Benutzt CVC SC 4000 #9106193 zu verkaufen

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ID#: 9106193

Hersteller:

CVC

Modell:

SC 4000

Wafer Größe:

8"

Ausstattungsmerkmale:

Sputtering system, 8"
Diameter water cooled stainless steel chamber with several 2.75", 21"
Conflat flanges for feed throughs, 6"
Cryo pump
(2) View ports
Single target in the base plate, 8"
(3) Sputter sources, 2"
CTI-8 Cryopump base pressure: 5 x 10-8
MKS Capacitance manometer
(4) Channel mass flow controllers
(3) Gases: Ar, O2, N2
RF Generator: OEM 1250, 1250 Watt unit.
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