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ID#: 9130079

Hersteller:

EVATEC

Modell:

Radiance

Jahrgang:

2010

Ausstattungsmerkmale:

Sputtering deposition system
Load lock and handling system
Transfer module
Single target
Temperature: 10-50 degree C
Relative humidity: 30-80%
Shared fore line pump: EDWARDS GX100L
LL TMC Pump: PFEIFFER TMH261
TC TMC Pump: PFEIFFER TMH521

(2) Batch process modules (BPM)
Process chamber
Turn table
Wafer chucks
Shared Fore line pump: EDWARDS GX100L
Turbo pump: PFEIFFER Highpace 2301
CTI Inline water pump
Chamber conditioning unit
Baratron process gas measurement gauge
Base pressure: <9E-8 mbar

(2) Process sources SSC 300
Planar magnetron
SSC300
(1) DC Power supply 5kW
(3) Mass flow controllers

Rack cabinet
Control system
Chamber shield for each process module
80-100 A, 50 Hz, 1200 VAC
2010 vintage.
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