Benutzt MRC / MATERIALS RESEARCH CORPORATION Eclipse Mark II #9235936 zu verkaufen

This MRC / MATERIALS RESEARCH CORPORATION Eclipse Mark II has been sold.

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ID#: 9235936

Wafer Größe:

6"

Ausstattungsmerkmale:

Sputtering system, 6"
Metals used: Ti, Cu, TiW, Au
RMX Magnet assemblies, 10"
DC Power supply: 3-10 kW
On board cryos
39600 Cryo compressor

Pumps:
EDWARDS QDP80 Vacuum pump
688CE44 Vacuum pump for wafer loading

Chambers:
(3) PVD Chambers
Etch chamber

Missing parts:
BROOKS AUTOMATION 7100-93 Transfer robot arm
THERMO FISHER 24000 Chiller
Hard drives and operating system.
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