Benutzt ULVAC Ceraus Zi 1000 #9207442 zu verkaufen

This ULVAC Ceraus Zi 1000 has been sold.

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ID#: 9207442

Hersteller:

ULVAC

Wafer Größe:

8"

Ausstattungsmerkmale:

Multi chamber sputtering system, 8"
Included:
(6) Chambers
ICP
(4) PVD LTS
Degas

Main body:
Main CPU
(6) Mini PC
Monitor
(4) Cold traps
(4) Turbo pumps

AC Rack:
(4) DC Power supplies
RF Generator
Helium compressor

Facility:
Heat exchanger.
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