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ID: 293718112
Wafergröße: 8"
IET / Focused Ion Beam (FIB) system, 8"
Upgraded to IET / WDR System
Circuit editor: 14 nm
Standard configuration
Ion mill column / 5 nm new gen column
Acceleration: 50 keV
Ion column resolution: 5 nm
Laser interferometer stage, 8"
Proprietary charge neutralization system
Virtual apertures: (14) Beam currents
Pre-soak chamber
Wafer holder, 8"
Current monitor sample holder
Tungsten metal deposition
Bipolar power supply
Hard Disk Drive (HDD)
Gases :
Chlorine / Bromine
Xenon difluoride
Siloxane (Tetra Methyl Cyclote Trasil Oxane TMCTS)
Oxygen
Tungsten
Display:
Color monitor, 21"
Line resolution (1280 x 1024)
Gas delivery system:
Metal (Cl2)
Dielectric (XeF2)
(2) GAE Stations
Penta / Tri nozzle configuration
Dielectric deposition:
Tetra Methyl Cyclote Trasil Oxane (TMCTS)
Oxygen.
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