Benutzt MRC / TEL / TOKYO ELECTRON Eclipse Mark IV #9199385 zu verkaufen

ID#: 9199385

Wafer Größe:

6"

Ausstattungsmerkmale:

Sputtering system, 6"
Not included: Pumps

SPUT Process chambers:

SPUT1:
Cathode: RM-12
Magnet pack type: RMX
C/S Spacing: 2.0"
Adapter type: Profiled
Target material: TiW
Shield material: Plasma spray
(2) Pie pan shields
Gas ring
Reactive gas: No
Regas injection: Rear
Argon MFC size: 200 sccm
Backplane type: MXB
Quick cool type: Air
DC Power supply: 10 kW
Target change kit: No
RF Bias network: No
Fast regen cryo

SPUT2:
Cathode: RM-12
Magnet pack type: RMX
C/S Spacing: 2.0"
Adapter type: Profiled
Target material: Ru
Shield material: Plasma spray
(2) Pie pan shields
Gas ring
Reactive gas: No
Regas injection: Rear
Argon MFC size: 200 sccm
Backplane type: MXB
Quick cool type: Air
DC Power supply: 10 kW
Target change kit: No
RF Bias network: No
Fast regen cryo

SPUT3:
Cathode: RM-12
Magnet pack type: SPA
C/S Spacing: 2.5"
Target material: Au or Au/5%Ni
Shield material: SS
(2) Pie pan shields: No
Gas ring: No
Reactive gas: Kr
Regas injection: Rear
Argon MFC Size: 200 sccm
Backplane type: MXB HTB
Quick cool type: Air
DC Power supply: 10 kW
Target change kit: No
RF Bias network: No
Fast regen cryo

SPUT4: No

Etch:
Hard/Soft etch type: Soft etch ICP
Adapter type: New style
Quick change kit: No
Shield material: SS
(2) Pie pan shields
SE Adapter shield: No
Gas ring: No
Reactive gas: No
Regas injection: Door
Backplane type: Round
Quick cool type: Water
Variable ICP network: No
RF Bias network: Finger
Fast regen cryo
Bell jar cycle count

Loadlock/Plenum:
Loadlock atmosphere sensor: Old style
Plenum gate valve: Vat
L/L Cryo fast regen
Plenum cryo fast regen
RGA Type: No
Index cycle counter: No

Wafer handling:
Wafer:
Type: Si / SEMI
Tab type: Clamp

Clamp ring material: SS
C/R Edge exclusion: 1.5mm
Latch type: SS Bearing
MFC Vendor: MKS
Equipe/PRI Robot: CE
Equipe/PRI Controller: 100 Series
Index stepper cont. loc: Vacuum tank
Index drive type: Solarus
Aligner type: Equipe/PRI
L/A Latches enabled
SMIF Interface: No
Laminar blower

Facilities/Utilities:
Pump: QDP80
AC Voltage: 208 V
AC Frequency: 60 Hz
PDU Set for 50 Hz: No
208 Buss bar in PDU
GFI in PDU
Cryo compressor type: 9600
Compressor power / Pump power from PDU
Water lines

Currently de-installed.
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