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ID: 9265689
Qty / Part number / Description
(6) / 0010-02170 / Assembly, left hand, pivot and bearings HP+/V
(5) / 0010-02171 / Assembly, right hand pivot and bearings, HP+
(4) / 0010-36202 / Assembly, wafer pins
(4) / 0010-76317 / Centura indexer motor Assemblies
(3) / 0020-17939 / SHIM, C-ESC, 1 HE Zone, 8" SNNF/JMF
(1) / 0020-20439 / Viewport, cover buffer / Wafer orienter
(3) / 0020-33804 / Adapters, Gas feed, DPS MEC
(12) / 0020-34988 / Restrictors, Helium flow, bulkhead
(6) / 0020-84127 / Foil, thermal base-to-pedestal DPS ESC
(1) / 0021-03094 / Edge ring, purge heater
(2) / 0021-09511 / Insulators, cathode base, 8", DPS
(4) / 0021-09543 / MTG Block, VPP, Cathode, DPS
(7) / 0021-09546 / LUG, Ground, cathode, DPS
(8) / 0021-09591 / Plates, ground, top, cathode bulkhead, DPS
(9) / 0021-23213 / Lift pins
(8) / 0021-36719 / Bulkheads, water, lower chamber, main, DPS
(22) / 0021-70283 / Bulkheads, water, lower, chamber, DPS poly
(17) / 0040-32053 / Weldments, bellows, wafer lift
(2) / 0040-75904 / Bellows wafer orienter
(6) / 0050-04348 / TEE Reducer DPS chambers
(3) / 0090-03823 / Assembly, sensors, wafer present / Wafer slide
(5) / 0090-03861 / Loadlocks brake indexer assembly
(8) / 0090-09079 / Lamp assy, mercury 16" leads
(1) / 0090-09165 / Assembly, RF peak voltage, cathode, DPS
(3) / 0090-09166 / Assembly, HV ESC, 8"cathodes, DPS
(3) / 0090-76037 / Assembly, LED-WB, Fast wafer mapping
(1) / 0100-00793 / PCBA VGA Display W/LP
(1) / 0100-01098 / PCBA Laser driver II
(4) / 0100-01321 / AssemblyPCB digital I/O DIO boards
(6) / 0100-02016 / PCB Assembly, analog sync detects
(1) / 0100-09042 / PCB Assembly, opto switch
(1) / 0100-13025 / Assembly, PCB video / Serial dist board
(10) / 0100-20073 / PCB Assembly, wafer detectors
(3) / 0100-35054 / PCB Assembly, chamber interfaces
(3) / 0100-35250 / PCB Assembly, chamber interfaces, Centura DPS
(6) / 0100-76038 / Assembly, PCB LED-NB, fast wafer mapping
(1) / 0140-01886 / Harness assembly, service / Process manometers
(8) / 0140-13083 / Harness assembly, wafer lift driver assemblies
(3) / 0190-00283 / Pneumatic manifolds, etch Centura II
(4) / 0190-30355 / Light pens SST 5V 20MA with phone jack connector
(2) / 0190-70108 / Assembly, PCB mxp chamber interfaces
(4) / 0190-75039 / BRG Balls 7/8 od x 3/8 id x 7/32 w, 1 row
(1) / 0200-01118 / Window quick release endpoint window
(1) / 0200-01374 / IRM quartz collimator
(2) / 0200-01463 / Shadow rings, quartz, 63 ra, 200 emax
(48) / 0200-02116 / Injectors, gas, 24 holes, 0.020 dia, 0.68 l
(5) / 0520-01036 / ACTR RTRY 100 deg dbl vane greaseless
(2) / 0720-02672 / Conn 6 cond rotating feed through
(1) / 0870-00036 / 5 Phase driver, stepper motor bipolar
(5) / 0910-01083 / Fuses pico 2 a 125 vac 0.095 diax.28 lx1.47 a
(2) / 0910-01139 / Fuses slo-blo time-delay 1 a 500 v 13/32 x1
(47) / 1010-01088 / Lamp bulbs 1000 w clear can
(4) / 3080-01030 / Belts TMG 3 MMP 6 MMW 96 T HTD Neoprene
(22) / 3080-01050 / Belts TMG pulley 3 mm pitch 18 g 9 mm wide
(12) / 3080-01163 / Belts TMG 0.080 P 1/4 W 70 T 15.4 LB kevlar
(4) / 3300-01963 / FTG QDISC 3/8T x 3/8
(2) / 3300-00005 / FTG Conn union 9/16-18SAE with o-ring SST
(8) / 3300-02734 / FTG TBG 1/8T x 10-32 ENP ONE-TOUCH
(4) / 3310-01055 / Gauge convector tube 1/4 FVCR
(12) / 3320-01102 / GSKT SHLD RF 1.987ID x .103THK BC TIN
(8) / 3320-01166 / GSKT VCR 1/2 SST contoured RTNR
(2) / 3320-01170 / GSKT SHLD RF .125DIA 2LB/LIN-IN LOW-
(20) / 3690-01074 / SCR CAP SKT HD 1/4-20 x 5/8L HEX SKT S
(18) / 3690-01089 / SCR CAP SKT HD 8-32 x 3/8L HEX SKT SST
(40) / 3690-01169 / SCR CAP SKT HD 4-40 x 1/2L HEX SKT SST
(44) / 3690-01547 / SCR MACH BTN HD 2-56 x 1/8L HEX SKT SS
(4) / 3690-03048 / SCR CAP SKT HD 10-24X1L S
(52) / 3690-03713 / SCR CAP SKT HD 10-24 x 1/2L HEX SKT TI
(10) / 3690-03835 / SCR CAP SKT HD 10-32X5/8L HEX SKT 316
(29) / 3690-04629 / SCR CAP SKT HD 10-24 x 5/16L HEX SKT T
(1) / 0010-10185 / Assy drive
(2) / 3700-03162 / Seal assy flanged 1.218 id 1.853 od .250 X
(29) / 3790-01208 / Spcr. shaft .37od replaces 3790-01285,
(2) / 3870-01767 / Valves pneu diaph 140psig 1/4-f/f nc 1/8f
(26) / 3880-01007 / Washer flats 8375od x 174id x 031thk s
(10) / 3880-01010 / Washer flats 5/16 .563OD x .328ID x .063 THK SST
(20) / 3880-01026 / Washer LKG SPLIT 1/4 .487OD x .260ID x .062THK SST
(1) / 116581 / Robot arm enabler
(2) / 200131 / Heater kit assy compartments
(1) / 2809054 / Washer fender
(1) / 2840042 / Pin dowel
(2) / 100314913 / Fore line bellows NW25
(10) / 100318901 / Assembly, FLG, bulkheads, NW16, AL
(1) / 30704140200 / Feed through right
(5) / 000-1134-717 / Box interlock covers
(3) / 0010-01659 / Assembly air regulators MDPS EDTCU
(1) / 0010-02233 / Assembly, standard reach, DBR linkage, 12", enabler
(1) / 0010-06544 / E-Max, 8", t.v assy
(2) / 0010-13445 / Cudd monitor bases
(1) / 0010-17405 / Enabler robot wrist
(2) / 0010-19575 / Spring housing
(1) / 0010-20339 / Assemblyorienter rotation motor
(3) / 0010-23243 / Vhp + direct drive covers
(2) / 0010-28447 / Assembly rf match to hv modules
(1) / 0010-30064 / Analyzer cathode
(2) / 0010-30142 / Assembly, harness channels, left, DPS
(3) / 0010-30143 / Assembly, harness channels, right, DPS
(1) / 0010-31999 / Assembly orienter rotation motor
(1) / 0010-39665 / 3 Way valve
(1) / 0010-75226-001 / Throttle valve, 8" etch down stream
(5) / 0010-75433 / Robot magnet pole assemblies
(1) / 0010-76859 / Detector assembly, left fast wafer mapping
(1) / 0015-00664 / Plug liner ground strap, 8" eMax
(44) / 0015-01657 / Captive screws, 1/4-20-2.325 lg
(52) / 0015-02659 / Rev 03, screws captive
(16) / 0015-09078 / Pulley motor modified throttle drives
(7) / 0015-09092 / Gaskets
(4) / 001-9093-01 / Bellow flex
(2) / 0020-14774 / Vat pendulum plates
(2) / 0020-21699 / Laser lamps
(1) / 0020-25769 / Upper wing dual robot
(1) / 0020-25770 / Wing, lower
(7) / 0020-31162 / Screws
(4) / 0020-33773 / Housing bush cathodes
(5) / 0020-33805 / Gas feed adapter covers
(1) / 0020-34972 / Hoop, 6" wafer lift
(2) / 0020-38890 / Cover, cathode, DPS chambers
(2) / 0020-38923 / Endpoint plugs DPS MEC
(15) / 0020-40164 / Plug holes
(4) / 0020-45263 / Insert 2
(6) / 0020-60665 / Insulators, lift pin vespel, IADB
(1) / 0020-91292 / Liner pump port throttle valve, eMax, 8"
(3) / 0020-98018 / Cap flanges
(1) / 0021-01552 / Strap, bias option, RF and HV feed, ceramic
(1) / 0021-01553 / TBV Drive assembly, throttle valve 15:1 geared
(3) / 0021-01555 / Rod, top, RF feed, ceramic ESC
(2) / 0021-01588 / Bushing nut RF and HF feed
(12) / 0021-03940 / Clamp domes, 8"
(1) / 0021-04312 / Flat top secondary throttle valve
(1) / 0021-04316 / Flap, bottom, secondary, throttle valve
(1) / 0021-04317 / Flap, bottom, main, throttle valve
(1) / 0021-04318 / Linear pump port throttle
(2) / 0021-04544 / Pin tip wafer lifts
(1) / 0021-07079 / Cover cathode liner cooling
(10) / 0021-07089 / Manifold water chambers liner eMax
(11) / 0021-08231 / Bushing tops, 8" super
(2) / 0021-09443 / Plate manifold cathode bulkheads (Cathode cover)
(4) / 0021-09445 / Clamps, bulk HD, RF pin, cathode DPS
(2) / 0021-09447 / Guide cable cathodes
(3) / 0021-09448 / Adapter bulkheads 3/4-20
(2) / 0021-09540 / Actuator interlock cathode bulkheads DPS
(3) / 0021-09544 / Enclosure PCB cathodes VPP DPS
(7) / 0021-09592 / Plate insulator top cathodes DPS
(6) / 0021-09593 / Clamp centering cathode bulkheads DPS
(10) / 0021-09594 / Clamp insulator cathode bulkheads
(1) / 0021-10851 / Asp cap flange
(1) / 0021-13406 / Clamp liner ground strap, 8" eMax
(1) / 0021-25381 / Cover, lower liner, 12", IA
(1) / 0021-25382 / Washer, lower liner, IA
(4) / 0021-25553 / Bushing, endpoint window
(1) / 0021-27546 / Diffuser, air AMPL, E-DTCU, DPS
(1) / 0021-35566 / Cover, gases, inert gases
(6) / 0021-39670 / Plate, weight dispersion
(16) / 0021-70281 / Cover front, chamber cooling, DPS
(1) / 002-4234-02 / PCBa board
(1) / 002-7691-02 / Robot arm
(4) / 0040-00890 / Bellow, slit valve
(1) / 0040-06368 / Floor panels
(3) / 0040-13264 / Elbow, LLC exhaust TTF Centura
(4) / 0040-31844 / Assembly, bellow, lift pin, DPS+
(1) / 0040-31953 / Adapter gv bottom chamber
(1) / 0040-61075 / Assemblyplate
(6) / 0040-64809 / Holder, l.pin
(1) / 0040-82964 / Plate cooling, 12" enabler
(1) / 0041-03157 / SWLL BLW Enhanced assy
(1) / 0050-08251 / Micro fitting
(1) / 0050-33128 / Weldment, cross, 4 VCR, DPS chamber
(1) / 0050-85537 / Weldment, FRC forline dump, 8" emax
(1) / 0085739-000 / CCD Turbo pump tooling
(4) / 0090-00935 / Harn assy
(2) / 0090-01548 / Switch assembly, SMIF Centura interlock
(1) / 0090-04370 / Electrical assembly, high voltage connector b/c ceramic ESC
(1) / 0090-36126 / Assembly, vacuum SW 76 TORR VC
(1) / 0090-36422 / Electr assy DTCU embient
(1) / 0100-00246 / Chamber interconnect
(2) / 0100-00975 / Assembly stepper controller
(1) / 0100-01344 / Loadlock interlocks board
(1) / 0100-01792 / PCB Assembly, 5-phase stepper driver interface
(1) / 0100-02797 / Wafer oriented controller
(1) / 0100-20051 / Turbo interconnect
(1) / 0100-20068 / CCD Board
(1) / 0100-35034 / Assembly stepper driver
(1) / 0100-35053 / Mainframe interlock
(1) / 0100-76065 / Assembly interconnect (T-I)
(3) / 0100-76251 / Differential encorder/receiver
(1) / 0100-76252 / Differential encorder XMTR
(2) / 0100-76259 / Wafer orienter board
(2) / 12686 / 332148 VGC
(1) / 0140-04417 / Harness, assy XFER chamber OTF VHP
(1) / 0140-37763 / Harness, 208 vac / 15 amp ac
(2) / 0140-38166 / Harness assy, DTCU IR SNS
(1) / 0150-05311 / Flexi cable
(1) / 0150-12868 / RF Cable meam
(3) / 0150-19915 / Cable assembly E/P module key board interface
(2) / 0150-25586 / Cable assembly
(1) / 0150-35966 / Cable assembly power 15 ft
(2) / 0150-36045 / Cable assembly
(3) / 0150-36477-04 / 2 Pin jumper
(5) / 0150-39369 / Cable assembly TC gauge POS
(1) / 0150-70039 / Cable assembly, ENI IFT
(1) / 0150-76322 / M17/78-RC217 Cable
(1) / 0190-00318 / VGA Video controller assembly board
(5) / 0190-03234 / Kit actuator (Enabler slit door actuator)
(1) / 0190-07449 / SCOM CPCI Board
(5) / 0190-09597 / Applicator body asp
(1) / 0190-10052 / Interlock module
(1) / 0190-10673 / Assembly, signal tower
(6) / 0190-12373 / Bolt RDSB m12 x 31.5 mm SKT HD
(8) / 0190-12805 / Slit valve bonded with anodized alum
(1) / 0190-23122-001 / Rf navigator a
(2) / 0190-23509 / SCOM CPCI
(1) / 0190-24445 / Motion controller
(1) / 0190-24753 / PCI-946/FLA/02
(1) / 0190-34347 / Specification, 17" monitor elo compliant
(5) / 0190-35700 / Tower light
(2) / 0190-37099 / Ethernet switch DLINK 28 port DES-3528
(1) / 0190-37992 / Interface card
(2) / 0190-39114 / MANF Assy pneumatic 8-station 1/4 T
(2) / 0190-75084 / VGA Video controller boards
(1) / 0190-76205 / MFLD assembly, SPL
(1) / 0200-03471 / Single crystal silicon, top ring
(1) / 0200-04633 / Bottom ring mech polished, 8"
(3) / 0200-04826 / Bottom ring quartz flame polished, 12" enabler
(4) / 0200-09074 / Window (Heater, 8")
(2) / 0200-09441 / Window slit asp
(7) / 0200-10296 / Insulator bulkhead cathode DPS
(2) / 0200-35293 / Window, manometer, DSPP MEC
(1) / 0200-35294 / Quartz lower chamber VPRT DPS
(1) / 0240-08038 / Kit actuator
(1) / 0240-49861 / Kit IPUP components route-SHPK single IPUP
(4) / 0242-11912 / Kit, auxillary ground strap, emax
(1) / 0242-41147 / Kit, swap, 8" eMax VHF
(1) / 0242-42103 / Kit, cathode, 8" eMax VHF
(2) / 0270-00249 / Electrostatic chuck cover
(2) / 0270-00466 / Tool VHP+wing lower bearing
(1) / 0270-02862 / 8" Wafer alignment cover and calibration tool
(1) / 0270-03750 / Probe housing assembly
(1) / 0270-04107 / Lift fixture, RF match, enabler
(1) / 0270-20032 / Wafer, test orientor 8"
(2) / 0300-00234 / Flashrom orienter
(1) / 03-0148-200 / Etherlink XL PCI
(1) / 040406L021319 / Membrane contactor
(2) / 0520-01043 / Actuator rotary spl
(1) / 0620-01119 / GPC Cable
(10) / 0680-01158 / CB Keeper nut for f-frame breakers 10-32 THDS
(3) / 0690-01038 / Clamp hinged NW25 wing-nut and scr-closure
(1) / 0720-01134 / Conn RCPT PNL MTG 1 POS COAX UG58 A/U
(1) / 0720-01598 / Conn coax adptr angle JK-plug type
(1) / 0730-01050 / Con VRS-232 to rs 485 balanced full/half
(1) / 0760-01001 / Black body adapter
(2) / 0980-00003 / Cherry keyboard
(1) / 1000WOG / HTC Ball valve
(1) / 1110-00083-002 / RF Navigator
(2) / 1110-00099 / Network switch, ENET 5 port 10/100 base
(1) / 111T1039-01 / Weldment snorkle, 12" capsule bcf weld
(1) / 111T1674-01 / Nozzle nut lower, 8" capsule snorkle
(2) / 1140-01337 / Power supply dc +5 v, +12 v, 5 v, 12 v, 150 w, 85-264 vac, power supply DC
(6) / 1150-01019 / Probe spr .054 da x .97 lg .16 travel-no
(3) / 127AA-00010B / 10 torr pressure transducer (cu), enabler
(1) / 1410-00157 / Htr block manual valve 15.03 v.2.54 w
(1) / 1701-0053 / Torrington connecticut
(1) / 1757930070G / Power supply
(2) / 210T0206-03 / Rotor asm uper vt 1.5 alignpin 3 weer rdr
(3) / 3020-00317 / Emax, slit door lner cylinder
(7) / 3020-00357 / Nco2 air cyl spl
(1) / 30299-234-50 / Seriplex bus interface cable
(35) / 3060-01177 / Brg ball flg 1/4 id 1/20 od 1/8 w sst 4
(1) / 3300-01348 / FTG flange blank-off nw50 2.95 od x .20 thk sst
(1) / 3300-02518 / FTG hose barb 3/8 id x 1/2-14 mnptf sst
(4) / 3300-02650 / FTG TBG plug 1/2 t 37 deg flared
(2) / 3300-02788 / FTG Union tee 3/8 x 3/8 one touch
(4) / 3300-02789 / FTG TBG rdcr plug-in 1/4 t x 3/8 t one-touch stl
(8) / 3300-02936 / FTG el 90 deg 3.17"r iso kf50 sst
(12) / 3300-04298 / FTG TBG conn 9/16-18 mp x 11/16-16
(1) / 33021-609 / Schroff board
(15) / 3320-01056 / Gasket RF shldg finger .37 x .14 flex bec
(20) / 3690-01024 / SCR MACH BDG HD 8-32 x 1/2L SLOT SST
(20) / 3690-01027 / SCR MACH BDG HD 8-32 x 3/8L SLOT SST
(20) / 3690-01030 / SCR MACH BDG HD 10-32 x 1/2L SLOT SST
(20) / 3690-01086 / SCR CAP SKT 8-32 x 1/2L HEX SKT SST
(20) / 3690-01092 / SCR CAP SKT HD 10-32 x 3/8L HEX SKT SST
(28) / 3690-01140 / SCR MACH BDG HD 4-40 x 5/8L SLOT NYLON
(10) / 3690-01161 / SCR CAP FLT HD 1/4-20X2.5L PHIL 82DEG SST passivate
(20) / 3690-01429 / SCR CAP SKT HD 2-56 x 1/4L VENTED HEX SKT SST18-8
(20) / 3690-01453 / SCR CAP SKT HD 6-32X1/2L HEX SKT SST
(20) / 3690-01478 / SCR CAP HD 8-32X1/4L HEX SKT SST
(20) / 3690-01506 / SCRSH MET PAN HD 6 x 3/8L SLOT SLFTPG "AB" STL
(20) / 3690-01538 / SCR CAP SKT HD 10-24 x 1/2L HEX SKT SST
(5) / 3690-01624 / SCR CAPTIVE PANEL 4-40X.468TLX.187THD HEX SKT SST
(92) / 3690-01666 / SCR SET 6-32 x 1/8L HEX SKT SST CUP
(20) / 3690-01799 / SCR CAP SKT HD 5/16-18 x 5/8L HEX SKT SST
(34) / 3690-01883 / SCR CAP SKT HD 1--24X5/8L HEX SKT SST S
(22) / 3690-01978 / SCR CAP SKT HD 5/16-18 UNC 2.75L SST SLV
(46) / 3690-02022 / SCR CAP SKT HD 6-32X7/16L HEX SKT SST S
(6) / 3690-02032 / SCR PANEL MTG 10-32 x 1/2L PHH with WSHR-NYL
(20) / 3690-02217 / SCR CAP SKT HD 8-32 x 1/2L HEX SKT SST
(90) / 3690-02518 / SCR CAP SKT HD 4-40X3/8L HEX SKT SST SLVR-PLT
(20) / 3690-02674 / SCR MACH PAN HD 1/4-20 x 1/2 PHH STL ZINC PLT
(50) / 3690-02954 / SCR CAP SKT HD 10-32 x 1L HEX SKT SST SLV
(5) / 3690-03593 / SCR CAP SKT HD 10-24X1.12L HEX SKT SST
(19) / 3690-03718 / SCR CAP SKT HD 10-32X1/2L HEX SKT 31
(1) / 3690-03967 / SCRCAP SKT HD 10-32 x 1.0L HEX SKT 316SS
(22) / 3690-04379 / SCR CAP SKT HD 10-24 x 1.0L HEX SKT TITAN
(60) / 3691-01357 / SCR CAP SKT HD 10-32 x 1/3L TORX T27 316
(30) / 3691-01543 / SCR FLT HD 2-56X1/8L TORX T8 82DEG 316
(22) / 3700-03163 / Seal ASSY 1.218ID 1.436OD .254X .218CS
(3) / 3780-01107 / Spring
(8) / 3780-01161 / Copper washer
(21) / 3780-01212 / SPRCPRSN, 500FL x .240OD x .020WIRE-DIA
(6) / 3780-02271 / SPRCPRSN 3.00FL x .720OD x .085WIRE 316S
(3) / 3800-00130 / Valve
(9) / 3800-01057 / RGltr air pressure 5-50 PSIG 1/4 NPT W/G
(1) / 3870-01865 / CVNL K1 NOZZ F12 Compact vacuum
(1) / 3870-03211 / VLV, IDA, APLD 3870-LE332-E1, ISO Valve
(1) / 3870-04611W / TGVVF 250HA with CLSD PSTN SNSR No bearing enabler
(20) / 3880-01004 / Washer flat 4.312OD x .125ID x 0.31THK SST
(20) / 3880-01008 / Washer flat 10.438OD x .219ID x 0.49THK SST
(22) / 3880-01023 / Washer LKG SPLIT 6 .25OD x .148ID x .031THK SST
(20) / 3880-01102 / Washer LKG SPLIT 10 MED SST
(20) / 3880-01129 / Washer LKG SPLIT 1/4 .487OD x .260ID x .062THK SST
(1) / 3920-00013 / Tool feeler gauge set 16 leaves 3" LG
(1) / 39Y8993 / Fes server
(1) / 3NS003S-C201 / CCD Aligner, 8"-12"
(2) / 4001-8672-01 / Protection strip
(8) / 4002-1213-01 / Versa port mini-environment cover guide shaft support
(6) / 4002-1515-01 / Versa port mini-environment cover guide with roller (Right)
(1) / 4020-01214 / Filter in-line gas 700P SIG 1/4VCR-MM 30SL
(8) / 4029595-00X / LUG, Ring terminal
(4) / 41A-21439 / 10 Torr pressure transducer
(12) / 4A-Q4CY-SSP / CPI/A-LOK Series instrumentation couplings
(12) / 4A-Q4VY-SS / CPI/A-LOK Series instrumentation couplings
(1) / 5070-00006 / GRS 2ML Syringe
(1) / 5070-01035 / Lubricant
(4) / 51A-21440 / 30 Torr pressure transducer
(1) / 605-099141 / PCI Mezzanine card
(1) / 640A-15715 / Pressure controller
(1) / 67064-R1 / Leaf spring
(1) / 713-020033-001 / Fxtr, leveling, single axis, aligner
(2) / 714-003271-001 / Cov, upper bellows, slot valve
(1) / 715-003243-002 / Pl, Thermal ISO, VAT VLV
(4) / 715-005539-001 / Tube stabilizing
(3) / 715-461173-006 / Lftr, wafer, sgl pin, conductive, al
(61) / 715-495022-001 / SCR, LOW HD, VNTD,.250-20 x .625
(95) / 720-000930-004 / SCR, SCH CAP, 6-32 x1/4"lg, SST
(100) / 720-094011-005 / SCR, FLH, SKT, 6-32 x5/16, 316 SST
(18) / 722-000958-001 / Nut, hex, 10-32
(24) / 723-140523-001 / Plunger roller set screw (Washer, flt, .312 od, .192 id, .02 t)
(4) / 7500-1043-01 / Versa port belt
(21) / 796-092578-002 / Clamp, single claw, iso-mesc
(3) / 796-495053-001 / Vlv, fst act, nw40, viton, hps
(2) / 810-492667-001 / Assy, PCB, power supply tst pt
(1) / 81177-R1 / Generic 81177-r1
(1) / 81178-R1 / Generic 81178-r1
(1) / 853-015030-001 / Minimatch controller
(1) / 853-015982-001 / TCP Controller
(1) / 853-470584-104 / Piping set
(3) / 872B12PCJ2MT1 / Baratron pressure transducer
(4) / 8A-Q8CY-SSP / Quick coupling female coupler 1/2" body 1/2"t and adapter
(5) / 8A-Q8VY-SS / Quick coupling male socket with a-lok tube end
(16) / 8MSC8N-316 / Male connector 1/2"A-LOK-1/2 NPT
(1) / 90-0002-01 / Analamp bhk uv power supply
(14) / 91-02110A / Ring shadow, quartz, emax
(6) / 920-096689-006 / FTG, nut, brass, 3/8
(4) / 920-096690-006 / Ferrule, bk, brass, 3/8
(4) / 920-096691-006 / Ferrule, fr, brass, 3/8
(2) / 9599-0193 / HTR 2.6 BEL / RED SPEC 3 LP5 MEAM
(4) / 9701-3262-01 / LPT Assy
(3) / 9835-01030519 / Board
(2) / AN3D9000 / Valve
(1) / AS00348-02 / Blue box 4000 x
(4) / AS2201F-01-01 / Speed controller
(10) / AS3201F-02-07 / Screw speed control fitting 1/4
(10) / AS3201F-03-07 / Screw speed control fitting 1/4
(6) / AS3201F-U03-07 / Speed controller
(1) / B71732000 / TMS Water valve
(2) / CDRB1BW50-48-UIA9B0592 / Cable
(1) / E17117740 / Weight, LWR, 12"
(1) / E17259190-A / Bracket
(1) / E17271691 / Metal A
(1) / E17333530 / Metal B
(1) / E17353860 / Metal A
(2) / E17377850 / LT-773655
(1) / E18000490 / Locator platform
(1) / E1-D3403M / Shimadzu pump tmp2203/3403
(1) / E40000514 / Handle pull snap-in
(1) / E40001486 / Spring comp ss 0.60"
(1) / E50000140 / Standoff male female
(1) / FI20032 / Smart match detector
(4) / FRCA-26282 / Delta flow ratio controller
(1) / FRCA52163310 / Delta flow ratio controller
(2) / FSCM-92180 / RF Connector TRU-6934
(5) / HBL2721 / Electric socket male
(2) / HBL2723 / Electric socket female
(1) / HX-4KW-TEF-HTR / 4 kw temperature system controller
(2) / IPC-6908BP-25ZB / Endpoint pc
(10) / KQ2E11-36 / Fittings
(5) / KQ2H10-01S / Fittings
(5) / KQ2L11-36S / Fittings
(10) / KQ2L13-35S / Fittings
(5) / KQ2T11-00 / Fittings
(3) / M-64-S31-000-021 / Flow switch enablers
(4) / P020066600 / Heater jackets
(1) / PF2W720T-03-27 / Digital flow switch
(1) / PF2W720T-04-27 / Digital flow switch
(5) / POU-3-NSV1 / Gas filters emax
(3) / PSE300-DUK01574 / 2300 Vacuum sensor valve set
(1) / PV48W-55 / Vacuum switch
(1) / QCR3030HT / Circuit breaker
(1) / RXN-3005A / Regulated dc power supply
(2) / SS-DLV51 / Diaphragm valve SCII CLN swagelok
(1) / T806732 / Rpls 8210 d1 inc prfx ft, gs
(1) / THERMO / Thermo chiller cpu board
(1) / US33711 / Gage sensor
(2) / VQ1301N-51 / Solenoid valves
(4) / VQ1A01N-51 / Solenoid valves
(5) / VVQ1000-10A-1 / Blanking plate assy
(1) / WA00300-01 / Cable assy
(1) / ZS-DUJJ00166 / Sensor cable
(4) / 0010-09672 / Plasma sensors assy, prsp
(1) / 0010-31691 / Assy, htd cross wldmt, seiko
(2) / 0010-40155 / Assy, wafer sensors
(19) / 0015-00433 / Capacitor, 390 pf 3.6 kv 5% axial, ceramic
(1) / 0020-13048 / 0020-13048 spindle, calibration wafer
(1) / 0020-52501 / Lower chamber liner
(1) / 0021-25555 / Pin, holding showerhead, top
(9) / 0021-25619 / Shim, vespel, shower plate, ia
(18) / 0021-25947 / Screw, 8-32 x .20 l, vespel
(2) / 0050-00497 / Gas line vds, 2 vlv, prcs 5 ra, veriflo
(3) / 0100-00245 / PCB, assy, controller
(3) / 0100-01130 / PCB assy ccd
(1) / 0100-20070 / 0100-20070 PCB assy, mag/lamp dist
(2) / 0100-35248 / PCBa, tc intlk trip 350 deg c reset 275 ear99
(3) / 0190-36715 / PCB, gp io distribution
(19) / 3690-01167 / Scrcap skt hd 4-40 x 5/16 l hex skt sst ea99
(2) / 3690-01198 / Cr cap skt hd 10-32 x 3/4 l hex skt ss
(100) / 3690-03807 / Scrcap skt hd 8-32 x 1/2 l hex skt 316 sst
(2) / 4020-01285 / 4020-01285 fltr gas 1000 psig 1/4 mvcr 3.31"l nkl
(1) / 0150-35560 / Cable, signal tower interface, RTP
(2) / 3870-01213 / Valve pneu nw 25 flange
(1) / E11061420 / Amplifier assembly / sense / RF Shielded
(3) / E12000810 / Motor / Lifter / Modified / Multi
(2) / E12005133 / Ropins motors
(1) / SDS60US24 / AD IO Power supply repair
(1) / E15000101 / Multy-electrode manipulator servo PCB
(2) / E15002354 / PCB assy / Power supply / controller
(2) / E15004550 / PCB Assy / Digital / i/o
(1) / E41000153 / Belt/timing/poly/110 gr
(1) / E77000214 / Cable/fiber optic
(2) / E58000040 / Receptacle/twistlock/30 a/250
(1) / E16000141 / Lens power supply power cable assy
(1) / E15006440 / PMC A9 Card
(1) / EX257B / 3-phase monitor / model EX257
(1) / 1517220 / PCB
(5) / E15005380 / PCB assy three port loop master
(2) / E15000206 / PCB assy motion controller
(4) / E15000206 / PCB assy motion controller
(1) / 1517310 / D.i.power conditoner
(1) / E15003880 / Beam dropout detector PCB
(1) / E169497 / PCB
(1) / E15004060 / Pcn assy p.s. controller
(3) / E15000340 / PCB assy, no optical switch
(3) / E15004320 / Photodiode
(1) / 1521330 / PCB
(1) / E15006690 / Setup cup PCB
(1) / E15005390 / Icon light link interface
(1) / E15005220 / PCB aasy suppression control
(1) / E15000300 / Linear servo amplifier
(1) / E15004550 / PCB assy digital i/o
(1) / E15000400 / Asm ion implant ampl assy
(1) / E23000311 / Amplifier, switching servo
(1) / E15005381 / PCB assy dual port loop master
(1) / E15005382 / PCB assy dual port loop master
(3) / E15002030 / PCB exhaust leakage monitor
(3) / PT1010258-04M / PCB
(2) / E15005611 / Graphics PCB
(2) / - / PCB
(2) / E17183220 / Bearing way rotating
(1) / E17138240 / Mh set-up cup insulator, mount plate
(2) / E3000398 / E60000098 / Sensor amp fiber opt
(1) / 275806-EU / 275 gp mini convectron
(1) / 449321 / Water leak control board
(1) / E15001650 / PCB Assy 24 digital output
(2) / E15004180 / PCB Robust loop master
(1) / E15000200 / Motion controller PCB
(1) / E15000209 / PCB Assy motion controller
(1) / E15000201 / PCB Assy motion controller
(1) / 1523800 / Rotatary drive interface
(1) / ED88 / Linear way (Aligner)
(1) / 1615820 / Cable
(4) / E35000577 / Seal, leap, rulon s2
(1) / E16321160 / Connection wire
(2) / UFC-1660 / Unit ufc-1660 (mgc gas n2, 12sccm)
(2) / E11061452 / Y scan motor magnet track (connector for le02, le03, mh01 and mh02)
(1) / E16003313 / Cable auto decel set
(1) / E11291700 / Platen assy, remote chiller
(1) / E11321580 / Assy, platen temp sense controller, ces
(1) / E17007481 / Accel suppression ring, 16 in., si coated
(1) / E17041951 / Shaft vertical elevator drive
(1) / E65000494 / Phase monitor relay 3 phase
(1) / E12005121 / Sensor, proximity, modified
(1) / E19000070 / Manipulator, bellows
(3) / E15000330 / PCB assy, nc optical switch
(1) / E40000907 / Spacer, nylon, round, 1/2 od x 5/8 l
(1) / E40000905 / Standoff, round, nylon, 1/2 od x 1/4 id x
(1) / E17098580 / Adjust, led, cover assembly
(1) / E11084400 / E11084401 / Sensor assy chamber
(1) / E17284870 / Pick arm, primary, mech / eclamp, prod+
(1) / E20000123 / Amplifier led modulating 8-28 VDC
(1) / E19007960 / Gauge, high pressure, dual scale, gas box
(1) / E33000102 / Gauge, 30-0-30, PSI, VCR
(2) / E17075470-4 / 1510-0 A4300284 (R021 R00120)
(1) / E17080800 / Connection facility
(1) / E19000290 / Wafer handler right hand outboard
(1) / E11030811 / Kit, replacement, vert scan forcer
(1) / E12013480 / Ule manipulator motor
(1) / E11002940 / Pivot feedthru
(4) / E35000223 / O-Ring, viton, 10-1/2 i for rms assy
(5) / E35000236 / O-Ring, viton, 8-1/2 id for lens
(4) / E35000294 / O-Ring, viton, 11.984 id x 0.139 w for setup cup (mh)
(1) / E16083568 / Cable
(2) / E11002950 / Assembly elevcham sensor light source
(2) / E16303320 / Cassette sense sensor cable inside shaft
(2) / E16303340 / Walkout sensor sense cable inside shaft
(1) / E16319800 / Light link cable assy, 85"
(1) / E11130650 / Flow meter for MH
(3) / E35000848 / O-Ring viton, csd viton 50
(1) / 1521700 / Ll 3 axis amp PCB
(1) / E16122234 / Harness assy, 70 kv, src cabine
(2) / E17135080 / Shield, cable
(2) / E16058960 / Harness assy home sensor position
(1) / - / Le pig tail
(1) / E12013370 / PCB Assy, 3 u 2-chan, 16 bit a/d converter, mosified
(1) / E15000320 / Elevator control assy
(2) / E12005132 / Motor, ropins, modified
(1) / E19014580 / Y Tilt encoder new type
(1) / E15002350 / PCB Assy, power supply, controller
(1) / E15002430 / PCB Assy, filament c
(1) / E15002355 / PCB Assy, power supply, controller
(2) / E15000207 / PCB Assy, motor controller, arm/lift/scan
(2) / E15002358 / PCB Assy, power supply, controller
(1) / E30000030 / Switch, pressure 15 PS
(1) / E58000041 / Connector, twistlock, plug, 30 a, 250 a
(1) / E16004489 / Cable, digital, potentiometer
(2) / E41000151 / Coupling, helical, alum, 0.250 to 5 mm
(1) / E19009430 / Kit, cable, energy, probe
(2) / E17365510 / Obs, shield, tilter, CBL, RPL BY
(2) / E12008300 / Gear, orient drive, modified maxon
(1) / E19004561 / Motor, with line driver, traveling faraday
(1) / E15006445 / Faraday, fast beam, select
(4) / E51001399 / Socket, relay, 8 pin plugs
(1) / E15001083 / PCB assy, setup faraday robust
(1) / E15005780 / PCB assy, beam drop out detect
(1) / 1008-0950 / ULE Robot belt (Radial arm 1 link drive belt)
(1) / 1008-0951 / ULE Robot belt (Radial arm 2 link drive belt)
(2) / E17006930 / Elevator sub parts
(3) / E47000603 / Screws, shoulder, ss, 1/4 x2
(1) / E11042121 / Resistor assy power 40 W
(1) / E11031560 / VARIAN, Switch, assy, level
(1) / E68000150 / 90 Magnet clamp potentiometer
(1) / E17268941 / VARIAN Part
(1) / E23000060 / Controller, vacuum, switch
(1) / E11097820 / Interconnect vcs termination
(1) / E15000870 / PCB assy spark correction
(1) / 602705-107 / PMAC Card
(2) / E21000079 / TMC/PMC PS1
(2) / 0100-01321 / 0100-01321 repair of DIO boards
(1) / 0100-00396 / Analog I/O Board
(1) / 0140-77626 / JINGKE CMP MIRRA robot OPM ribbon cable
(4) / 0020-78177 / Gasket / Wet robots
(1) / 0140-77777 / Cable assy robot power
(1) / 0140-78255 / Cable assy robot encoder sensor CW, CCW
(23) / 0020-20673 / Pin/ chamber/ monolith interfaces
(1) / 3080-01119 / Platen motor belt
(2) / 0190-77116 / Flexible disks
(4) / 3020-01132 / Cylinder, air with switches
(3) / 0190-77170 / Wet robot x-axis SGM servomotors
(15) / 0100-77026 / Assy, sensors EESV3
(2) / 0090-77026 / Hclu pedestal sensor assemblies
(1) / 0140-77615 / 50FT ISRM port server cable
(2) / 0140-77636 / C/A HD ROT 4 MTR Drivers
(2) / 0140-77634 / C/A HD ROT 2 MTR Drivers
(2) / 0140-77635 / Jingke - head rotation 3 cable assemblies
(5) / 0090-77028 / Wet robot -robot shoulder sensors
(1) / SGDA-04AS / Servopack driver, 200 v
(51) / 0021-79131 / Shaft / Clamp / Walking beams
(1) / 0190-16236 / Motor encoder assy, robot wrist, mirra
(1) / 0090-77286 / Mirra pressure transducer sst
(3) / 0090-77221 / Harness, megasonic diw flow switches
(3) / 0140-78204 / Head pneumatic rr-sv48 cables
(2) / 0140-78202 / Head pneumatic er45 uc cables
(1) / 0140-78258 / Head pneumatic ec/pp ja-sv42, sv44 cable
(7) / 0090-02900 / Electronic timers
(4) / LY2N-D2 / Relay LY2 N-D2 24 VDC omron
(2) / 1110-01058 / Port server -digi el16
(1) / UPM3-646 / Furon cmp 3-ways manifold
(1) / 3870-02366 / Pneumatic, valve module (Normally open digital)
(10) / 0140-77613 / Wf- sliprings-detector cables
(4) / 3200-01073 / Pneumatic card assemblies (Analog)
(1) / 0100-01793 / I/O Interface board with com Mirra CMP
(5) / 0090-77110 / ISRM Cables (To slip ring)
(1) / 0020-77423 / HCLU Load cup ass: adjusting bracket
(7) / 0020-78432 / Wet robot pulley
(1) / 0020-78364 / HCLU: Centering arm spring cap
(97) / - / PICO Fuse axial leads, 125 v, 1 amp
(2) / - / PICO Fuse axial leads, 125 v, 7 amp
(80) / - / PICO Fuse axial leads, 125 v, 5 amp
(30) / - / PICO Fuse axial leads, 125 v, 10 amp
(4) / 0190-77184 / Bearing s/ Ball / 25ID x 30D x 25W
(1) / 1120-00397 / Optical laser 670-5
(3) / 0090-77173 / Wafer present switches
(1) / 0100-76038 / Assy, PCB led-nb, fast wafer mapping
(1) / 0020-25770 / Wing, lower
(1) / 0100-20051 / Turbo interconnect
(1) / 0190-00318 / VGA Video controller assy board
(1) / 3870-01213 / Valve pneu NW 25 Flange
(1) / 0020-23209 / Lift hoop, 8" wide body, 101% coverage
(2) / 0021-23198 / Hoop, lift, open, 8" MCA e-chucks
(1) / 0020-53882 / Blade, 8" Buffer HP+, HTHU
(2) / 0020-70336 / Wing frog legs
(1) / 0150-17105 / Cable assy SMIF-ARM/5500 interconnect
(1) / 0140-06383 / Harness assy, cass in place, SMIF-asyst
(1) / 0140-05891 / Harness, SMIF I/F, cassette out
(1) / 0140-21109 / Harness assy, door open interconnect SMIF-asyst
(1) / 0140-12526 / Harness assy SMIF cass rotate out/in
(2) / 0140-12525 / Harness assy SMIF Interface ll door open / Close
(1) / 0140-20741 / Harness assy source cover PVD
(1) / 3690-02288 / Screw mach SKT HD 6-32 UNC .87L
(8) / 0020-22241 / Lift fingers
(21) / 0200-04101 / Lift pin, alumina, enablers
(1) / 0190-02076 / PCB Water leak detector CCM Mark III
(11) / 0200-00051 / Window, lid endpoints, qtz. emax, 8"
(2) / IFC-125C-Ar-2000 / IFC-125C, MFC, Celerity units, Ar, 2000 SCCM
(45) / 0200-03494 / Partition, quartz, bridge pk enablers
(31) / 0200-03493 / Ring, barrier, bridge, enablers
(3) / 0200-10073 / Insulators
(5) / 0020-17939 / Shim / C-ESC/ 1He Zone/ 8"SNNF / JMF
(4) / 0010-37128 / Chiller communication adapters (HX Cable)
(1) / E17039040 / Aperture / Exit / Dipole
(4) / 0200-02291 / Window / Endpoint / 12" / IA
(8) / 3020-00320 / CYL Air / Short stoke clamping modules
(3) / 0620-02367 / WSC RKC 572-0.5M / C1126 DNET Cables
(3) / 0200-01357 / Insulator ceramic lifter pins ESC
(12) / 0021-01589 / Connector assys ESC / RF
(14) / SY3140-5LOZ / Solenoid valves
(9) / ISE30A-N01-N / ISE30A-N01-N Pressure switches
(16) / 4S-F4PKN-3N4 / Hybrid ceramic bearings
(11) / FRCA-26347 / -
(268) / 100312703 / Seal assemblies NW25
(16) / 4S-R6PKN-3N4 / Hybrid ceramic bearings
(1) / 3620-00098 / STPH1303CV3 TMS Valve
(2) / DPCA-26028 / UPC, Pressure controls.
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