Benutzt AMAT / APPLIED MATERIALS Endura 5500 #9257162 zu verkaufen

ID#: 9257162

Jahrgang:

2000

Wafer Größe:

6"

Ausstattungsmerkmale:

Sputtering system, 6"

Load lock chamber:
LLC Type: Narrow body
Indexer without rotation
Wafer mapping
CH Vent: Slow / Fast vent
No wafer slide out detector

Buffer chamber:
AGILENT / HP / HEWLETT-PACKARD Robot
Upper and lower motors
(2) Gate valves
Cryo pump: 3 Phase
(7) Wafer sensors

Transfer chamber:
AGILENT / HP / HEWLETT-PACKARD Robot
Upper and lower motors
(2) Gate valves
Cryo pump: 3 Phase
(6) Wafer sensors

Chamber A: Pass through
Chamber B: Cool down

Chamber A / B:
Lid type: Clear plastic
Wafer lift
Wafer lift hoop
No TC monitor

Chamber E / F: Orienter degas
Degas lamp module
Wafer lift
Wafer lift hoop
Wafer chuck
Orienter controller PCB
Laser CCD array PCB
No TC
No TC amp

Chamber 1: PVD Wide body
Source assy: 11.3"
Source bracket kit
COH TI Adapter plate
Wafer lift: Clamp
Heater: Clamp
Heater water box: Clamp
MKS 100 mT Manometer
Ar Backside
(2) Gate valves
Ion gauge
Shutter option
Cryo pump, 3 Phase
Heater type: Clamp
Chamber harness
Chamber inter-connect PCB
Chamber process gas line
Chamber vent line
Chamber source water manifold
Chamber pneumatic 1/8 poly line set

Chamber 2: PVD Wide body
Source assy, 11.3"
Source bracket kit
Adapter plate: WB to STD 13"
Wafer lift: Clamp
Heater: Clamp
Heater water box: Clamp
MKS 100 mT Manometer
Ar Backside
(2) Gate valves
Ion gauge
Shutter option
Cryo pump: 3 Phase
Chamber harness
Chamber inter-connect PCB
Chamber process gas line
Chamber vent line
Chamber source water manifold
Chamber pneumatic: 1/8 Poly line set

Chamber 3 / 4: PVD Wide body
Source assy: 11.3"
Source bracket kit
Adapter plate: WB to STD 13"
Wafer lift: Clamp
Heater: Clamp
Heater water box: Clamp
MKS 100 mT Manometer
Convectron gauge
Ar Backside
(3) Gate valves: PVD
Ion gauge
Shutter option
Heater type
Chamber harness
Chamber inter-connect PCB
Chamber process gas line
Chamber vent line
Chamber source water manifold
Chamber pneumatic: 1/8 Poly line set

Chamber C: PCII Etch
Resonator
Pedestal lift
MKS Manometer
Convectron gauge
Ion gauge
Turbo pump
Wafer lift
RF Match
No process kit

Chamber 1, 2, 3, 4, C:
Gas panel assy
MFC: STEC 4400
MFC Down steam valve
Manual shut off valve
MFC Control cable
MFC Inter-connect PCB

Sub-module:
CTI-CRYOGENICS 9600 Cryo compressor
(2) Cryo controllers: 3 Phase
NESLAB III Chiller

Vacuum pump
System pump: BOC EDWARDS QDP40
PCII Pump: BOC EDWARDS QDP40 + MB250

System rack: VEM
SBC
SEI
(12) DIO
AI
(2) AO
(3) Opto PCB
(2) AI MUX
Cryo temp / AI MUX
(4) Steppers PCB
TC Gauge PCB
(2) Ion gauges PCB
(4) Invertron gauges PCB
OMS PCB
Hard Disk Drive (HDD)
Floppy Disk Drive (FDD)
(4) HTR Lift drivers, 2-Phase
(6) Robot drives, 5-Phase

RF Rack:
RF / DC Rack
(5) ISO Amp
(4) DC / RF Generator interlocks PCB
DC Power supply
ADVANCED ENERGY MDX-L12 DC Generator
CPS 1001 RF Generator
RFPPLF10A RF Generator

Missing parts:
Metal blades
Laser tubes
Heater type: Clamp
Cryo pump, 3 Phase
Turbo controller
RF / DC Rack
ADVANCED ENERGY MDX-L Series DC Generator
RF Generator, 13.56 MHz / 400 kHz

Power supply:
AC Rack type: 480 VAC, 3 Phase, 4+1 Wire with transformer
DC Power supply: +5 VDC / +24 VDC
DC Power supply: +/-15 VDC / +/-12 VDC

2000 vintage.
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