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ID: 293666652
Qty / Part Number / Description
(1) / 8330010002 / JIAYU 1/2 HP tin Pump, 3"-4"
(2) / 8330010003 / Cathode motors
(3) / 8330010004 / Knee motors
(2) / 8330010005 / DC Motor gearheads
(1) / 8330020003 / Process chember gate valve
(2) / 8330030004 / 95930 W 2P FSMM Pressure regulating valves
(2) / 8330040001 / 0190-09109 / Solenoid valves, 24V
(6) / 8330060001 / Hexode covers, 4"
(6) / 8330060002 / Top cover
(1) / 8330060003 / INDEX screw
(3) / 8330070001 / Quartz plate
(17) / 8330070007 / (5) Pedestal Assemblies
(1) / 8330090001 / Cryo pruge heater, 120V/150W
(26) / 8330100001 / M27C256 Erasable Programmable Read Only Memory (EPROM)
(1) / 8330150004 / MILLIPORE FC-260 Mass flow controller (N2) 200SCCM
(1) / 8330150006 / FC-260 Mass flow controller (O2) 50SCCM
(1) / 8330150007 / MFC-260 Mass flow controller (N2) 50SCCM
(1) / 8330150008 / He-line 6m
(2) / 8330170001 / MILLIPORE WG2FT1RR2 Gas filters VCR, 1"-4"
(6) / 83300600011 / Hexode covers, 5"
(1) / - / Exposure mercury lamp power supply
(1) / 83300600021 / Hexagonal-shaped ceramic plate
(1) / 83301500011 / BROOKS 5850E Mass flow controller BCL3, 200SCCM
(1) / 83301500031 / KOFLOC Mass flow controller CL2 100SCCM
(1) / 83301500051 / MFC-3660 Mass flow controller CHF3 100SCCM 1/4VCR
(2) / D118010010 / S-150-5 Power supplies, 5V, 30A
(1) / GENE210002 / S-100-5 Power supply, 5V, 20A
(1) / GENE210005 / S-250-5 Power supply, 5V, 40A
(3) / GENE210010 / S-350-5 Power supplies, 5V, 50A
(1) / GENE210011 / SE-600-15 Power supply, 15V, 40A.
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