Benutzt CANON / ANELVA ILC 1060SV #9099200 zu verkaufen

This CANON / ANELVA ILC 1060SV has been sold.

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ID#: 9099200

Hersteller:

CANON / ANELVA

Modell:

ILC 1060SV

Jahrgang:

1996

Wafer Größe:

8"

Ausstattungsmerkmale:

Metal Sputtering system, 8"
Model #: Anelva I-1060 SVII Plus-1
Process capability: 0.11 um, 0.13 um, 0.15 um, 0.18 um

(5) Chambers
(1) Process kit/chamber
SMIF: Capable
Software
PM Special tool or jig: Yes
MFC: Aera FC-770AC Analog

Turbo pump: (1) Osaka TG-553VW Oil
Cryo pump: (6) Canon Anelva CAP-83R
Dry pump: (2) Ebara A10S
Compressor: (2) Canon Anelva CRC-874

DC Power Supply:
(2) Canon Anelva PDC-157E
(1) Canon Anelva PDC-307D

RF Generator: Denki VMA-1
Local scrubber: No
Heat exchanger: No
Chiller: No
Foundation: load dispersion board of stainless steel
RGA: (3) Canon Anelva AQA100R

Manuals included
Currently crated
1996 vintage.
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