DUO + ROOTS, with test | Hi vacuum pump | Diff 500 A with baffle: Balzers | | Water battery for cold water distribution | Cold-water 20°C | Flow meter on each line | | EMO | High safety devices | Door monitor | | Balzers High Voltage Cabinet EHV110 | EKS 110 / ETS 110 rack | HV EHV110 | (1) E-Gun: Balzers ESQ 110 | Shutter | EDE 110 Servomotor | EHS 110 Filament transformers | Source with 4-hole crucible | | Control Cabinet | PLC Siemens S7 | Visualisation Siemens WinCC flexible | Windows PC 17- 19” TFT | Programmable start | Automatic/manual vacuum control | Disengagable interlocks | Display of the vacuum values | Visualisation of the system status | Data log | Leak rate test function | Password controlled access – free setting of user | Groups (for example engineer, service, operator aso.) | | Deposition Controller | Inficon Maxtek, XTC/2 or eq. | (1) Single quartz sensor - connected to single crystal oscillator | Vacuum feedthrough | | Options available: | Protection shields | Heater | E-Beam (new) | Thermal evaporator, 3.5 kW | Glow discharge | Ion gun: K&R | | CE Marked | 3 x 400 VAC, 63 A, 3 Ph+N+NE, 50 Hz.
  • BALZERS: BA 510

    Details
    ID#:
    186817
    Category:
    Evaporators
    Bell jar system | (3) Thermal Sources | Shutters | 510mm Diameter | Pump system | -Diffusion pump Balzers Diff 200 | -Balzers Buffle BFA 200 | -Freon compressor PW3K7 with R413A | -Pfeiffer rotary pump DUO 030A | -n°2 Balzers EVA 040P | -Balzers vent valve EVM016 | -Balzers high vacuum valve PVA 200PD with Throttle function | Instruments for vacuum controls | -Balzers TPG 070 with 3 TPR 010 | -Balzers IKW 010 with IKG 020 with set points for run process | -PC 101 for automatic pumping control | Process Systems | -Balzers BPU 100 automatic systems process control for n°4 sources and 36 layers. | -Quarz Monitor Balzers QM101 With head QSK 300 | -N° 2 thermal source working with automatic system BPU and thyristor Eurotherm | -Automatic Balzers shutter for both sources | -Automatic rotary system BD104 | Electrical System | -3P-N-GND 380V for 50hz | -EEO 101 safety stop | -ERE 101 connection box | -EPC 301 distribution power box | -Water cool valves and flows switches | -Electrical and water predisposition for E-Gun | Includes operation and maintenance manuals. |
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • BALZERS: BAK 640

    Details
    ID#:
    185716
    Category:
    Evaporators
    Evaporator | Front door including (2) inspection windows with changeable glass | Frame for vacuum chamber, partly welded round pipes for water cooling/heating | Ploycold included | Chevron | Meissner Trap | Diff. Pump Diff. 400 | HV- Valve DN 400 | Pre vacuum pump system | Vacuum valves, vacuum conducts | Vacuum switch | (2) Pirani Gauge TPR | Cold Ionisation Gauge PKR | Waterbattery: Water flow sensors | | Rotary drive: BD 104 | DC-motor | Rotation speed 0 - 30 rpm | | Vacuum chamber: | Internal dimensions: H = 785 mm, W = 740 mm | Effective calotte diameter: D = 640 mm | Partly welded round pipes for water cooling/heating | Stainless steel 1.4301 | Inner surfaces sand blasted | Clean room compatible | | Electric basic system: | BPU 420 E Process control system | Control rack Keyboard | LC TFT display monitor mounted in control rack | Power distributor | | Protective coating shields: | Protective coating shields for internal of vacuum chamber cpl | Protective coating shields for bottom of vacuum chamber cpl | Set of coating shields, stainless steel | | Segment Calotte: Calotte support | | Resistively heated evaporation device: | (2) Each of electrodes, transformer, thyristor | Shutter drive | Feed through | shutter plates cpl | | Electronbeam evaporation unit with: | Evaporator source EV-M5 | 4-pocket crucible, 4x8 ccm | Beam deflection controller | Filament power supply | High voltage power supply 5kW, 10kV | Shutter drive | Feed through | Shutter plates cpl | | Quartz (thickness, rate) monitor: | 1-fold quartz crystal holder QSK 360 A | Film thickness measurement set | | Distribution mask for uniformity optimization: | Holder for distribution mask | Distribution shapper | | Set Documentation.
  • BALZERS: BAK 600 CE

    Details
    ID#:
    177408
    Category:
    Evaporators
    Vintage:
    ~1980 
    Four Pocket E-Beam Evaporator | E-Beam: ESQ 110 | Controller | Heating system with halogen lamp | ~1980 vintage.
  • BALZERS: BAF 400

    Details
    ID#:
    9016405
    Category:
    Etchers / Ashers
    Freeze etching system | Turbo pump.
  • BALZERS: BAH 1600

    Details
    ID#:
    176919
    Category:
    Evaporators
    Vacuum chamber with sputtering system | De-installed.
  • BALZERS: 450

    Details
    ID#:
    170848
    Category:
    Sputtering Systems
    Wafer Size:
    3"-4" 
    Sputtering system, 3"-4" | | Process: large targets (~9"x5") in a sideways-sputter configuration | Targets sputter inward onto a rotating drum. | Pallets: 3" and 4" wafers. | Drum: Raises vertically out of the top of the chamber | Hydraulic lift: Failure, but using an external hoist to open the chamber | | (3) Target slots: Aluminum, Tungsten, Silicon, | Fourth slot is currently set up to perform an RF etch of the substrates and drum | System has never seen any gold or photoresist inside the chamber | | Process gas: Argon | Vent gas: Nitrogen | Cryo pump: base pressure of ~5e-7 torr. (~8 hours to pump out) | (2) Power supplies | RGA: 1-100 AMU | Software | PC: Windows 98 | | Currently installed in a fab.
  • BALZERS: DIF 250

    Details
    ID#:
    31327
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 160

    Details
    ID#:
    31326
    Category:
    Pumps
    Diffusion pump.
  • BALZERS: BAK 600

    Details
    ID#:
    39103
    Category:
    Evaporators
    w/ 4 rectangular targets, as-is (w/o pumps, RF generators, etc) or rebuilt to your specs, de-installed.
  • BALZERS: BAH 1600

    Details
    ID#:
    164001
    Category:
    Evaporators
    Vacuum chamber.
  • BALZERS: BAK 550

    Details
    ID#:
    170800
    Category:
    Evaporators
    Chamber, pump and electronics not included.
  • BALZERS: BAK 760

    Details
    ID#:
    8761
    Category:
    Evaporators
    Bare stripped chamber.
  • BALZERS: BA 501

    Details
    ID#:
    189857
    Category:
    Pumps
    Rotary pump | 500 cu. m/hr.
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