Benutzt TEL / TOKYO ELECTRON / NEXX Nimbus 364 #9202788 zu verkaufen

This TEL / TOKYO ELECTRON / NEXX Nimbus 364 has been sold.

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ID#: 9202788

Modell:

Nimbus 364

Jahrgang:

2006

Wafer Größe:

12"

Ausstattungsmerkmale:

Sputtering system, 12"

Nimbus XP-RDL system (354): 8"/12"
Includes:
MAGNETRON: G1 HP (Ti)
MAGNETRON: G1 HP (W)
MAGNETRON: G1 HP (Al)
(3) MAGNETRONS : AL HP (Al)
ICP Etch
Second cryo pump: Deposition chamber
RF Substrate bias
Load lock degas
(2) ESC Trays: 12"
Additional cable length
EMO State
SECS/GEM

2006 vintage.
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