Benutzt VARIAN 3290 STQ #9154639 zu verkaufen

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ID#: 9154639

Hersteller:

VARIAN

Modell:

3290 STQ

Ausstattungsmerkmale:

Sputtering system, 6"

Entity target configuration:
Process station #2: ALSICU
Process station #3: ALSICU
Process station #4: ALSICU

Process station cathode configuration:
Station #2:Quantum (Rotating magnet)
Station #3:Quantum (Rotating magnet)
Station #4:Quantum (Rotating magnet)

Heater configuration:
Heater type (All station): DC BIAS
Heater controller (AII station): Eurotherm 808 x 3

Power supply configuration:
Outer PSU station #2: AE PINNACLE 12 KW
Outer PSU station #3: AE PINNACLE 12 KW
Outer PSU station #4: AE PINNACLE 12 KW

System vacuum configuration:
Compressor: Model 8600
8R Cryo pump: Yes
Water pump: No

Software configuration:
User's guide: ECS 3000
Version: 96.204.10U1
Floppy drive: 3.5"
Double cassette loading.
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