Gebraucht PVA TEPLA FZ 14MV #293748092 zu verkaufen
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ID: 293748092
Float zone crystal grower
Vacuum chamber with door
Vacuum system
Gas: Ar
Cooling water system
(2) Pumps with filter
HF Tube oscillator
Oscillating circuit
Control cabinet
Feed rod holder
Inductor
Seed holder
Preheater
Generator
Vacuum valve
Remote box
PLC Control
Vacuum gauge
Operating panel
Indicator
Silicon material components:
Polycrystalline rod diameter: Up to 50 mm
Polycrystalline rod length: Up to 300 mm
Pulled silicon crystal diameter: Up to 25 mm
Seed crystal diameter: Φ5 mm
Seed crystal length: 80 mm
Float zone crystal length: Up to 300 mm
Atmosphere:
Ultimate vacuum: 2.5 x 10^-5 mbar
Leakage rate: <1x10^-3 mbar I/s^-1
Inert gas pressure: 5-10 bar
Inert gas flow rate: 0-18 Nl/min
Operating pressure: -1 to +2 bar
Motion:
Pulling speed: 0-30 mm/min
Lift speed rapid movement: 100-300 mm/min
Maximum travel: 350 mm
Crystal rotation: 0-50 min^-1
Cooling water:
Consumption: 45 L/min (Approx)
Inlet temperature: 293 ±5K
Inlet pressure: 4-6 bar
pH Value: 7-8
Water hardness: <8° DH
Maximum conductivity: 300 µS/cm
HF Power supply:
HF Power: 18 kW
Frequency: 1000-2400 kHz
Accuracy: ±0.5%
Actual value variation: ±0.5%
Allowed supply voltage fluctuation: ±5%
RG218 Coaxial power cable, 2 m
Power supply: 400 VAC ±10%, 31.5 kVA, 50 A, 3 Phase, 50 Hz.
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