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ID: 9293153
Qty / Part number / Description
(1) / 0040-94983 / EH1 Support tube
(1) / 0040-94358 / Flight tube, ultraclean
(1) / 0010-91251 / Mass resolving slit assembly
(1) / 0040-94645 / Body, Ion source, 3 Vaporizer-A
(1) / 0040-94645 / Body, Ion source, 3 Vaporizer-B
(1) / - / Serial communications interface module
(1) / - / Guide tube
(1) / 0010-92450 / 9500 x R Dual bellows extraction
(1) / 9090-00046 / Assembly source mag PSU
(1) / 0090-90861 / Pre-A CHAS
(1) / 0090-90862 / Pre-A CHAS (SPEC 0190-90437)
(1) / 0100-90404 / PWBA Orienter interlock
(1) / 0100-90271 / PWBA Wafer load interlock
(1) / 0100-90231 / PWBA Cassette indexer
(1) / 0100-90229 / PWBA Wafer loader blade control
(1) / 0100-90025 / PWBA 24V 1A Power supply
(1) / - / Monitor CRT
(1) / 0090-91014 / CHAS MDL SPSC PWR SUP FWI
(3) / 0090-90966 / CHAS MDL DAQ MKII Type B
(1) / 0090-90617 / Beamline Inst chassis module
(1) / 0090-91135 / Vac B / L CHAS (EDWARDS GA)
(1) / - / UPS
(1) / 0090-91022 / Option non VA Type (Lack of PCB x 2)
(1) / - / Hiden
(1) / 0090-90926 / W / C Vacuum (Lack of part: Ion gauge power supply PCB)
(1) / 0090-91093 / Chassis MDL INST TGT SYS (PCBx2)
(1) / - / Wafer on H / S Sensor
(1) / 0010-90442 / Assy - Scavenge pump
(1) / - / Filament feedthrough (PFS)
(1) / - / W / C Door close SW
(1) / PV16PKA B / EDWARDS Valve (Cryo rough valve)
(2) / - / Scan limit SW
(1) / - / Analog output module
(1) / - / Scan sensor assy (8" Non - VA)
(1) / - / 8" Hollow gripper arm assy
(2) / ISO63 / MKS Isolation valves
(3) / GT-034 / Thermistor gauge tube
(1) / - / EDWARDS Valve PV25PKA DBL-B (L / L Rough valve)
(1) / - / EDWARDS Valve SP25K V (W / C Manual valve)
(1) / - / Pressure switch type 157HQ (W / C ATM SW)
(1) / - / EDWARDS Valve PV25PKA DBL-B
(1) / - / EDWARDS Valve IPV40PKA (L / L Air flow valve)
(1) / 3930-90060 / Controller pneumatic W / L System
(1) / 0090-91044 / Chassis, plasma flood (DAQ Type H x 2)
(1) / 0021-90016 / 0021-90305 / Filament support assy.
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