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ID#: 9113738

Hersteller:

ULVAC

Jahrgang:

2005

Wafer Größe:

8"

Ausstattungsmerkmale:

Digital sputtering machine, 8"
Capacity: 32 pcs for 1 batch

Carousel system: φ900xh700mm 12sides
Substrate holder: w208mmxL700mmx t12mm (12) Pieces
Total substrates number: 03.2mm (36) Pieces

Load lock
Cassette to cassette
Currently stored in clean room
2005 vintage.
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