Gebraucht WATKINS JOHNSON WJ-TEOS999 #293831160 zu verkaufen

CVD System, 6" Type: APCVD (USG / PSG / BPSG) Ozone generation: SUMITOMO with (4) Cells (3) Injectors: IVA's with Monoblock (3) Canisters: TEOS, TMB, TMP CSR (9) Bubblers Belt cleaning: HF Bubbler Temperature: 500°C Cooling system: Water Throttle valve: MKS with controller Toroidal orifices: 6 x 3" with spring Belt: Inconel (25) Slot case (4) Cassette Wafer detecting Controller: Pentium (2) PC Gas controller: 3.89 Temp controller: 2.57 Handler: 4.47 PLC: 1.36 Gas configuration: - / Injector#1 / Injector#2 / Injector#3 O2/O3 / MFC O2 15 SLM / MFC O2 15 SLM / MFC O2 15 SLM D1N2 / MFC N2 6 SLM / MFC N2 6 SLM / MFC N2 6 SLM SPN2 / MFC N2 20 SLM / MFC N2 20 SLM / MFC N2 20 SLM D2N2 / MFC N2 3 SLM / MFC N2 3 SLM / MFC N2 3 SLM SIH4 / MFC N2 150 SCCM / MFC N2 150 SCCM / MFC N2 150 SCCM PH3 / MFC N2 400 SCCM / MFC N2 400 SCCM / MFC N2 400 SCCM B2H6 / MFC N2 300 SCCM / MFC N2 300 SCCM / MFC N2 300 SCCM DILL N2 / MFC N2 3 SLM / MFC N2 3 SLM / MFC N2 3 SLM TEOS / MFC N2 3 SLM / MFC N2 3 SLM / MFC N2 1.5 SLM TMP / MFC N2 500 SCCM / MFC N2 500 SCCM / MFC N2 150 SCCM TMB / MFC N2 100 SCCM / MFC N2 100 SCCM / MFC N2 50 SCCM Power supply: 208 VAC, 3 Phase.