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ID: 293750114
Weinlese: 2012
Mask aligner
Manual and Motorized alignment stage:
Automatic wedge compensation system
Alignment gap programmable: 1 to 1000 micron
Resolution: 1 micron
Mask aligner mode: X ±5.0mm, Y ±5.0mm, Theta ±5°
Bond aligner mode: X ±3.0mm, Y ±3.0mm, Theta ±3°
Joystick X/Y and THETA
TSA Microscope
Motorized X/Y Manipulator and Rotation for microscope
Microscope tilt for exposure
Moveable exposure unit
Loading and unloading wafer
Single substrates
Substrate stack
PLC Control with LCD display
Windows GUI
Lithography application: 2" x 2" up to 8" x 8"
Aluminium profile
Pneumatic damper
CD Operator manual
BSA Microscopes distance: 33mm
Rack tooling storage
Top Side Alignment (TSA)
BSA and IR Microscope
Mask holder
Exposure chuck
Transport fixture
Bond align chuck
Bond adapter frame
Alignment stage:
X, Y, THETA Alignment stage motorized operation, resolution 0.1 µm
WEC Head
BSA Microscope
M608 Visual
Screen split field microscope
Binocular head vireo 5-30°
(10) Eyepieces
Turret
Single objective:
UMPL FL 5x/0.15
UMPL FL 10x70.30
LMPL FL 20x/0.40
LH1000 Exposure unit
Lamp adapter: 1000 W
CIC 1200 / LH 1000 Lamp power supply
USHIO HG Lamp: 1000 W
(2) Channel light-sensor: 365/405 nm
CPL UV Optometer case
UV Light measuring probe: 365/405 nm for UV Optometer
Position dial light sensor
Extended video alignment
UV400 High resolution optics
2012 vintage.
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