Benutzt - - #9214539 zu verkaufen

ID#: 9214539

Hersteller:

-

Modell:

-

Ausstattungsmerkmale:

Inline sputtering system
304L Stainless steel construction
(4) Horizontal chambers
Coating area (W x L x H): 18” x 25” x 3”
Rail shuttle system
Differential pressure control
Modular / Expandable platform
(2) DRYVAC 650 Mechanical pumps
(2) Atmosphere to vacuum gate valves
(3) Internal transfer valves

(4) OERLIKON LEYBOLD 2000 l/s Turbo molecular pumps with (4) ISO 250 B Gate valves isolation valves

NW25 Port and ball valve on each roughing line
(2) NW40 Blank ports
(2) 2 ¾” Conflat blank-off ports
(10) Rough vacuum gauges
(4) High vacuum gauges
(2) SCI 6” x 32” Rotary swing duo cathodes, end block, external cantilever mount
(2) ADVANCED ENERGY Pinnacle plus 10kW DC power supplies
(3) Alicat mass flow controllers
VCR Type fittings
Selectable line speed on pallet style handling of substrates
Substrate heating for (3) Chambers: 3 kW

Push button machine operation with different user security levels:
ALLEN BRADLEY Compactlogix PLC
Windows PC / PLC based with flat panel HMI touch screen monitor

Modem / Network accessible for remote
Dynamic data exchange (DDE): Monitoring / Storing run parameters

Utility requirements:
Air: 80 psi @ 15 cfm

Water: 50 GPM (190 liters / min) @ 60-80 F (15-26°C)
Inlet pressure: 60 psi (4.1 bar) maximum
Outlet pressure: 40 psi (2.76 bar) minimum
pH Value: 6.0 to 8.0
Calcium carbonate level: <75 Parts per million

Grounding: (2) ¾” Diameter copper clad steel rods

Connection: VPN / Analog phone line
Electrical: 480V, 300 A, 3 Phase, 60Hz.
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