Gebraucht EVG / EV GROUP IQ #293705990 zu verkaufen
URL erfolgreich kopiert!
Tippen Sie auf Zoom
ID: 293705990
Wafergröße: 6"-8"
Weinlese: 2008
Mask aligner, 6"-8"
Top Side Alignment (TSA)
Back Side Alignment (BSA)
CCD Camera
Motors encoders limit switches sensors pneumatic
Automatic alignment for top and / or bottom side
Reinforced stage drives: X/Y/Theta axis
Automatic wedge compensation
Substrate and mask
Objectives lens: 5x, 10x
SP6400169 Shutter unit
Hg lamp: 500 W / 1000 W
Fully motorized split field microscope for bottom side view with CCD camera
Motorized swivel arm wafer loading trays for wafer size IC devices
PC
2008 vintage.
Es liegen noch keine Bewertungen vor