Benutzt TRIKON Sigma 200 #9225665 zu verkaufen

This TRIKON Sigma 200 has been sold.

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ID#: 9225665

Hersteller:

TRIKON

Modell:

Sigma 200

Jahrgang:

1995

Wafer Größe:

6"-8"

Ausstattungsmerkmale:

FxP Sputtering system, 6"-8"
Set up for 6"
Both 4" and 8" conversion kits included
Automatic handling system for 25 wafers

(3) Chambers: Ti / TiN, Al And Ar sputter clean
PFEIFFER Turbo
(2) EBARA Dry pumps
(3) CTI Cryos with compressor
(2) DC Generators
(3) RF Generators

1995 vintage.
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