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ID#: 9109265

Hersteller:

AJA

Ausstattungsmerkmale:

Sputtering and evaporation system
MeiVac substrate heater, 6"
(2) Original heater power supplies
Advanced Energy 2 kW water cooled RF generator
Roughing pump
(2) gas channels
Advanced energy dual 5 kW pulse DC magnetron power supply
Alcatel dry roughing pump
Shimatzu turbo pump
VAT gate valve
Substrate carousal
Gun shutter.
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