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ID#: 151223

Hersteller:

VARIAN

Modell:

3290

Wafer Größe:

6"

Ausstattungsmerkmale:

Sputtering system, 6" Configuration: Wafer size: 6" Fluke Master controller Analog heater controller (station 1/2/3/4) MKS 250V argon controllers Wafer process controller: Z80 Wafer loader controller: Z80 VARIAN vacuum controller VARIAN 880 ion gauge controller Cassette motor controller RF matching network controller CTI 8 cryopump and controller CONMAG II deposition sources RF10S generator LEYBOLD / TRIVAC D65 rough pump Can be demonstrated.
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