GCA WAFERTRAC Products

  • GCA / TROPEL: Wafertrac 1006

    Details
    ID#:
    171562
    Category:
    Photoresist
    Track coating system.
  • GCA: 3600F

    Details
    ID#:
    4441
    Category:
    Mask Generation & P...
    Pattern Generator, PC upgrade installed.
  • GCA: 6700

    Details
    ID#:
    111824
    Category:
    Wafer Steppers
    Stepper, G-line | Environmental chamber | Demonstrable.
  • GCA: ALS

    Details
    ID#:
    35132
    Category:
    Wafer Steppers
    Wafer Size:
    6" 
    Vintage:
    1988 
    Stepper, G-line (Ziess 10-78-46), 5X reduction, .38NA, .9um resolution, configured for 6" wafers and can be changed to any size, running and ready for demo.
  • GCA: 8500

    Details
    ID#:
    131414
    Category:
    Wafer Steppers
    Stepper.
  • GCA: 6300A & B

    Details
    ID#:
    293
    Category:
    Wafer Steppers
    Wafer Size:
    5", 6" 
    Steppers, 5" & 6".
  • GCA: 8000

    Details
    ID#:
    131413
    Category:
    Wafer Steppers
    Stepper.
  • GCA: AUTO-SORT II-150

    Details
    ID#:
    156006
    Category:
    Wafer Steppers
    Flatness testing systems | TTV, Bow, Warp.
  • GCA: 8000i series DSW LASERSTEP 200

    Details
    ID#:
    1721
    Category:
    Wafer Steppers
    Parts machine without laser or lenses.
  • GCA: 6800

    Details
    ID#:
    182892
    Category:
    Wafer Steppers
    G-line Stepper | Manual load of reticle | Paddle wafer loader | 6" x 6" X/Y stage motions | Stage controlled motions with data input of 0.1μ in metric mode | Stage precision of +/- 0.15μ | Stage orthogonality ( software correctable) of +/- 0.5 arc sec | Die rotation of +/- 0.2μ over 11mm | Lens reduction of +/- 0.2μ over 11 mm | Trapezoidal error of +/- 0.2μ over 11mm | System is fitted with a Tropel 2035 5X g-line (436) lens with a .35NA and a 20mm dia. field. | Lens spec. for this lens is 1.0 microns on ultra-flat wafers, but can be pushed lower | Mercury light source will have a Maximus 1000 power supply and illuminator corrected for 436 nm (g-line) | Auto focus in Z axis | All electronic cards will be upgraded to latest available revisions | Reticle loading will be manual type and will use a 5x5 inch reticle | Wafer Handling will be done using a paddle system with paddles for 100 mm dia. wafers and pieces | Wafer alignment (global) will be upgraded to a CCD camera | Global objective spacing will be set for 76.2 mm separation | Global Alignment system Registration of +/- 0.35μm | The system uses a DEC PDP-11 computer | An environmental water cooled chamber to be supplied with the uni | Chamber power will be set for 208 volts, 60 Hz, 3 phase 30 amps, and the Electronic rack is 110volts, 60Hz, 30 amps.
  • GCA: 8500 series

    Details
    ID#:
    21477
    Category:
    Wafer Steppers
    Steppers, 6". w/ 2235 i-line lens.
  • GCA: 3600F

    Details
    ID#:
    9016977
    Category:
    Mask Generation & P...
    Pattern generator.
  • GCA: AutoStep 200

    Details
    ID#:
    9031336
    Category:
    Wafer Steppers
    Steppers.
  • GCA: ALS

    Details
    ID#:
    9105350
    Category:
    Wafer Steppers
    Wafer stepper.
  • GCA: 6663514

    Details
    ID#:
    9113362
    Category:
    Chillers - Industri...
    Circulating Chiller | Temperature range: -15°C to 85°C | 120 V, 1 Ph, 1/3 Ph, 60 Hz.
  • GCA: 6300

    Details
    ID#:
    9114915
    Category:
    Wafer Steppers
    Auto stepper | Currently installed.
  • GCA: FAM-1

    Details
    ID#:
    96732
    Category:
    Particle Counters
    Vintage:
    1989 
    Fibrous Aerosol Monitor, 1989 vintage.
  • GCA: 8000/8500

    Details
    ID#:
    9101642
    Category:
    Wafer Steppers
    G-Line stepper and parts. |
  • GCA: 3600F

    Details
    ID#:
    9036243
    Category:
    Mask Generation & P...
    Pattern generator.
  • GCA: AC / CS

    Details
    ID#:
    9094025
    Category:
    Electronic Test Equ...
    Gas control system.
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