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ID: 9273087
Qty / Part number / Description
(1) / 0020-75755 / Bracket, robot driver, mark
(6) / 0020-20349 / Duplex clamp frog leg
(2) / 0020-76023 / Channel 150mm wafer cassette
(2) / 0020-34842 / Block filler mxp + chamber
(2) / 0020-76030 / D frame rt 150mm wafer cassette
(1) / 0050-70003 / Exhaust weldment llc sensors
(1) / 0100-09127 / Pcb assy, interconnect bd wafer
(2) / 0100-09134 / Dio fuse board needs repair
(3) / 0140-09223 / Harness assy cvd/tngstn chmbr
(1) / 0140-09514 / Core, hrns assy gate valve tem
(1) / 0040-31890 / Cover shield front r2
(1) / 0050-00370 / Foreline integ super e/mxp+ po
(2) / 0140-09005 / Ch harness interconnect
(1) / 0140-09006 / Power cable ch, interconnect
(2) / 0140-09017 / Harness, sys electncs/dc
(2) / 0140-09027 / Harness chamber a,b slit
(1) / 0140-09042 / Cable
(1) / 0140-09044 / Harness, loader door open
(1) / 0140-09102 / Harness status lights 50
(3) / 0140-09230 / Harness assy n2 purge int
(2) / 0140-09236 / Harness assy, expanded gas
(1) / 0140-09644 / Lamp module harness assy
(1) / 0140-09647 / Harness assy, upc setpoint
(1) / 0140-20259 / Llb harness
(1) / 0140-36535 / Harness, lamp / mag control
(1) / 0140-38353 / Harness, slit liner door
(2) / 0140-70064 / Harness assy, system cont
(1) / 0140-70092 / Harness assy llo / centura inter
(1) / 0140-70156 / Assy harness pump stack heater
(1) / 0140-70158 / Cable assy
(3) / 0140-70247 / Harn assy sys controller power dist
(2) / 0140-70323 / Harness assy, adapter
(3) / 0150-00280 / Thermocouple extension / Cable
(3) / 0150-00281 / Rod heater- thermostat extension
(1) / 0150-00299 / Assy e/p module parallel
(1) / 0150-00300 / Assy, e/p module video
(1) / 0150-00305 / C/a. e/p module monochromator
(1) / 0150-09018 / Assy, flat, chambe
(1) / 0150-09047 / Assy ribbon pneuma
(1) / 0150-09085 / C/a l.s.gas pnl analog and digit
(3) / 0150-09461 / Assy, sacvd chamber lid
(7) / 0150-09488 / Assy, expanded rs-
(9) / 0150-09689 / Electrical box
(6) / 0150-09692 / Assy single helium cooli
(1) / 0150-09710 / Assy set control to pane
(1) / 0150-10408 / Cable, assy, emo interconnect,
(3) / 0150-35224 / Assy, 5300, convectron p
(1) / 0150-70205 / Assy encoder if to sei b
(4) / 0150-76819 / Harness mfc chamber c
(1) / 0200-09787 / Focus ring 209 mm notch poly e
(4) / 0225-30849 / Harness, un load stop sig
(3) / 0100-09114 / Pcb, assy gas panel
(2) / 0100-70028 / Pcb, robot interconnect bd
(3) / 0050-43076 / Foreline thv to turbo seiko 22
(2) / 0040-09254 / Weldment, r/f ground, 200m
(8) / 0150-35445 / Assy, mag driver
(1) / 0140-09143 / Harn load chamber w/new
(1) / 0140-09981 / 0011 hrns assy power
(1) / 0020-76144 / Core, baseplate right 150mm ca
(4) / 0150-09877 / Esc controller chamber
(8) / 0020-32164 / Lift pin, conductive long
(1) / 0150-10271 / Cbl assy minisbc mkii-xt
(1) / 0150-01593 / Cable, rf match
(3) / 0020-09114 / Lever b slit valve cham
(1) / 0150-70203 / Assy sbc breakout
(2) / 0020-20595 / Strip, hold down, 10 cha
(3) / 0270-20082 / Alignment fixture
(1) / 0020-09827 / Panel access
(1) / 0020-34047 / Cover, turbo side
(4) / 0090-09027 / Motor assy, cvd lift
(1) / 0100-76181 / Core return, p5000 wire dist b
(1) / 0140-10060 / Assy controller / chamber
(1) / 0140-09145 / Core, cassette handler inter
(2) / 0020-10154 / Flag comb sensor .25 pitch
(2) / 0150-76016 / Assy, e/p module vi
(3) / 0150-76191 / Rs232, liquid source,cabl
(5) / 0270-20152 / 101 calibration tool 5"
(2) / 0620-01187 / Assy, voltage i/o 250 mm
(2) / 0140-09158 / Harness assy, final valve
(1) / 0140-70230 / Harness tb2 s.e. and enc
(1) / 0020-10122 / Plate perf 125 mm oxide
(12) / 0020-30357 / Plug dist plate process gas eg
(2) / 0020-31596 / Guide hingeunibody cover
(1) / 0020-33761 / Plug gas inlet of chamber
(2) / 0040-09138 / Bulkhead plate for tube weldme
(1) / 0040-09720 / Manifold vcr no valve
(1) / 0150-76461 / 55 ft rf coaxial 13.56 m
(3) / 0190-09327 / Heat shield chamber b isolatio
(1) / 0190-09328 / Heat shield chamber a isolatio
(1) / 0227-06346 / Assy emo
(4) / 0150-09240 / Assy, rf generator
(1) / 0140-09226 / Assy
(2) / 0100-76053 / Assy robot interconnect pcb
(2) / 0140-70094 / Harness assy llc/pump co
(1) / 0150-09063 / Assy, cable, chamber atmospher
(1) / 0020-09427 / Panel, upper blankoff
(2) / 0020-75983 / Esc, cardcage mounting b
(5) / 0150-09104 / Assy liquid source
(1) / 0020-30401 / Support, susceptor arm, 20
(1) / 0020-70279 / Lifter 150 mm wafer orienter p5
(1) / 0020-76033 / Channel 200mm wfr cassette
(2) / 0020-76041 / D frame rt 200mm wfr cassette
(2) / 0150-35584 / Assy, di water switch
(1) / 0140-40369 / Harness assy, robot
(1) / 0020-09270 / Core, cover, front
(1) / 3030-01172 / Core, mfc 1159 20 sccm
(2) / 0020-04040 / Plate cylinder
(4) / 0020-09423 / Bus bar, lamp
(2) / 0200-09911 / Coverquartz8 steppedlift 2 notc
(1) / 0020-09430 / Collimator, 6" lm
(1) / 0040-09036 / Buss bar support
(1) / 0140-09153 / Harness assy ev voltage
(8) / 0150-35687 / Harness assy, tylan gen
(3) / 0150-70016 / Assy encoder
(3) / 0150-76132 / Assy esc standard
(2) / 0200-09024 / Windows small
(1) / 0020-34831 / Core, plate mounting rf/hv int
(1) / 0090-09002 / Motor assy robot rotation
(1) / 0090-09002 / Motor assy robot rotation
(18) / 0020-09090 / Blade coil
(2) / 0020-09102 / Shaft, throttle
(12) / 0020-09364 / Brkt upper coil
(25) / 0020-09732 / Plate spring (a)
(2) / 0020-10202 / Plate slit valve chamber
(1) / 0680-01207 / Cb mag therm 1 p 240 vac 15 a
(2) / 3300-01963 / Ftg pipe qdisc body 3/8 mnpt
(1) / 3420-01062 / Insul 1/2 id 1-1/4 od 3 ft silico
(2) / 3880-01477 / Wshr conduit cupped rdcg 1.5-
(3) / 0040-00560 / Rear shield
(3) / 0100-09127 / Pcb assy loader interconnect
(1) / 3080-01031 / Belt tmg 75 t 3 mmp 6 mm
(1) / 0020-09618 / Bushing plug
(8) / 0100-09123 / Pcb assy wafer sensor board
(1) / 0100-09123 / Pcb assy wafer sensor board
(3) / 0020-10163 / Diffr 100 150 mm
(1) / 0150-35394 / Neslabs, contrl cable
(1) / 0226-31107 / Bracket rly mtg
(2) / 0020-09566 / Mtg box, ht exch interface
(1) / 0050-09057 / Core, tube weldment cap man
(1) / 0020-32077 / Slit valve hinge, right
(2) / 0020-32836 / Hingeremovablerightslit
(1) / 0040-09035 / Frame, ac, dist pcb
(1) / 0140-70065 / Assy, harness rf generater
(2) / 0020-36479 / Unistrut
(3) / 0150-00236 / Hooling control 8 ft
(2) / 0020-31513 / Support, rev 1 ceramic h
(1) / 0020-09110 / Cylinder post, slit valve
(3) / 0140-70026 / Harness assy, particle reductio
(5) / 0020-34043 / Cover, insulator block
(1) / 0020-70188 / Panel front heat exchange
(2) / 0020-21637 / Bracket, a tg pcb mag/lamp drive
(4) / 0090-09095 / Gate valve vent harness with s
(1) / 0100-09107 / Teos gas interface board needs
(2) / 0020-04136 / Support, 1/4 tube and fi
(1) / 0040-70044 / Brace middle support 8 s
(3) / 0150-09807 / Wafer position sensor
(4) / 0150-36591 / Le ext g-plis valve heater, ch
(1) / 0150-70000 / Assy robot alignmen
(1) / 0190-09382 / Heat shield chamber a is
(3) / 0150-09593 / I/c cable,eni generator
(1) / 0050-31166 / Core, gas line, chamber a/d
(2) / 0020-09801 / Panel
(2) / 0150-76192 / Emc comp., assy re
(2) / 0020-31377 / Core,blank off,unibody
(3) / 0140-09003 / Harness, dc pwr supply
(4) / 0050-09021 / Manifold, vacuum line
(37) / 0020-31667 / Screwadjustment finger bwcvd
(1) / 0140-09484 / Harn assy, minicntrl, 25 exp, g
(12) / 3060-01224 / Brg ball flg .875 od x .375 id
(1) / 1140-00079 / Core, pwrsp dc 12 v regulated
(3) / 0040-31845 / Cover, cylinder support
(2) / 0090-09103 / Elect rl cal assy gate valv
(1) / 0140-76014 / H/a pwr intlk wafer orie
(2) / 0021-10598 / Clamp, window, dpa
(2) / 0620-01144 / Cable,ext keyboar 25' end poin
(1) / 0021-39795 / Bracket, gas supply, emxp+
(2) / 0020-70192 / Screen top lam flow skin
(1) / 0020-76015 / D frame lft 125mm cassette hnd
(15) / 0100-00171 / Ind. helium control bd. assy u
(1) / 0150-09027 / Assy heat exchanger inte
(2) / 0020-32835 / Brkt. side wafer map
(1) / 0020-30953 / Match controller panel
(3) / 0040-09992 / Mtg brk dual disk drive
(1) / 0150-37049 / Assy, ribbon, 20-p
(1) / 0010-09182 / Assy stepper drive heatsink-cv
(1) / 0015-09120 / Mod, fitting thermocoupl
(15) / 0100-35102 / Pcb assy stec mfc adaptor metc
(1) / 0020-09107 / Hing-rt, slit valve chamber
(1) / 0020-09108 / Hing-lt, slit valve chamber
(2) / 0021-10436 / Cup, ground, dpa
(4) / 0015-09056 / Bellows assy, wafer soli
(1) / 0850-01025 / Monitor, color, 14" svga
(1) / 0150-38982 / Core, cable
(3) / 0020-21361 / Clamping ring 6 al japan major
(9) / 0040-00543 / Tube mounting
(1) / 0150-10314 / Assy position sens
(1) / 0150-75053 / Cable, emo, remote to pu
(1) / 0225-33556 / Harness
(2) / 0020-09550 / Bracket, gas supply,
(16) / 0020-39254 / Shim, right clamp, dxz ch
(1) / 0040-70187 / Ttw, housing
(1) / 0020-20612 / Thermal switch top case
(1) / 0020-70412 / Lift shaft
(2) / 0270-35058 / Clamp sht chamber/lid w
(5) / 0020-03394 / Bracket, upper coil, rea
(2) / 0020-09792 / Panel
(4) / 0040-09761 / Slide front shield unive
(2) / 0226-10038 / Cable, smif handoff opto intcn
(2) / 0020-34578 / Block, tapered retainer,
(1) / 0020-70276 / Enclosure n2 dry vac pcb
(1) / 0150-20119 / Cable
(3) / 0225-30846 / Cable
(2) / 0270-20083 / Hoop lift 8" tool
(1) / 0660-01707 / Core, card graphics svga 1 mb-d
(1) / 0020-09546 / Enclosure,remote interconector
(2) / 0020-76040 / Carrier plt 200mm wfr cassette
(1) / 0020-76146 / Baseplate right 200 cassette h
(1) / 0660-01707 / Card graphics svga 1 mb-d
(1) / 0140-76185 / Harness assy. Lamp socke
(1) / 0040-39988 / Cover, view port lexan
(2) / 0020-04146 / Panel, heat exchanger
(1) / 0140-00160 / Harness assy, e/p module monoc
(1) / 0226-10630 / Signal lamp cable
(1) / 0140-09015 / Harness assy remote dc p
(3) / 0150-09758 / Mag,gen interconnect 55'
(1) / 0040-39291 / Shield- front, mxp+/emxp+
(1) / 0020-33051 / Clamp plate primary arm p5000
(1) / 3310-01074 / Gauge tc tube .1-2500 micron hg
(1) / 3310-01074 / Gauge tc tube .1-2500 micron hg
(2) / 0100-09242 / Core,pneumatic distribution br
(6) / 0226-31917 / Assy,coaxial,rf 30ft.
(6) / 0020-04129 / Top hinge bracket
(7) / 0020-09132 / Enclosure, left valve (1/0 val
(1) / 0020-70139 / Cover encoder interface
(1) / 0020-75088 / Support,carriage dll
(1) / 0040-00559 / Side shield 4"
(1) / 0150-76169 / Cable,final valve n2 interlock
(10) / 0020-70223 / Chmaber monolith plate
(4) / 0020-10472 / Lever, jam release
(57) / 0100-09117 / Pcb assy, dio f board
(3) / 0020-31694 / Cover heater
(1) / 0020-42164 / Clamp set heater wxz
(1) / 0140-35341 / Assy,
(12) / 0100-09099 / Pcb chmbr interconnect
(4) / 0020-09135 / Support hinge lamp modul
(7) / 0150-09183 / Assy gas to remote
(1) / 0226-10573 / Assy signal lamp bd
(4) / 0100-09224 / Pcb,assy expanded rs232 interc
(2) / 0150-10357 / Hrns assy,int con SEIKO SEIKI
(1) / 0020-09015 / Clamp, ring quartz window
(1) / 0040-09374 / Panel, weldmont aux mfc/mf
(1) / 1140-01045 / P/n: 0190-38044
(7) / 0150-09202 / Assy, teos control
(2) / 0150-75040 / Assy, emc comp
(1) / 0140-76018 / Harness, lower, tilt cassette
(8) / 0100-09029 / Pcb assy, turbo interconnect
(1) / 0020-09116 / Slit valve block
(1) / 0150-09244 / Switch, air flow,
(1) / 0020-10134 / Manifold out put pl
(1) / 0150-10011 / Assy sacvd exp. rs
(4) / 0150-35665 / Adapter oem12,
(3) / 0020-09222 / Bracket,filter support
(3) / 0140-09000 / Harness, system electric,
(2) / 0140-09152 / Harness, cassette h
(1) / 0020-09316 / Plate, blocker 6"
(1) / 3400-01140 / Hose flex blws thin-wall nw25
(2) / 0150-76168 / Emc comp., dc power foot
(2) / 0100-09126 / PCB assy, remote wiring distri
(1) / 0050-10046 / Core, weldment modified elbow
(1) / 0100-09117 / Core,PCB assy, dio f board
(1) / 0020-32930 / Brkt, top wafer mapping
(2) / 0040-36024 / Wldmnt, pipe clstr exhst, 5"
(1) / 0150-09938 / Assy, operator control 5
(6) / 0620-01188 / Assy heater 3050 mmlg l-
(1) / 0040-09577 / Cover safety waveguide a
(5) / 0620-01186 / Assy wafer cooling 350 mm
(2) / 0020-10413 / Panel, baffle subassy 1
(6) / 0020-09059 / Top hinge bracket
(3) / 0150-09057 / Assy ,rf gen
(1) / 0020-09156 / Brkt, sensor b
(6) / 0620-01189 / Assy valve plug 300 mmlg
(1) / 0050-30757 / Gas, line, n2 purge
(1) / 0140-09422 / Hrns, ampule overtemp
(1) / 0620-02531 / Pwr htr 120 v 6 ft rtang p
(1) / 0050-00315 / Foreline
(6) / 0100-09107 / Teos interface board.
(2) / 0040-09115 / Core, feed through
(6) / 0020-32332 / Brkt htr controller mtg
(1) / 0040-09353 / Panel wldmnt, left, blank
(1) / 0200-09638 / Cylinderqtz200 mm ext cath cera
(8) / 0190-35199 / Assy, service cable, gate-v
(1) / 0225-09442 / Switch, over temp
(1) / 0015-09359 / Coupling 3/4"" trantorqu
(6) / 0020-04042 / Bracket water box pump sid
(2) / 0020-70127 / Brkt robot i/c pcba right
(6) / 0020-10135 / Manifold water pl
(1) / 0020-10853 / Hinge, pnuematic bd
(4) / 0100-09145 / Pcb assy rs232 video intercon
(1) / 0140-70004 / Harness loader disconta
(1) / 0150-76229 / Cable, emc comp, fan power
(1) / 4020-01013 / Fltr hsg brs hd sst sump
(1) / 0200-10027 / Ring, inner, 1.50", dbl annulu
(1) / 0140-09618 / Harness, turbo interconn
(1) / 0100-00008 / Pcb assy, tc gauge
(6) / 0015-09095 / Gear, counter
(1) / 0100-09008 / Core, pcb assy, pneumatic cont
(1) / 3870-02061 / Valve tms water control
(1) / 0270-20059 / Jig 8" pvd hoop
(2) / 0020-31700 / Shaft, removable throttle valve
(1) / 0021-36130 / Core, flange, base, etch chamb
(1) / 0150-09583 / Rf (coaxial delta)
(2) / 0020-09124 / Window b
(6) / 0140-09285 / Harness assy turbo interconnec
(1) / 0400-09055 / Endp28 software on 3.5"" diske
(1) / 0040-36913 / Cover metal lid dxz sacvd
(2) / 0150-09868 / Assy service gate
(1) / 0150-76230 / Assy, opm, ampule heater
(6) / 0021-10296 / Output mnfld,univ chamber
(2) / 0020-10189 / Plate connector 200 m
(1) / 0200-39142 / Ringfocus 1 ceramic 145 mm semi
(2) / 0270-20089 / Alignment fixture
(2) / 0140-09444 / Harness assembly (a) and
(1) / 0150-76226 / Cable, emc comp, analog gas
(2) / 0100-20070 / Mag/lamp current sense tr
(1) / 0040-09642 / Door large frame assy
(2) / 0240-31198 / Kit, throttle valve ac distrib
(1) / 0020-35477 / Block, round pin, r2 chamber
(1) / 0150-76227 / Cable, emc comp, spare analog
(1) / 0010-70166 / Assy, 15 slot storage elevator
(1) / 0020-04227 / Plate, disk drive bezel
(1) / 0050-70005 / Vent line weldment n2 ll
(1) / 0150-09139 / Heat,exchanger, cable.50"
(1) / 0020-09316 / Plate, blocker 6"
(14) / 0020-04124 / Cover feed thru
(1) / 0150-76228 / Assy, emc comp, liquid
(1) / 0050-09064 / Tube wldmnt chamber a
(2) / 0020-09136 / Hanger lamp module
(1) / 0660-01102 / Card PNEU 8 stn 8 vavle PCB
(1) / 0040-09022 / Core, housing
(5) / 0100-09153 / Pcb gas panel interface (w/o s
(6) / 0100-09020 / Pcb assy, f board
(2) / 0140-35100 / Harness assy, load lock
(1) / 0100-09080 / Pcb assy, robot cap senso
(1) / 0150-76222 / Cable, emc comp, digital 1ga
(1) / 0150-40199 / Assy, heat exchanger
(1) / 0140-76184 / Harness assy. Lamp socket
(1) / 0140-76186 / Harness assy. Lamp socket
(1) / 0140-76187 / Harness assy. Lamp socket
(1) / 0140-76188 / Harness assy. Lamp socket
(1) / 0140-76190 / Harness assy. Lamp socket
(1) / 0150-76223 / Cable, emc comp, digital 2 ga
(3) / 0020-31557 / Connector rf plate
(2) / 0021-76447 / Pallet ugp mcvd
(1) / 0040-00579 / Remote emo box and switch
(1) / 0020-09157 / Brkt, sensor c
(2) / 0100-09006 / Core,pcb assy, intelligent
(1) / 0020-09040 / Spring support
(1) / 0020-31281 / Hinge, cvd 8"" chamber
(1) / 0020-31345 / Core, coll lamp module au-plat
(1) / 0010-70790 / Mxp+lidscr dwnchemraz 513 std52
(1) / 0150-76225 / Cable, emc comp, analog 1 gas
(1) / 0200-00011 / Ring,quartz,4"
(1) / 0100-09064 / Monitor lightpen board
(2) / 0021-09718 / Liner, slit valve
(1) / 0226-10573 / Assy signal lamp bd
(3) / 0270-20069 / Jig 8" cass indexer to
(3) / 0150-09840 / Assy lamp module
(3) / 1140-01045 / P/N 0190-38044 power
(2) / 0050-10115 / Tube weldment cap man vcr
(1) / 0020-30672 / Hinge, chamber, sacvd
(3) / 0190-09184 / Vac feedthru t/c prsp
(6) / 0620-01185 / Assy temp snsg 300mmlg
(2) / 0270-35056 / Tool scr dr htr guide p
(1) / 0020-35079 / P5000 standard interface blank
(2) / 0020-39348 / Ugp gas platter MCVD
(2) / 0140-09223 / Harness assy cvd/tngstn
(1) / 0190-09363 / Switch pressure 1/4 vcr connec
(3) / 0020-09131 / Door i/o p5000 valve
(1) / 0020-34299 / Plate, adaptor, MX P+
(2) / 0100-00002 / Stepper controller pcb
(3) / 0040-00537 / Helium control manifold
(2) / 0020-34014 / C-clamp, turbo pump
(5) / 0190-09135 / Assemblybi-furcated
(1) / 0020-31699 / Housing inner hrtv, core
(1) / 0050-10147 / Weldment u cap manometer
(2) / 0020-18073 / Opto screen susceptor lift
(1) / 0040-09140 / Encl. cap manometer brd bw
(1) / 0010-10033 / Core, assy,wafer lift, rev 1 c
(1) / 0020-41026 / Lifter, 6" orienter
(4) / 0620-01061 / Pump motor mtr (10 ft) nt
(7) / 0620-01062 / Magnetic sensor 3
(1) / 3870-01213 / Valve PNEU nw 25 flange
(1) / 0020-30481 / Carrier 8" with flex P5000
(1) / 0020-70095 / 202-00826 window, a, 29
(1) / 0020-04041 / Plate water box.
(1) / 0020-76141 / Baseplate left 125mm cassette
(1) / 0140-20178 / Harness assy,chmbr 4 int
(2) / 0021-37167 / Manifold, upper, dpa
(2) / 0150-09228 / Assy, heater ampule, teo
(2) / 0020-30681 / Manifold, input sacvd
(1) / 0020-09034 / Bearing housing
(2) / 0040-09055 / Keyboard cassette bezel
(1) / 0010-09591 / Assy, susceptor 200mm BWCVD
(1) / 0090-70005 / Sw, assy full atmosphere vcr
(1) / 0010-37119 / Assy, adapter plate, autobias
(3) / 0140-35671 / Harness assy,simple/stan
(1) / 0090-09007 / Assy, centerfinder cable
(1) / 0020-04229 / Bezel monochromator
(1) / 0020-21105 / Clamp, 8" buffer frog leg
(2) / 0100-09231 / Assy, ac window controller
(5) / 0020-09029 / Covering pipe
(1) / 0200-00038 / Ring,clamping, 4" ririg,3/16
(1) / 0200-09848 / Shield, flat, 4" pedest rin
(6) / 0140-09082 / Harness assy powercord magnet
(1) / 1270-01448 / Sw flow 1/4" fnpt adj
(1) / 0100-40037 / Pcb, source signal
(3) / 0150-09957 / Assy, e/p module-50
(1) / 0040-09991 / Latch plate,dual floppy
(1) / 0270-20088 / Alignment tool
(3) / 0020-10764 / Pumping plate 4, 5 and 6"
(2) / 0660-01621 / Card back plane vme 21-sl
(3) / 0020-32312 / Door, slit valve
(1) / 0190-09366 / IDE Hard drive, endpoint
(1) / 0020-21104 / Cap 8 inch buffer frog leg
(2) / 0100-76046 / PCB gas panel interface
(3) / 0040-09136 / Core, cvd, chamber
(3) / 0021-36130 / Flange, base, etch chamber
(3) / 0020-70053 / Secondary operation window ext
(7) / 0020-10909 / Gear, hinge
(1) / 0240-70822 / Kit, 8 position load lock
(2) / 0270-70062 / Alignment tool
(2) / 0020-32290 / Panel exp rs232 inter co
(3) / 0020-09058 / Chamber hinge bracket
(1) / 0020-32075 / Core, housing, outer, hrtv
(2) / 0020-21025 / Clamp 8" blade transfer frog l
(1) / 0021-10518 / Window,lower,anti-static
(8) / 0020-10662 / Cover VME
(2) / 0100-09389 / Pcb assy tc amp/intrlk
(2) / 0020-20356 / Cap 8"transfer blade frog leg
(2) / 0021-37053 / Bracket, recessed endpoint
(1) / 0040-38994 / Shroud top
(1) / 0040-09691 / Refurb,tee, roughing, b and c po
(1) / 0150-76166 / Emc comp assy remo
(6) / 0010-76166 / Bottom door spring
(1) / 0270-20058 / Jig pvd heater to lift
(1) / 0270-20060 / Jig preclean/cool lift
(1) / 0010-09021 / Core,assy, i/o slit valve
(4) / 0100-09056 / Pcb assy, centerfinder, sbc
(1) / 0020-30580 / Blkr perf,com sil 100-150 mm
(1) / 0040-31846 / Cover, access, helium an
(1) / 0040-09525 / Port, vacuum, window, asp
(1) / 0020-31830 / Plateadapter etch chamber top
(3) / 0100-09246 / I/o distribution pcb
(1) / 0040-35796 / Pallet apc controller
(2) / 0200-09351 / Support susceptor 200 mm b
(3) / 1140-01400 / Pwr sp dc 5 v +/-12 v 130 w.
(5) / 0040-09022 / Housing, valve gate
(6) / 0020-10752 / Pumping plate, 4",5", 6" silane
(2) / 0020-32317 / Clamp, base, IHC lines
(31) / 0100-00011 / Pwb assy, chopper driver 1,
(2) / 0020-31609 / Cover rf shield interlock,delt
(1) / 0200-00148 / Tube,plasma,25 mm applicator as
(2) / 0040-32073 / Gas box, universal lid,w/align
(1) / 0270-09269 / Alignment fixture
(2) / 0020-09424 / Cover, bot., lamp mod
(1) / 0270-40054 / Alignment tool, carrier
(4) / 0020-09200 / Shoe, rear 100 mm
(1) / 0050-70003 / Exhst weldment llc sensor
(1) / 0270-20081 / Alignment fixture
(1) / 0200-10191 / Shield, common silane, 200 mm g
(2) / 0200-10196 / Shield,tapered 125mm geco
(2) / 0240-13367 / Kit, ddor sensor for ca
(5) / 0100-09304 / Pcb assy 5000 wiring dis board
(1) / 0020-70489 / Manifold cathode sst
(2) / 0020-03435 / Pestal 6" ext
(2) / 0200-09240 / Support arm, 8" susc
(2) / 0020-75984 / Cover,rf shield,gold, inte
(3) / 0020-09827 / Panel access
(1) / 0190-09417 / Assy, module, pneu delay
(5) / 0020-09595 / Bezel, adapter tube, deep
(1) / 0021-23550 / Manifold, input mod
(8) / 0021-09718 / Liner slit valve
(1) / 0200-00042 / Cover P5000
(6) / 1140-00078 / Pwrsp dc 15 v regulated
(1) / 1140-00078 / Pwrsp dc 15 v regulated
(3) / 0020-10059 / Ring wafer lift (ni/so)
(1) / 0040-33998 / Core, liner, slit liner door
(1) / 0270-20022 / Gauge, hoop cd 125mm
(1) / 3400-01108 / Hose,cryo,flex helium s
(2) / 0040-70030 / Panel, front, pwr sup, 2
(1) / 0150-10029 / Assy, wps
(1) / 0020-32075 / Housing, outer, hrtv
(4) / 0020-30086 / Plate perforated 150 mm
(2) / 0020-31375 / Flange insulating unibody etch
(2) / 0100-00177 / Assy ep module, i/o interconne
(4) / 0090-75011 / Motor brk encoder assy,
(1) / 0100-09055 / Pcb assy, liquid source sbc
(1) / 0240-76010 / Core,kit cassette handler gene
(1) / 0100-11000 / Core, analogo,input
(1) / 0020-10087 / Ring outer 1.50 ssgd r2 chambe
(7) / 0100-09022 / Pcb, mini ai/ao
(1) / 0040-01381 / Pallet 10 line gas box, 31"
(5) / 0020-38884 / Adaptor, throttle valve, mxpt
(1) / 0270-75072 / Robot shipping case
(2) / 0226-31128 / Pcb assy,signal lamp
(2) / 0020-10186 / Cover top 200 mm
(1) / 0100-01534 / Pcb assy, magnet driver output c
(7) / 0020-03552 / Body throttle valve
(3) / 0150-09924 / Cable, assy, distribution, 500
(1) / 0190-09485 / Assy temp controller basic
(1) / 0020-03434 / Pedestal 5" ext
(1) / 0021-10022 / Shield connector rf plate esc
(1) / 0020-09125 / Ring ctr
(7) / 0040-20505 / Assy, heater, 8", bellows PVD
(1) / 0020-28364 / Blade, 6" adv 101 shutter
(3) / 0100-20313 / Pcb assy, chamber interconnect
(1) / 0140-76822 / Hrns assy loader board P5000
(1) / 0200-09291 / Shadow rng, bwcvd, 1500 mm innr
(3) / 0200-09744 / Ring,focusing,qtz 150mm,poly/w
(1) / 0020-31346 / Core, diff lamp module au-plat
(9) / 0190-09662 / Slit valve plate za
(4) / 0020-30342 / Pedestal al 200 mm notch
(3) / 0200-00038 / Clamp ring
(3) / 0190-70052 / Chopper driver
(1) / 0010-09936 / Hv module connector assy
(1) / 0200-10415 / Focus ring, 2 pc2 195 mm,
(1) / 0020-34036 / Rod, rf
(3) / 0100-09169 / Expanded rs-232 controller ass
(1) / 0020-70375 / Lid, orienter
(1) / 0660-01682 / Core, card, CPU 486 dx4 100 h hz
(1) / 0150-09248 / Assy expanded gas pane l
(2) / 0200-09602 / Quartz w/ flang
(1) / 0020-03658 / Core, clamping cylinder
(1) / 0020-33373 / Insulating flange round for cl
(1) / 0020-70424 / Center ring load lock cover
(1) / 0020-75988 / Lifter, 200 mm wafer orienter
(8) / 0020-04181 / Insulating flange, round
(1) / 0040-31876 / Shield
(1) / 0040-09146 / Bracket,floppy
(1) / 0030-76068 / Bezel cassette P5000 mainframe
(1) / 0020-70172 / Shaft, external, 29 posn stor
(6) / 0100-09026 / Pcb, wiring distribution
(1) / 0190-35522 / Heater jacket controller
(7) / 0020-10727 / Cover, top, 4,5,6" teos
(4) / 0010-30380 / Connector hv module shielded r
(1) / 3060-01652 / Brg ball 6.000 x 6.75 x.375
(1) / 0090-09115 / Assy,thermal elec driver
(1) / 0150-01411 / Rf power cable
(2) / 0040-00571 / Mounting bracket helium panel
(1) / 0190-09533 / Slit valve gate za
(1) / 0010-10061 / Assy, hinge-pos a and d- unilid,
(1) / 0200-09615 / Lift wfr, sr and bse bwcvd cer
(2) / 0020-30810 / Pedestal ox/mlr/nit 200 mm notc
(1) / 0660-01550 / Extdr sender receiver,keyboad
(1) / 0040-09218 / Refurb,base,throttle valve
(11) / 0100-09054 / Pcb assy, analog input,
(1) / 0020-10552 / Panel, lower facilites
(1) / 0010-09019 / Throttle valve assy, etch,
(2) / 1140-00079 / Pwrsp dc 12 v regulated
(1) / 0020-31709 / Pedestal ox/mlr/nit 150 mm fla
(2) / 0020-13954 / Plate, wafer tray mount,
(1) / 0020-42248 / 15 slot elevator crossbar
(1) / 0040-36180 / Eq_assy_heater,tx z,200 mm,snnf,
(3) / 0010-00510 / Assy bearing
(2) / 0020-32182 / Pedestal 100 mm al falt finger
(2) / 0020-13995 / 15 slot elevator tray, 20
(1) / 0242-76542 / Kit, seiko seiki turbo p
(1) / 0100-35227 / Pcb assy, e-chuck controller
(1) / 0010-75343 / Core, assy, i/o valve
(1) / 0020-48171 / Q uartz insulating pipe
(1) / 0100-11000 / Analogo,input
(3) / 0040-22359 / Hsng, tc iso amp
(1) / 0020-10235 / Panel enclosure n2
(1) / 0010-38439 / Hinge assy., lid w/gas s
(1) / 0200-09319 / Shadow rng, bwcvd, 1500 mm outr
(1) / 0010-10188 / Core,assy,wafer lift, bwcvd bs
(2) / 0190-09573 / Lamp driver assy. Ring lug ter
(3) / 0020-30678 / Ring,clamping vespel poly 150m
(1) / 0270-09045 / Fixture, shoe adjust, 4
(5) / 0010-70323 / Slit valve door assy
(1) / 0010-09973 / Pedestal assy ox/mlr/nit 150 m
(1) / 0010-76173 / Core,assy, throttle valve, ups
(11) / 3930-01042 / Cntrl temp box l-h tmp 340 mc/t
(1) / 0020-31708 / Clamp vespel ox/mlr/ni
(1) / 0020-34031 / Support, pedestal,shorte
(3) / 0010-09928 / Controller box assy, esc
(12) / 0040-09005 / Base std cathode
(1) / 0730-01046 / Core,conv freq nt341 mc/mct 20
(1) / 0020-70185 / Lid llc
(1) / 0030-09026 / Tray elevator 200 mm
(1) / 0190-09663 / Core actuator, slit valve seal
(1) / 0010-09575 / Ped assy ox/mlr/nit 150 mm flt
(1) / 0021-22109 / Core, blade 6" snnf transfer
(1) / 0010-76244 / Assy, vga monitor stand alone,
(1) / 0020-27687 / Pedestal 6" snnf pcii alum
(1) / 0020-34035 / Support, lift cylinder, simple
(1) / 0020-30110 / Collimator out 200 mm /bw
(3) / 0010-37804 / Throttle valve assy
(1) / 0100-00003 / Vme stepper controller i
(3) / 0010-09970 / Housing assy inner hrtv,
(1) / 0021-06035 / Manifold,water,bearing c
(1) / 0010-10953 / Assy blade 8" , core
(1) / 0010-10157 / 29 slot wps reflector assy.
(2) / 0020-31830 / Plate,adapter, etch chamber to
(1) / 0200-10001 / Wafer, aln, 8", notch, wxz
(2) / 0500-01139 / Scr power controller
(1) / 0020-33045 / Clamp plate support plate/blad
(1) / 0020-31606 / Hoop, 125 mm, chuck alum, asp
(1) / 0200-09576 / Ceramic lift hoop
(7) / 0100-00162 / Expanded i/o dis board a
(1) / 3030-10582 / Mfc nf3 3 slm ufc-1660 d-
(1) / 0010-76001 / Assy, storage elevator, wafer
(15) / 0010-09750 / Assy, cvd rf match dc bias (us
(1) / 0040-32250 / Lid, flat, rps
(1) / 0010-10386 / Load lock lifter cover assembly
(1) / 0010-10528 / Pedestal assy, 200 mm, notch,
(1) / 0190-09399 / Susc assy t2 welded, 150 mm
(4) / 0226-09996 / Loader interconn,bd
(1) / 0040-09148 / Bracket,flopy
(5) / 0020-22982 / Adapter tin 8"wafer chamber 16
(1) / 0190-76167 / Assy,pcb 60 e.w pneumatic manif
(2) / 0020-03433 / Pedestal 4" ext
(1) / 0100-35073 / Rotation drive
(2) / 0010-30360 / Connection shield assy
(1) / 0090-09262 / Core,assembly, magnet driver,
(3) / 0010-10327 / Shell assy, esc and pedestal, 2
(1) / 0240-34129 / End p30 software kit, 3
(2) / 0020-39685 / Sleeve insulating ir temp
(1) / 0040-31943 / Top lid,chamber,r2,oxide
(1) / 0240-09772 / Eni oem-12 am/12 a rf plas
(1) / 0020-04225 / Cover endpoint module assy
(3) / 0010-10527 / Padestal assy 200 mm flat is ni
(1) / 0190-09445 / Assy endpoint detector c
(4) / 0240-76513 / Kit, h-slit valve, p5000, remo
(1) / 0010-13140 / Assy, 15-slot tray, 200 m
(1) / 0010-09263 / Core, assy, pneumatic manifold
(1) / 0040-70031 / Chamber weldment, lower, 29 po
(2) / 0010-13150 / Core, independent helium press
(2) / 0010-76005 / Assy blade robot 8"
(1) / 0010-13320 / P5 k robot 6", core
(4) / 1110-01006 / Core, rf match 350khz
(2) / 0190-35510 / Mcvd endpoint assy
(7) / 3930-01104 / Core, cntrl turbo pump 100/240
(4) / 0190-09663 / Actuator, slit valve seal za
(1) / 0010-76172 / Assy throttle valve nitride
(3) / 0730-01026 / Core, conv freq mag lev turbo
(1) / 0240-76975 / Kit, 8-sot wps common
(2) / 0190-70080 / ENI OEM-12B
(4) / 0730-01046 / Conv freq nt341 mc/mct 208 v 50
(1) / 0010-09054 / Core, analog input, pcb
(1) / 0010-09795 / Core, universal teos lid assy.
(1) / 0010-10953 / Blade assy. 8" notch sst
(1) / 0010-10448 / Hinge assy, r2 etch chamber
(1) / 0010-09935 / Core, monochomator module assy
(1) / 0010-30724 / Pedestal assy, 200 mm, flat,
(1) / 0010-76017 / 125mm cassette assembly
(2) / 0010-10612 / Core, assembly,lid, kalrez 203
(1) / 0242-38327 / Throttle valve kit, dual spr d
(2) / 0010-09837 / Assy, wafer lift, bwcvd
(1) / 0242-37680 / Throttle/isolation valve
(1) / 0021-09835 / Liner, poly, mxp+
(2) / 0730-01035 / Cntrl turbp pump seiko seiki s
(1) / 0010-76019 / Assy 8" cassette handler
(1) / 0010-13138 / Assy, tray, 200 mm. .450 spg. w
(2) / 0020-04172 / Insert, base, p5000
(3) / 0040-09002 / Chamber body, etch
(1) / 0010-09837 / Assy, wafer lift, bwcvd,
(1) / 0010-38437 / Chuck, plasma, 200 mm,
(1) / 0040-09286 / Chamber 4,5,6 in. cvd
(1) / 0010-39735 / Clamp lid, kalrez
(7) / 0010-36162 / Simple cathode rf match assy
(1) / 0010-10430 / Core, assy, dopant ampule cham
(4) / 0190-20048 / W vme scb synergy bd pac
(1) / 0010-70001 / 6" cassette handler assy
(1) / 0200-01622 / Plate, cvr, 8" htr, dxz,
(2) / 0040-09136 / Cvd, chamber
(1) / 0010-13321 / P5000 robot, core
(1) / 0020-13814 / 200mm blade w/wafer pock
(1) / 0010-70000 / Assy,minicontroller,w/teos opt
(1) / 0010-09547 / 200 mm bwcvd lamp mod
(1) / 0040-09094 / Chamber, 200 mm cvd
(1) / 0015-20115 / -standard body / water coo
(1) / 0010-70058 / Core,29 slot storage elevator,
(2) / 0010-21495 / Motorized, lifter assy
(6) / 3620-01345 / Pump, turbomolecular,
(1) / 0010-10291 / Heater, fc, notch, low t
(1) / 0010-01119 / Super-e flat,esc 200 mm cathode
(1) / 0010-20480 / Assy 200 mm cassette handler le
(2) / 0010-20481 / Assy 200 mm cassette handler ri
(1) / 0242-70219 / P5 k robot 4"- 6" refurb
(1) / 0010-21706 / Vectra imp .015 cap pvd
(1) / 0010-03661 / **pn 0010-34322 ** assy,
(1) / 0010-09616 / Assy, 150 mm susceptor, univers
(1) / 0010-10009 / Drive assy hrtv
(1) / 0010-10181 / Feedthru assy, helium, 2 pass
(4) / 0010-10640 / Bellows assy, cathode lift,
(3) / 0010-10955 / Assy, soft pump valve, geco
(1) / 0010-10995 / Assembly, soft pump valve geco
(1) / 0010-18024 / Pyrometer, 2 mm probe 300 mm
(1) / 0010-37128 / Box db9 tri-port chx pass-thru
(1) / 0010-38178 / Assy. drive throttle valve
(1) / 0010-70065 / Di sensor assy heat exchanger
(1) / 0010-70822 / Cylinder, pneumatic, lift, smc
(2) / 0010-75311 / Di sensor, sst, heat exchanger
(1) / 0010-76497 / Assy, manifold, remote ev with
(1) / 0015-00084 / Tube, heat exchanger
(984) / 0015-09067 / Washer 4 spring ni plated wav
(4) / 0015-09093 / Rf shield 100-150mm
(2) / 0015-09120 / Mod, fitting thermocouple
(2) / 0015-09172 / Teflon tube 7.75 3/8
(1) / 0020-03413 / Insert, 150 mm oxide
(2) / 0020-03432 / Insert,ped,ext, 4.
(1) / 0020-03581 / Hinge pivot hardened
(1) / 0020-03657 / Rim
(1) / 0020-03673 / Clamp ring 4 poly version 3.0
(3) / 0020-03690 / Finger flange
(2) / 0020-04068 / Bracket, heater
(3) / 0020-04149 / Blank-off plate rotometer
(3) / 0020-04150 / Bushing, water box
(6) / 0020-04191 / Switch bracket
(81) / 0020-04193 / Captive socket head cap screws
(1) / 0020-04306 / Insert, 200 mm (ext. cathode)
(3) / 0020-06043 / Throttle valve plug
(2) / 0020-06048 / Throttle valve bushing
(1) / 0020-07383 / Lh manifold adaptor
(2) / 0020-09030 / Base flange
(3) / 0020-09031 / Insulating washer
(1) / 0020-09037 / Short spacer rfc
(1) / 0020-09048 / Cylinder stop
(1) / 0020-09054 / Sensor bracket
(1) / 0020-09059 / Top, hinge bracket
(4) / 0020-09127 / Clamp i/o valve p5 k
(4) / 0020-09128 / Bell crank i/o slit valve p500
(1) / 0020-09130 / Shaft i/o p5000 valve
(2) / 0020-09131 / Door i/o p5000 valve
(3) / 0020-09302 / Plug
(8) / 0020-09365 / Brkt, lower coil
(7) / 0020-09376 / O-ring, bottom cover
(1) / 0020-09433 / Plug rf conn
(2) / 0020-09434 / Housing, plug
(8) / 0020-09437 / Clamp, tub 2" frame member
(6) / 0020-09438 / Clamp, tube 1" frame member
(1) / 0020-09530 / End cap, hinge
(1) / 0020-09604 / Housing
(2) / 0020-09608 / Plug leak check port
(6) / 0020-09610 / Plate retainer
(1) / 0020-09651 / Brkt mtg, magnet terminal bloc
(1) / 0020-09664 / Cover hinge
(1) / 0020-09697 / Hinge stop
(4) / 0020-09843 / Sleeve wafer lift pin
(2) / 0020-09845 / Plunger intrlk sw o/n
(1) / 0020-09882 / Plate, connector, "n"
(51) / 0020-09912 / Lifting pin, sputter
(2) / 0020-09932 / Seal shipping bellows
(1) / 0020-10027 / Ring inner 1.50" dbl annulus
(1) / 0020-10059 / Ring wafer lift (ni/so)
(2) / 0020-10069 / Tube receptacle light pen
(1) / 0020-10134 / Manifold output pl
(4) / 0020-10189 / Plate connector 200 m
(4) / 0020-10308 / Bushing, plug 200mm silane
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