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ID: 9375886
Qty / Part number / Description
(1) / UFC-8565 / Unit UFC-8565 Mass Flow Controller (MFC) AR (SC11) 20 SCCM
(1) / NCDQ2B80-G0656 / SMC Slit valve, 8"
(6) / AM67480-001 / Slit valve bellows, 8”
(2) / 3620-00342 / White knight pumps PNEU 6 GPM, 60 psi ½
(1) / 0010-10202 / Pedestal ESC assembly, 8", notch, WEB
(1) / 0010-27517 / HTR Assembly, enhanced chucking, 8", TxZ / ALD TAN
(1) / 0010-33416 / ESC Assembly, 8", Dual epsilon (Part 7.221.553)
(8) / 0020-05810 / Gaskets RF: 8.02" x 0.135", THK Copper, 8", B101
(7) / 0020-25256 / 8", Wafer process 101 shutters
(1) / 0020-26588 / Shield, 8", PC II at C & D
(2) / 0020-34445 / Plate blockers, DxZ
(1) / 0020-34736 / Manifold, input, DxZ
(2) / 0020-34775 / Blocker silox, 8", UNIV CH
(6) / 0020-79085 / Outer clamps
(1) / 0021-03980 / Outer shield, TxZ Chamber / O window
(1) / 0021-35713 / Blade AL, 8", buffer with slot robot
(1) / 0021-38799 / Ring, teflon, blocker, Giga fill SACVD
(2) / 0021-80685 / Face plates, TEOS, Producer, 8
(2) / 0040-00796 / Gas box chambers lid, 8", Producer
(1) / 0040-18078 / Bellow weldment, HDP-CVD
(4) / 0040-31998 / DxZ Upper belows
(5) / 0040-35909 / DxZ Lower belows
(36) / 0040-49386 / Pin lift bellows for Producer S
(1) / 0040-51652 / Blade deep pocket, 8", Producer robot
(1) / 0040-86716 / Producer blade, 8"
(2) / 0040-77933 / Gimbal body HTR lift
(1) / 0040-86768 / Gear box blocker bypass
(1) / 0040-87765 / Face plate 23 milling centre, Hole RF cap
(1) / 0040-87771 / Face plate water cooled 23 milling centre H
(1) / 0040-87771 / Face plate BPSG Producer
(2) / 0040-95475 / Face plates TEOS, high dep rate
(2) / 0040-99705 / Base, ethernet switches, D-Link, 5.3 FFU
(1) / 0200-00247 / Ring, capture, 8", SNNF ceramic, DPS, NEW
(1) / 0200-18109 / Collar, 8", SNNF SML FLT UTIMA HDPC
(3) / 0200-18109S / Collars, 8", SNNF SML FLT UTIMA HDPC
(1) / 0200-20285 / Cover, 8", pedestal, B101 HTR, Ceramic, VECT
(1) / 0200-35785 / Kit, Ceramic wafer lift, 100, 125 and 150 mm, DCVD
(1) / 0200-36631 / Plate cover, 8", Heater DxZ patterned Al.
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