Benutzt BALZERS LLS EVO #9015975 zu verkaufen

This BALZERS LLS EVO has been sold.

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ID#: 9015975

Hersteller:

BALZERS

Modell:

LLS EVO

Ausstattungsmerkmale:

Sputtering system
Substrate: 4" (36 pcs) 6", (12 pcs) holder

HV pump: CTI 8F OnBoard (LC / MC)
Rough pump: TRIVAC D 65B (LC / MC)
Polycold type: PFC 400 LT

HV valve: VAT 014 2-POINT (LC), VAT 064 3-POINT (MC)
Vent valve: VAP 025 / VAP040, Soft vent MFC 5 slm [N2]

Heater: Heater shutter (LC)
Etching in LC: RF sputter etch
Electrical: 3 x 400 VAC, 60 Hz

Power supplies:
# 1, 2: DC 6 kW
# 3: RF 2.5 kW

Cathodes:
Power supply #1: 1, 3
Power supply #2: 4, 5
Power supply #3: etch, 2

Target material:
Ta: 1
SiO2: 2
Ta: 3
AlCu: 4
NiCr: 5

Manual handling

Accessories:
Second set of shields
Second set of substrate tooling.
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