Benutzt TEL Nexx Nimbus PVD #9212338 zu verkaufen

ID#: 9212338

Hersteller:

TEL

Ausstattungsmerkmale:

Sputtering system

Missing parts:
(1) HX Dep chamber
(1) HX Loadlock cooling
(1) Cryo pump Dep bottom
(1) Cryo pump (Dep side)
(1) Robot arm (Bottom & top)
(1) Load lock assembly
(1) GENMARK Controller
(1) DC Generator (Dep)
(1) RF Generator (Etch)
(5) Pentagon water hoses
(1) Ion-gauge (Dep)
(1) Ion-gauge (Etch)
(1) Pentagon motor
(1) Elevator motor
(1) Process robot motor
(1) Flow meter (Load lock)
(1) Flow meter (Pentagon)
(4) ALCU Magnetrons

Power: 120/208 V, 50/60 Hz, 3 Phase, 5 W, Maximum 150 Amps.
[+] Weiterlesen [-] Schließen
loading