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ID: 9242829
Qty / Part number / Description
(2) / 0010-01656 / Assy lamps base upper DPS E-DTCV
(1) / 0010-02616 / Assy, sym, gas ring 24 ports
(2) / 0010-02639 / Transistors
(3) / 0010-03087 / TTW Mounting assy racks
(1) / 0010-04926 / Negative HVM
(2) / 0010-05925 / Assy, heater exchangers
(1) / 0010-06572 / Cathode assy, 8"
(1) / 0010-07173 / Assy, throttle valve blankoff poly DPS
(1) / 0010-08148 / RF-Etch lift assy
(3) / 0010-15505 / CVD Source lid supplies
(1) / 0010-15506 / CVD Source lid return
(2) / 0010-18200 / Assy GND SHLD cooling coils
(1) / 0010-20300 / Lift assy PVD chamber
(1) / 0010-22813 / ESC Assy cap 8
(2) / 0010-24197 / CVD Turbo / Heater water hose assys
(1) / 0010-24198 / CVD Turbo / Heater water hose assy
(1) / 0010-24198 / CVD Turbo / Heater WTR hose assy
(4) / 0010-25582 / High precision reflectors and assys
(3) / 0010-25596 / FL2004 Flash lamps
(1) / 0010-36159 / Assy throttle valve shipping plate poly DPS
(1) / 0010-36162X / Assy RF match box, simple.C
(1) / 0010-37128 / Box dbp tri-port chx pass-thru
(1) / 0010-39736 / Slit lineg door assy
(1) / 0010-40092 / E-Chuck (ESC) pedestal assy
(1) / 0010-40155 / Buffer W/F sensor
(12) / 0010-70020 / Supply manifold assys
(2) / 0010-70264 / Assy HP robot drivers
(2) / 0010-76136 / HTHU Wafer lifts
(1) / 0010-90825 / Pre defining module
(4) / 0015-09055 / Susceptor bellows
(2) / 0015-20221 / CB Padlocks
(18) / 0020-00136 / Focus rings
(5) / 0020-00640 / SI Insert rings
(1) / 0020-04167 / (IL) Lift cylinder 8 EXT
(1) / 0020-09674 / Clamp ring ceramic
(4) / 0020-10117 / PERF Plates (Shower)
(1) / 0020-10202 / Plate slit valve chamber
(50) / 0020-10704 / (CL) Seal-throttle valves
(1) / 0020-10763 / Isolator tefron, 8"
(20) / 0020-18536 / Ring-teflon-upper chambers
(6) / 0020-20042 / Shutter disks
(20) / 0020-20113 / HUB DC Bias
(1) / 0020-20341 / Mount door transfer slit valve
(2) / 0020-20345 / Side covers
(1) / 0020-20483 / Hub lamp corner cover
(1) / 0020-20483 / Hub lamp corner cover
(1) / 0020-20484 / Hub end lamp cover
(2) / 0020-20484 / Hub end lamp covers
(1) / 0020-20485 / Cover lamp side
(1) / 0020-20485 / Cover lamp side
(2) / 0020-20485 / Cover lamp sides
(4) / 0020-20523 / Caps, lamp feedthru
(1) / 0020-20524 / Hub left, corner cover
(1) / 0020-20524 / Hub left, corner cover lamp bake out
(1) / 0020-20575 / Bracket motor brushless
(2) / 0020-20699 / Gate valves
(1) / 0020-20699 / Clamp AR flex 8" gate valve
(2) / 0020-20700 / Clamp end Ar flex 8" gate valves
(1) / 0020-20700 / Gate valve
(2) / 0020-20700 / Clamp end AR flex 8" gate valves
(2) / 0020-21105 / Clamps, 8"
(8) / 0020-21366 / Screw shoulder DC bias TIW
(1) / 0020-21667 / Clamp shield
(4) / 0020-21753 / Finger lift longs
(10) / 0020-21963 / Rim, cam bearing
(6) / 0020-22691 / Load lock support panels
(1) / 0020-22740 / Cassette support
(2) / 0020-22975 / Ceramic insulator rings
(5) / 0020-23354 / Insulators (pre-clean)
(10) / 0020-23354 / Insulators
(3) / 0020-23437 / Lift motor assys
(1) / 0020-23479 / Plate mntg pneum CYL/MTR
(2) / 0020-23512 / Blocks MTG, FUJIKIN valve
(2) / 0020-23512 / Blocks MTG, FUJIKIN valve
(1) / 0020-23559 / Magnet
(7) / 0020-23584 / Shield upper, 8" wafer G-12
(9) / 0020-23585 / Shield upper, 8" wafer G-12
(7) / 0020-23586 / Shield upper, 8" wafer G-12
(1) / 0020-23917 / Lift bracket
(1) / 0020-24057 / Bracket valve water
(1) / 0020-24228 / RF Connector insulator RR eclean
(2) / 0020-27942 / Bracket cables
(1) / 0020-30058 / Blocker plate
(1) / 0020-31019 / Plate perf, 8"
(9) / 0020-31252 / Fingers removables AL
(10) / 0020-31468 / Blackets TC
(2) / 0020-31493 / VNI-LID GDP
(2) / 0020-31940 / Pedestals
(1) / 0020-32046 / Base extension ESC
(3) / 0020-34040 / Lift pin-sampie cathodes
(9) / 0020-34316 / Sheet, interfaces, soft
(15) / 0020-34316 / Sheet, interfaces, soft AL 1100
(1) / 0020-34694 / Chamber wall
(2) / 0020-35595 / Liner lid TXZ
(2) / 0020-38067 / RF Match bongs
(1) / 0020-38890 / Cover, cathode DPS chamber
(9) / 0020-40091 / Insert. chamber slit valves
(1) / 0020-40683 / Coupling-flex
(4) / 0020-40696 / Teflons (QTZ Dome bottom)
(1) / 0020-40820 / Before system power is restored cover
(2) / 0020-41139 / Block roof top source (Assy)
(2) / 0020-41150 / Carrier lift assy E-chucks
(15) / 0020-41414 / Slit valve screws
(20) / 0020-41414 / Slit valve screws
(1) / 0020-70271 / Pivot
(3) / 0020-75041 / Loadlock door plates
(1) / 0020-75041 / Loadlock door plate
(8) / 0020-76473 / Bracket, gen racks, FLOO
(2) / 0020-76474 / Connector plate bracket, gen racks
(1) / 0020-76474 / Connector plate x bracket
(3) / 0020-79254 / -
(3) / 0020-80070 / Support bar, anti-cathodes
(3) / 0020-80626 / Top shield-arc chambers
(2) / 0020-81464 / Clamp strips WOHS
(3) / 0020-82053 / Remote insulators PFS
(2) / 0020-82055 / Thumb screws
(3) / 0020-82550 / Holder-pre-def-apertures
(1) / 0020-84219 / Front flate half graphite
(2) / 0020-96771 / Arm latches
(20) / 0020-96832 / Screws
(10) / 0020-98580 / Collet-filament clamps
(3) / 0020-98908 / Retainer, front plates
(1) / 0020-98951 / Aperture-EH5
(5) / 0020-98991 / Shield-feed-thoughs
(4) / 0021-07084 / UV Filters
(1) / 0021-07084 / UV Filter
(1) / 0021-10539 / Block-tapered retainer
(6) / 0021-17291K / Vespel focus ring flats
(1) / 0021-23214 / E-Max adjustable LIF
(10) / 0021-38052 / Sleeve inconel cassettes
(1) / 0030-20006 / Cover
(1) / 0040-03713 / Ring mounting dome
(1) / 0040-09221 / P5000 CVD Configured chamber
(3) / 0040-09723 / Poly chamber walls
(1) / 0040-13664 / Fixture, shipment motor lift
(4) / 0040-18141 / Ultima chamber covers
(1) / 0040-20056 / Adaptor elbow 0.25 VCR tonini
(2) / 0040-20165 / Bracket VCR cross mixed
(1) / 0040-20165 / Handle with glove
(2) / 0040-20165 / Bracket VCR cross mixed
(6) / 0040-22487 / Lift fingers
(1) / 0040-22848 / Strain relief coad plate
(2) / 0040-22848 / Strain relief cord plates
(4) / 0040-31943 / Mxp oxide lid
(1) / 0040-36095 / Bellows, heater lift
(3) / 0040-39619 / Super-E LID
(11) / 0040-39619 / Super-E LID
(1) / 0040-40197 / Relief valve kit
(8) / 0040-77401 / -
(1) / 0040-92353 / Cam motor
(4) / 0040-92904 / Feed-suppression
(2) / 0050-25675 / Gas line PRCS dump CH3 TXZ ENDI
(1) / 0050-26292 / Gas line vac chuck horizontal
(1) / 0050-26295 / Gas line edge purge horizontal
(1) / 0050-26296 / Gas line vac chuck horizontal
(1) / 0050-26297 / Gas line vac chuck horizontal
(1) / 0050-26298 / Gas line edge purge horizontal
(1) / 0050-26321 / Gas line bottom purge vertical
(1) / 0050-26322 / Gas line bottom purge vertical
(2) / 0080-01200 / -
(3) / 0090-09008 / I/O Valve wired
(1) / 0090-09017 / Motor assy robot ext
(1) / 0090-20112 / System lamp maintenance switch
(1) / 0090-20135 / Assy valve 4 way
(2) / 0090-20429 / Panel assy, MFC access
(1) / 0090-35006 / Pyro meter
(1) / 0090-35089 / RF Match in-place sw assy
(1) / 0090-35134 / Shell assy, ESC 195MM flat, DPS chamber
(2) / 0090-40014 / Over temp sensors
(1) / 0100-00014 / PCB-OPTP Detector
(1) / 0100-09000 / RF Match control board
(1) / 0100-09009 / PCB Assy-buffer board
(1) / 0100-09134 / PCB Assy DI do fuse
(3) / 0100-09217 / Injector TC intelocks PCB
(1) / 0100-20007 / PCB Pneumatic distribution
(1) / 0100-20145 / System lamp maintenance board
(1) / 0100-35066 / Chamber pneumatic interconnect
(1) / 0100-76181 / Wdb board
(1) / 0100-90025 / PWB-24V 1A PSU
(1) / 0100-90248 / SCIM PCB
(1) / 0100-90438 / PWB Source mag control
(1) / 0100-90450 / PWBA Arc voltage control
(1) / 0100-90460 / PWB-PA Vender interface
(1) / 0100-90573 / PWB Filament interface
(1) / 0100-90688 / PWB-Arc control module
(1) / 0100-90863 / HI Standard gas interlock
(1) / 0100-90969 / PWBA Assy w/f orint control
(1) / 0110-20027 / Contractor inter lock board
(6) / 0140-00457 / Harness assy, etch covers
(1) / 0140-00550 / Harness assembly
(9) / 0140-00928 / Harness assys, 30A, 3-Phase
(5) / 0140-01340 / Auto bias interconnects
(5) / 0140-18042 / HP Type buffer covers
(1) / 0140-20118 / Laser driver cable
(4) / 0140-20214 / Harness assy, lamp driver controls
(1) / 0140-20254 / LL/B Harness assy
(1) / 0140-20480 / Harness assy 4 SYS lamps IN
(1) / 0140-20540 / Cable assy
(1) / 0140-21668 / Harness assy, 3-Phase UPS test
(1) / 0140-21826 / Harness assy, chamber TXZ
(2) / 0140-21854 / N2 Heater power W180 manuals
(2) / 0140-21855 / N2 Heater W160C auto resets
(1) / 0140-36058 / Assy harness 24V ved power AGV interface
(1) / 0140-75111 / Treatment shiield harness assembly
(1) / 0140-76625 / Harness assy, centura MSM power
(5) / 0150-10440 / RF Filter-adapter assys
(2) / 0150-13079 / Cable assy, heat exchanges
(2) / 0150-13079 / Heat exchanger signal cables
(1) / 0150-16167 / Smif-assy lpt2200 interface
(1) / 0150-18058 / Cable assy robot MOTORA
(1) / 0150-18058 / Cable assy, robot MOTORA
(2) / 0150-20029 / Cable buffer robot inter connectors
(1) / 0150-20061 / Cable assy supply control
(2) / 0150-20143 / Wire, jumper 4-pin conn, gen rack emo
(1) / 0150-20160 / Cable assembly EMO interconnect
(1) / 0150-20167 / Turbo pump cable
(1) / 0150-20182 / Chassis GND cable
(1) / 0150-20537 / Cable assy pump control ch C, D
(1) / 0150-20601 / Able assy lid lift MTR control
(14) / 0150-21361 / NESLAB Interconnects
(2) / 0150-21936 / Cable assy, Endura integrated SMIF-lla
(2) / 0150-21939 / Cable assy, Endura integated ASYST SMIF
(15) / 0150-22021 / Cable assy, pupp EDWARDS
(1) / 0150-22416 / Cable assy, water leak detintc
(1) / 0150-70002 / HDD Cable
(2) / 0150-76190 / Cable assys, EMC, comp
(3) / 0150-90376 / PTIC Cables (380 mm)
(7) / 0150-90383 / Optic cables (4190 mm)
(3) / 0150-90384 / Optic cables (3000 mm)
(2) / 0150-90834 / Transzorb assys
(1) / 0150-91824 / Optic cable (510 mm)
(1) / 0190-01893 / C-5200 Power supply
(9) / 0190-09016 / Clipboard valves, 6"
(1) / 0190-09062 / Tc probe
(5) / 0190-09065 / Cable-motors 20-pin
(5) / 0190-09185 / (AL)TC PRST
(1) / 0190-09395 / Lamp driver chamber D
(1) / 0190-35101 / Isolation valve
(8) / 0190-35712 / P-Chucks TC line
(2) / 0190-36183 / Screws, drive, throttle valve DPS Poly
(40) / 0190-36349 / Cylinder 500W XE.Chambers
(1) / 0190-40016 / Roughing valve
(1) / 0190-40034 / SCSI Terminal
(1) / 0190-40051 / Irtc dome (Infra red)
(5) / 0190-40096 / Cable-heaters, 1100W
(2) / 0190-40097 / Wall T.C Sensors
(1) / 0190-40177 / (C, C)Roof heater cast ground
(1) / 0190-40177 / Heater, cast grounded
(1) / 0200-00136 / Focus ring (Rough, flat65)
(1) / 0200-00850 / (C, B) (CL) Quartz top ring cover ring, 8
(5) / 0200-00925 / (C, B) (CL) Quartz top rings
(3) / 0200-09445C / Ciner quartz upper
(2) / 0200-09446C / West coast quartz
(18) / 0200-09785 / Quartz ESC Cap 8
(5) / 0200-09786 / Quartz covers
(1) / 0200-10027 / Ring inner
(8) / 0200-10073-P1 / West coat quartz
(1) / 0200-10286 / Ceramic ring, finger lift plate
(1) / 0200-18081 / Cover low profile (Ceramic) HDP
(6) / 0200-20169 / Insulator coil support rigids
(6) / 0200-20170 / Cap, coil support rigids
(6) / 0200-20175 / Laryrinth, rigid coil supports
(1) / 0200-20215 / Housing, double RF connector
(13) / 0200-20216 / Screw-pin cover RF screws
(2) / 0200-34694 / Chamber out liner chamber walls
(2) / 0200-35343 / Rotation polys
(1) / 0200-36415 / Pumping ring c-shape
(1) / 0200-36417 / Pumping ring c-top
(1) / 0200-36418 / Pumping channel cover
(10) / 0200-38753 / Lift pins for MXP+ poly
(2) / 0220-22757 / Clear lid Chamber A-B
(1) / 0240-07480 / Kit, electrical integ
(1) / 0240-20300 / Kit, pneu per MFC / Final 2 gas
(1) / 0240-20307 / Kit, elec system ac terminal lugs
(1) / 0240-20309 / Main ac terminal lugs, kit
(1) / 0240-23499 / Pump kit hardware
(1) / 0240-23499 / Pump kit hardware
(1) / 0240-28194 / Kit, plug, signal lamp tower conductive
(1) / 0240-70432 / Kit, non-ups elextrical main AC Endura
(1) / 0240-70845 / Kit, GFI CB, basic
(1) / 0240-76735 / Kit, mount generator rack
(2) / 0240-94196 / Kit retro sources
(1) / 0242-70991 / Kit, pinch point guard, STD
(1) / 0242-70991 / Kit, pinch point guard, STD/WC chamber, wafer
(2) / 0242-75053 / Loader inter connect boards
(1) / 0270-40066 / E-chuck puller chamber B
(2) / 0620-02384 / Cables assy 6FT DB-9 female
(1) / 0620-02431 / Cable assy coax RG-217/U
(2) / 0630-01113 / Capacitors
(1) / 0630-01249 / Local match cap 800 PF 35A
(1) / 0630-01249 / Local match cap 1000 PF
(1) / 0630-01346 / Local match cap 300 PF
(1) / 0660-01505 / Mother board
(1) / 0660-01506 / Mother board
(1) / 0660-01536 / Back plane VME board
(1) / 0660-01643 / Personality board
(2) / 0680-01169 / Circuit breakers
(1) / 0680-01552 / Circuit breaker
(3) / 0720-01705 / Connector-stran reliefes
(2) / 0720-03077 / Match source connectors
(1) / 0730-01026 / 0190-09335 / Turbo pump controller
(2) / 0880-90002 / Encoders type 09A3-K139 VAC
(4) / 0910-01073 / Panel mtg fuse HLDR bodies
(5) / 0910-01077 / Fuse dual time delays
(1) / 1010-01063 / Lamp pilotl TRND full voltage
(4) / 1010-01137 / Lamp main bodies
(6) / 1010-01137 / Lamp fixtures, 36"
(1) / 1010-01175 / Ozone monitor uv lamp
(1) / 1120-90010 / Sight glass-assy-w/f
(1) / 1120-90011 / Sight glass 0120x10
(4) / 1200-90069 / Relay-G6A
(5) / 1270-01357 / Switches
(2) / 1270-90108 / Switches micro
(1) / 1270-90113 / Switches, micro module
(1) / 12-8800-124 / Assy CYL POS sensor PNP
(2) / 1290-01832 / Term covers SCB earth LKG for EG104A Poly
(5) / 1400-90006 / Sensors LED
(2) / 1400-90022 / Sensors LED-type L33008
(1) / 3080-01151 / Timing belt
(4) / 3300-01895 / Slow pumping bellows
(2) / 3300-02811 / TBG EL 90DEG UN 3/8T Males flare x 1/4MPT
(1) / 3300-90989 / FTG Tube males
(2) / 3300-91061 / Gauge thermistor thermals
(1) / 3310-01024 / Meter flow water
(1) / 3310-90009 / Gauge-penning
(30) / 3320-01056 / GSKT-RF SHLDG
(2) / 3320-90015 / Gasket spec for heat sinks
(10) / 3420-90018 / Insulator filaments
(1) / 3690-02084 / Cap SKT HD 1/4-20X
(20) / 3690-02350 / Support elbow screws
(2) / 3780-02249 / Ground springs (Large)
(1) / 3860-01028 / TBG, Wall polyethylene NAT
(10) / 3860-01596 / Supply tubes
(11) / 3870-01043 / valve Meters 1/4"
(3) / 3870-02061 / Water control valves
(1) / 3870-02260 / Valve adapter press relc
(3) / 3870-90208 / Heat exchange solenoids SS
(1) / 5010-01041 / ADH Pipe sealant 50ml
(1) / 5010-01080 / ADH Activator.
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