Benutzt BUHLER / LEYBOLD OPTICS Star #9244433 zu verkaufen

ID#: 9244433

Modell:

Star

Ausstattungsmerkmale:

Sputtering system
Loading capacity: (2) Pair of lenses
Maximum substrate Ø: 80 mm / 3.15"
Process gases: N2, O2, Ar
Remote access: LAN / WLAN / Air card
Cycle time (4-Layer AR): 10 min
Sputter target: Silicon (Si)
Sputter power supply: DC Pulsed
Sputter rate SiO2: 1.2 - 2.0 nm/s
Sputter rate Si3N4: 0.7 - 1.2 nm/s

Includes:
LEYBOLD OPTICS PK150 Cathode
Electrical cabinet
Sputter cathode
Substrate lift device
Substrate rotary drive
Turbo pump
Water chiller
Mechanical pump
Handling system
Gate valve
Shutter
Cathode: Swiveled 90° up
Operator terminal
With touch screen interface
Process chamber / Load lock
With entry load lock chamber

Electrical supply:
Electrical cabinet
Power supply for sputter source

Media supply:
Process gasses
Water chiller
Power and compressed air.
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