Gebraucht OXFORD Plasmalab 100+ ICP 380 #293769565 zu verkaufen

Reactive Ion Etcher (RIE), 6"-8" X20 PLC Upgraded Process: Ar, O2 Hine robot 25-Slots cassette module Gases: O2, CHF3, CF4, SF6, Ar, C4F8, BCL3, CL2 94-815269 CH1 RIE System (In system) 94-815269 CH2 ICP System 94-EXP1513 Monitor, PC, Cables 94-815269GP Gas pod Handler Power supply: 415 V, 3 Phase.