Benutzt AMAT / APPLIED MATERIALS Endura PVD #9185886 zu verkaufen

ID#: 9185886

Modell:

Endura PVD

Ausstattungsmerkmale:

Sputtering system

FI Mini-environment (Front End)
FI Frame type: APPLIED MATERIALS-AT
Load port configuration: (2) FOUP
Robot: KENSINGTON
Pre aligner and centering: Installed (Single axis)

Mainframe
Platform type: ENDURA UHV
Loadlock configuration(SWLL): (2) Loadlocks
Chamber A: Pass through with cool option
Chamber B: Cool chamber
MF Robot configuration: VHP Robot
Robot controller: NSK
Motion device variant: E-Xmp (0190-13990)
Robot blade: Al blade
LCF Configuration: Dual pass through

Sub systems:
Equipment rack(Generator Rack) #1: 300mm ENDURA
System AC rack: 300mm ENDURA
Main AC rack: 300mm ENDURA
75KVA Transformer: 300mm ENDURA
DI Cooler: DAIKIN
Cryo compressor: CTI Cryogenics

Chamber #1 (PVD):
Source target: TiN
Gas panel detail:
MFC2: STEC N2 100 sccm
SRC Power supply
DC Power supply: MDX-L HALO(6KW) 0190-21855
Lifter type: Stepper heater, stepper pins
Cryo pump type: CTI Onboard
Cryo pump: CTI Cryogenics, OBIS CTI onboard


Chamber #2 (PVD):
Source target: TiN
Gas panel detail
MFC2: STEC N2 100 sccm
MFC3: STEC N2 200 sccm
SRC Power supply
DC Power supply: AE Pinnacle (0190-25724)
Lifter type: Stepper heater, stepper pins
Cryo pump type: CTI Onboard
Cryo pump: CTI Cryogenics, OBIS CTI onboard

Chamber #4 (PVD):
Source target: TiN
Gas panel detail
MFC2: STEC N2 100 sccm
MFC4: STEC N2 20 sccm
SRC Power supply
DC Power supply: AE Pinnacle (0190-25715)
Lifter type: Stepper heater, stepper pins
Cryo pump type: CTI Onboard
Cryo pump: CTI Cryogenics, OBIS CTI onboard

Tool list:
Factory interface
Mainframe
PVD Chamber 1 body
PVD Chamber 1 source
PVD Chamber 2 body
PVD Chamber 2 source
PVD Chamber 4 body
PVD Chamber 4 source
Degas chamber
PC & Transformer
Monitor rack
Motion controller
Monitor stand
Foot step ( Rear 1, Side 2)
Hoist (Crane) 1
Hoist (Crane) 2
Main AC rack
System AC rack
75KVA Transformer
Cryo compressor
Generator rack
Chiller
DI Cooler
EMO Cable
(2) RGA Ports, controller
Remote switch box
(4) Chambers for line (#1, 2, 4, E)
AC Cable
Vendor cable
AC Cable
Helium hose
Currently warehoused.
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