Gebraucht AMAT / APPLIED MATERIALS Lot #9229533 zu verkaufen

Lot of spare parts: Qty / Part number / Description (1) / 0020-30101 / Top plate, gas box (7) / 0020-30105 / Handle, chamber clamps (1) / 0020-30107 / Perf plate, 150mm (1) / 0020-30110 / Collimator, outer 200mm (1) / 0020-30110 / Collimator (6) / 0020-30115 / Covers, gears (1) / 0020-30172 / Housing, endpoint detector (1) / 0020-30173 / Filter,housing, endpoint detector (3) / 0020-30176 / Spacers (1) / 0020-30178 / Sputter etch carrier (3) / 0020-30190 / Adaptors, top egec (1) / 0020-30195 / Cover, top egec (1) / 0020-30198 / Tube, external tapered, ext (1) / 0020-30205 / Pedestal (5) / 0020-30222 / Adapter, handle top covers (9) / 0020-30222 / Adapter, handle top covers (3) / 0020-30223 / Gas distribution plates (1) / 0020-30226 / Bracket, switch (113) / 0020-30228 / Screen, plasmas (1) / 0020-30291 / H2o manifold (12) / 0020-30302 / Scr mach skt hd4-40x25l alum (268) / 0020-30304 / Screws, alum (1) / 0020-30314 / Pedestal, alum/poly/wsi 150 mm flat (23) / 0020-30314 / Pedestals, alum/poly/wsi 150 mm flat (2) / 0020-30329 / Screws (5) / 0020-30342 / Pedestals, 8,metal, notch (54) / 0020-30345 / Plugs, dc, 8" ,metal (175) / 0020-30354 / Fingers (3) / 0020-30362 / Top rings, sxtal 200 mm (1) / 0020-30382 / Cap nut, top mount (2) / 0020-30395 / Bolts (1) / 0020-30396 / Nut (1) / 0020-30397 / Stud (1) / 0020-30398 / Clamp (20) / 0020-30401 / Support, susceptor arms (3) / 0020-30402 / Support arms, top mount (3) / 0020-30418 / Rings, top (1) / 0020-30418 / Ring, top (1) / 0020-30446 / Blocker plate (2) / 0020-30447 / Blocker plates (2) / 0020-30456 / Cover back lamps 8" prsp (15) / 0020-30477 / Leveling bars (2) / 0020-30482 / Couplings, flex 8" oxide (3) / 0020-30482 / Couplings, flex 8" oxide (4) / 0020-30482 / Couplings, flex 8" oxide (2) / 0020-30483 / Clamp rings, 200mm (1) / 0020-30486 / Sensor cap, modified (1) / 0020-30509 / Plate, gas box (1) / 0020-30511 / Manifold, water (1) / 0020-30537 / Insulation, side panels, liq (2) / 0020-30566 / Clamp rings (1) / 0020-30570 / Gas distribution plate (2) / 0020-30586 / Collimators, 200 mm outer shadow ring bwcvd (1) / 0020-30602 / Pumping plate, 200mm bwcvd (1) / 0020-30607 / Carrier, 100-200 mm heweb (1) / 0020-30608 / Pedestal, sealless 150 mm heweb (14) / 0020-30608 / Pedestals, sealless 150 mm heweb (2) / 0020-30628 / Rings, clamps, vespal poly/wsi 200mm (16) / 0020-30656 / Screws (5) / 0020-30670 / Pickups (1) / 0020-30710 / Ring, clamp (2) / 0020-30723 / Lift cylinders (1) / 0020-30773 / Gas distribution (2) / 0020-30813 / Inserts (1) / 0020-30869 / Tuning rod (1) / 0020-30870 / Tuning sleeve (1) / 0020-30875 / Bracket match, delta, centura mainframe (2) / 0020-30885 / Sleeves (1) / 0020-30886 / Washer (2) / 0020-30888 / Washers (2) / 0020-30893 / Retainer hoop fingers (1) / 0020-30909 / Foam insulator (1) / 0020-30914 / Screw (1) / 0020-30949 / Pedestal cover (1) / 0020-30977 / Flange, top lid (1) / 0020-30977 / Flange, top lid (1) / 0020-30983 / Plate, pumping (2) / 0020-30983 / Plates, pumping (12) / 0020-30984 / Plugs, pedestal (2) / 0020-30988 / Adaptors, top cover (1) / 0020-30990 / Housing, feedthru (2) / 0020-30990 / Housings, feedthru refurbished (1) / 0020-30991 / Cover, top feedthru prsp (1) / 0020-30991 / Cover, top feedthru prsp (1) / 0020-30992 / Plate top, feedthru, asp (4) / 0020-30999 / Centering tools, 100 mm (6) / 0020-31008 / Inserts (1) / 0020-31016 / Housing, quartz tube (1) / 0020-31016 / Housing, quartz tube bwcvd (3) / 0020-31019 / Perf plate, 200 mm (6) / 0020-31019 / Perf plate, 200 mm (12) / 0020-31020 / Plate blocker, 200 mm bse bwcvd (7) / 0020-31020 / Plate blocker, 200mm bse bwcvd (1) / 0020-31035 / Manifold, input bwcvd (1) / 0020-31108 / Adapter, strain relief, prsp3 (8) / 0020-31132 / Aluminum screw (1) / 0020-31147 / Insert base, 150-200 mm (1) / 0020-31147 / Insert base, 150-200 mm (2) / 0020-31147 / Insert base, 150-200mm (1) / 0020-31147 / Insert base, 150-200 mm (1) / 0020-31147 / Insert base, 150-200 mm (2) / 0020-31154 / Seal, sleeve bellows (1) / 0020-31163 / Ring, focusing, al 200 mm psrp 3 (67) / 0020-31252 / Finger (2) / 0020-31253 / Flag (1) / 0020-31260 / Manifold, baratron, asp (3) / 0020-31275 / Plug dc (1) / 0020-31281 / Hinge, cvd chamber 8" (2) / 0020-31282 / Hinge, cvd chamber (4) / 0020-31282 / Bracket, hinge refurbished (6) / 0020-31283 / Hinge refurbished (1) / 0020-31292 / Wall, center asp chamber (1) / 0020-31293 / Wall, left chamber asp (1) / 0020-31293 / Wall, left chamber asp (1) / 0020-31294 / Wall, right chamber asp (1) / 0020-31294 / Wall, right chamber asp (5) / 0020-31296 / Screw (1) / 0020-31299 / Housing (4) / 0020-31304 / Insert, outer (7) / 0020-31304 / Insert, ni ,outer 200 mm poly (2) / 0020-31343 / Gas distribution plate (1) / 0020-31345 / Collimator lamp module au-plated 100-200 mm (1) / 0020-31346 / Diff lamp module au-plated 200 mm (2) / 0020-31375 / Flange, insulating unibody etch ch (4) / 0020-31376 / Flange, base (1) / 0020-31376 / Flange, base, etch chamber (9) / 0020-31401 / Screw (1) / 0020-31408 / Adapter ring, etch chamber unlid cover (1) / 0020-31422 / Brkt,mtg,mag gen interface, asp (2) / 0020-31461 / Pedestal cover (5) / 0020-31461 / Pedestal cover (2) / 0020-31463 / Carrier compliant, ext cathode (2) / 0020-31493 / Gas distribution plate, 133 holes (24) / 0020-31501 / Finger, chuck, 200 mm asp (2) / 0020-31501 / Finger, chuck, 200 mm asp (1) / 0020-31502 / Chuck, 150 mm asp (2) / 0020-31503 / Chuck, 200 mm asp (1) / 0020-31505 / Shower head (2) / 0020-31506 / Shower head (1) / 0020-31507 / Shower head (1) / 0020-31509 / Pedestal, rimless ox/mlr/nit 200 mm (2) / 0020-31510 / Pedestal (12) / 0020-31532 / Hinge universal chamber (1) / 0020-31536 / Gas distribution plate, stealth oxide, 96 hole (1) / 0020-31548 / Gas distribution plate 133 hole (1) / 0020-31548 / Gas distribution plate 133 hole (3) / 0020-31556 / Bezel, filler (3) / 0020-31557 / Connector, rf plate esc (3) / 0020-31558 / Rf plate, esc (1) / 0020-31565 / Plate, right controller box, esc (1) / 0020-31566 / Plate, left controller box, esc (1) / 0020-31568 / Plate, top controller box, esc (13) / 0020-31570 / Lift pin (2) / 0020-31609 / Lid cover, cvd delta (18) / 0020-31619 / Strap connecting, 150 mm ceramic (2) / 0020-31627 / Flange, base esc (5) / 0020-31627 / Flange, base esc (2) / 0020-31630 / Insulator, bottom dc contact esc (2) / 0020-31632 / Carrier, esc (2) / 0020-31632 / Carrier, esc (4) / 0020-31633 / Lift pin, conductive (1) / 0020-31638 / Cover, 200 mm, esc (3) / 0020-31651 / Centering pin (9) / 0020-31659 / Cover, vespal (6) / 0020-31660 / Bracket, symmetrical (12) / 0020-31660 / Bracket, symmetrical (8) / 0020-31660 / Bracket, symmetrical (4) / 0020-31661 / Bracket, symmetrical coil side (6) / 0020-31662 / Bracket, clamp (8) / 0020-31662 / Bracket, clamp (10) / 0020-31662 / Bracket, clamp (29) / 0020-31663 / Bracket, lower coil (16) / 0020-31663 / Bracket, lower coil (1) / 0020-31667 / Plate, bottom controller box, esc (5) / 0020-31667 / Screw (4) / 0020-31668 / Screw (1) / 0020-31687 / Adaptor, a&b position servicable gate valve (3) / 0020-31692 / Ftg, elbow gas feed, unibody (1) / 0020-31694 / Cover heater (2) / 0020-31730 / Adapter ring, etch chamber unlid cover (7) / 0020-31742 / Panel (14) / 0020-31775 / Ring, ceramic (2) / 0020-31797 / Gas plate, 61 holes 156 thick (2) / 0020-31804 / Gas plate, 200 mm (1) / 0020-31820 / Gas distribution plate (1) / 0020-31833 / Hinge, bracket (1) / 0020-31834 / Hinge, pivot metch (1) / 0020-31835 / Panel, heated turbo converter (1) / 0020-31835 / Panel, heated turbo converter (2) / 0020-31838 / Adaptor, delrin (1) / 0020-31855 / Heat shield, throttle valve (1) / 0020-31859 / Panel, facilities upper phase iia metal etch (6) / 0020-31874 / Panel, shield a & c position system control (1) / 0020-31874 / Panel, shield a & c position system control (8) / 0020-31901 / Cover (1) / 0020-31939 / Cylinder, clamp (1) / 0020-31940 / Pedestal, al 200 mm (5) / 0020-31940 / Pedestal, al 200 mm (1) / 0020-31940 / Pedestal, al 200 mm (6) / 0020-31998 / Pedestal, 200mm, al, notch, finger (1) / 0020-31998 / Pedestal, 200mm, al, notch, finger (4) / 0020-32009 / Strip, cathode (1) / 0020-32011 / Plate (48) / 0020-32020 / Plug (46) / 0020-32049 / Cap, vespal (1) / 0020-32148 / Showerhead (1) / 0020-32163 / Cover, bottom pedestal esc (2) / 0020-32165 / Esc, cover (1) / 0020-32165 / Cover, esc (1) / 0020-32262 / Gas distribution plate (45) / 0020-32314 / Lift shim, teos (1) / 0020-32318 / Gas distribution plate, 37holes oxalic, 5-7 mil (4) / 0020-32320 / Gas distribution plate, 133 holes, oxalic 5-7mi (3) / 0020-32320 / Gas distribution plate, 133 holes, oxalic 5-7mi (1) / 0020-32320 / Gas distribution plate, 133 holes, oxalic 5-7mi (3) / 0020-32325 / Strap enclosure (3) / 0020-32326 / Capacitor mount (7) / 0020-32407 / Lift pin (1) / 0020-32837 / Hinge (2) / 0020-32933 / N/a (2) / 0020-32939 / Bracket, llc 29 slot (3) / 0020-32983 / Shim (4) / 0020-33015 / Bearing (36) / 0020-33023 / Bearing (3) / 0020-33044 / Bearing (1) / 0020-33096 / Cover, gas feed r2 (1) / 0020-33100 / Plug, manometer port, r2 (1) / 0020-33328 / Clamp, flange (2) / 0020-33329 / Block, clamp (1) / 0020-33330 / Isolator, clamp (14) / 0020-33339 / Hinge, inner (52) / 0020-33341 / Cap, rf (1) / 0020-33354 / Plug connector rf (1) / 0020-33355 / Shaft hinge (1) / 0020-33412 / Shaft, plug tool for shipping (1) / 0020-33416 / Bracket, hinge r2 (2) / 0020-33643 / Coil, symmetrical mxp (1) / 0020-33816 / Isolator, rf bulkhead dps (50) / 0020-33897 / Window clear, dynasil 1000 (20) / 0020-33900 / Shim, 200 mm (1) / 0020-33936 / Housing (1) / 0020-34030 / Base, simple cathode (1) / 0020-34031 / Pedestal, support mxp+ simple cathode (1) / 0020-34033 / He block, base mxp+ (5) / 0020-34034 / Cylinder, lifter mxp+ etch chamber (3) / 0020-34035 / Lift support (1) / 0020-34036 / Rod, rf (21) / 0020-34038 / Contact retainer (2) / 0020-34046 / Connector, hv (5) / 0020-34048 / Support, bellows simple cathode (2) / 0020-34052 / Cover, rf strap (10) / 0020-34054 / Screw, captive fixture (9) / 0020-34055 / Screw, captive (1) / 0020-34073 / Alignment wing (2) / 0020-34130 / Lift pin (1) / 0020-34140 / Gas distribution plate (1) / 0020-34142 / Chamber lid (1) / 0020-34142 / Chamber lid (1) / 0020-34188 / Adapter refurbished (1) / 0020-34297 / Top cover, ssgd, r2 chamber (1) / 0020-34299 / Flange, insulation unibody 400thk (1) / 0020-34301 / Bracket, nupro valve, r2, 5000, b-c (2) / 0020-34307 / Plenum, rps (21) / 0020-34309 / Bracket, sensor (3) / 0020-34315 / Cathode liner, prs chamber (1) / 0020-34368 / Plate (2) / 0020-34468 / Bracket, gas feed r2, chamber a-d (6) / 0020-34555 / Washer (3) / 0020-34571 / Cap off (1) / 0020-34574 / Rf plate (1) / 0020-34630 / Stand, liquid injection (1) / 0020-34682 / Lever, ratchet dxz (1) / 0020-34694 / Liner, wall mxp+ (1) / 0020-34696 / Liner, slit valve mxp+ (1) / 0020-34731 / Lid, pumping plate (1) / 0020-34731 / Lid, pumping plate (2) / 0020-34731 / Lid, pumping plate (1) / 0020-34739 / Storage base (2) / 0020-34749 / Carrier, esc (2) / 0020-34755 / Insert (1) / 0020-34765 / Jig, cathode carrier (3) / 0020-34776 / Screw (2) / 0020-34823 / Plate, mounting lid-temp controller, 5000 (2) / 0020-34824 / Liner, wall rps (1) / 0020-34828 / Encoder (4) / 0020-34831 / Plate, mounting rf/hv w/interlock (1) / 0020-34896 / Filler, slit valve rps (2) / 0020-34935 / Gas distribution plate (23) / 0020-34977 / Isolator wafer lift resistor (7) / 0020-34985 / Pul tmg belt 1/5 pitch (2) / 0020-35048 / Platform, cassette 200 mm (2) / 0020-35088 / Shaft wing (1) / 0020-35138 / Cassette stage, plated (4) / 0020-35173 / Brkt, door interlock switch (6) / 0020-35237 / Screw, pivot (1) / 0020-35712 / O-Ring (1) / 0020-36049 / Panel, convenience outlet (1) / 0020-36145 / Bracket (1) / 0020-36749 / Clip (2) / 0020-36835 / Bracket (1) / 0020-37066 / Bracket, h2 sensor (2) / 0020-37214 / Lamp base, lower (2) / 0020-37228 / Reflector, lh 2x4 front side (1) / 0020-37229 / Reflector, rh (1) / 0020-37303 / Panel, pos a/c bulkhead d-conns, chamber tray (1) / 0020-37491 / Enclosure, plate PCB/manifold (1) / 0020-37581 / Block (pt-p1-4700) (4) / 0020-37624 / Clamp, filter (1) / 0020-38062 / Insert support (1) / 0020-38065 / Cover (1) / 0020-38065 / Cover, turbo side (1) / 0020-38066 / Plate, support bottom, simple cathode (1) / 0020-38080 / Holder (1) / 0020-38081 / Nut (1) / 0020-38082 / Plate (1) / 0020-38083 / Bolt (1) / 0020-38084 / Rod (1) / 0020-38085 / Screw, rod stopper (4) / 0020-38327 / Coil (1) / 0020-38690 / Ring, capture (1) / 0020-38733 / Pedestal, 195mm, flat simple cathode r2 (2) / 0020-38752 / Lift pin (1) / 0020-38798 / Bezel filler, esc (2) / 0020-38808 / Bottom fan connector bracket (1) / 0020-38809 / Terminal strip mounting bracket (1) / 0020-38923 / Endpoint, plug (4) / 0020-39067 / Bracket, bottom front panel (7) / 0020-39269 / Adapter plate (31) / 0020-39501 / Screw (1) / 0020-39646 / Support bracket, 5200 auto tuner (1) / 0020-39684 / Coil, dps poly (2) / 0020-39692 / Rod (30) / 0020-39695 / Lift pin (1) / 0020-39949 / Bracket (12) / 0020-40164 / Plug (3) / 0020-40190 / Uv filter (1) / 0020-40599 / Brace, pump (2) / 0020-40942 / N2 purge sleeve (15) / 0020-40990 / Sleeve, lift pin (5) / 0020-40992 / Cover plate (15) / 0020-41008 / Shoe, handle (7) / 0020-41048 / Post clamp, lower (2) / 0020-41064 / Lifter, 200 mm (8) / 0020-41118 / Post clamp (4) / 0020-41125 / Washer (1) / 0020-41255 / Nut (1) / 0020-41263 / Aperture (12) / 0020-42067 / Scr pn hd 6-32x44 hast (2) / 0020-42069 / Screw (1) / 0020-42099 / Plate, wxz (1) / 0020-42102 / Shim, teos lift (1) / 0020-42103 / Wafer lift, teos (2) / 0020-42162 / Sleeve, copper, gas tube plug wxz (16) / 0020-42270 / Screw (1) / 0020-42285 / Plate, blocker 8" ec wxz (1) / 0020-42287 / Plate, perf 8" ec wxz (18) / 0020-51284 / Package type b h/e (1) / 0020-51405 / Insert (2) / 0020-56002 / Spacer, viton (7) / 0020-70050 / Clamp, window (2) / 0020-70091 / Duct, pan pump (1) / 0020-70095 / Window a, lid 29 position storage elevator (1) / 0020-70095 / Window, lid 29 position storage elevator (5) / 0020-70121 / Leg, llc (2) / 0020-70123 / Panel, electrical i/o exp gp (1) / 0020-70123 / Panel, electrical i/o exp gp (1) / 0020-70126 / Bracket encoder i/f PCBa mounting (1) / 0020-70127 / Bracket, robot i/c PCBa right (2) / 0020-70128 / Bracket, robot i/c PCBa left (2) / 0020-70139 / Cover, encoder interface board (2) / 0020-70139 / Cover, encoder interface board (1) / 0020-70141 / Pivot block window bellcrank (2) / 0020-70145 / Window, side 29 position storage elevator (4) / 0020-70145 / Window, side 29 position storage elevator (4) / 0020-70189 / Cover interface PCB (1) / 0020-70203 / Blank off (2) / 0020-70203 / Chamber blankoff (1) / 0020-70223 / Blank off (1) / 0020-70254 / Chamber loadlock (58) / 0020-70255 / Bracket, center finder (1) / 0020-70271 / Blade shaft assy, left (2) / 0020-70276 / Enclosure, n2 dry vac PCB (1) / 0020-70277 / Lifter, 125 mm wafer orienter p-5000 (3) / 0020-70285 / Blade 8 inch, buffer, frog leg (1) / 0020-70425 / Bracket, motor (1) / 0020-70426 / Cover (1) / 0020-70427 / Enclosure, PCB (8) / 0020-70428 / O-Ring, viton (4) / 0020-70431 / Ring, rotary seal (57) / 0020-70432 / Hinge (53) / 0020-70433 / Hinge (2) / 0020-70462 / Panel, breaker mounting (1) / 0020-70464 / Plate (1) / 0020-70608 / Vacuum port cover (7) / 0020-70610 / Screen, cover, widebody loadlock (1) / 0020-75388 / Bracket hinge, top left 29 pos storage elevator (1) / 0020-75741 / Clamp, lower mirror wafer slide (1) / 0020-75791 / Cover (4) / 0020-75907 / Hub ,lamp feed thur (2) / 0020-76000 / Flap, throttle (2) / 0020-76042 / Bushing 200 mm wafer cassette handler (1) / 0020-76046 / Flag, home and comb (1) / 0020-76048 / Bracket, motor storage elevator (1) / 0020-76059 / Seal, holder robot drive (1) / 0020-76062 / Shaft robot drive (1) / 0020-76067 / Shaft, lower left arm robot (2) / 0020-76077 / Bushing shaft retainer robot drive (1) / 0020-76096 / Spacer set 2 robot drive (1) / 0020-76097 / Spacer set 3 robot drive (2) / 0020-76104 / T bar, 125/150 mm robot blade (4) / 0020-76109 / Cover, 200 mm robot blade (1) / 0020-76110 / T bar, 200 mm robot blade (1) / 0020-76159 / Bracket (1) / 0020-76169 / Cover (1) / 0020-76182 / Housing, pedestal cooldown, non-enp refurbished (2) / 0020-76183 / Door, slit valve metal etch (5) / 0020-76184 / Channel chamber tray (2) / 0020-76436 / Screw, tee (1) / 0020-76449 / Bracket mtg short manifold fac i/f centura (1) / 0020-76474 / Bracket, gen rack connector plate (1) / 0020-76690 / Mount, door (1) / 0020-76733 / Cap (3) / 0020-76794 / Screen, fan dual modified (8) / 0020-76863 / Hinge, block outer bottom (1) / 0020-76909 / Blade (6) / 0020-78346 / Strips (1) / 0020-78709 / Gimbal rod (4) / 0020-78711 / Clamps (14) / 0020-78796 / Support pads (1) / 0020-79091 / Wafer ring (1) / 0020-81076 / Gasket, 125/150mm insert (1) / 0020-81455 / Screw, h/sink, m8 (1) / 0020-81546 / Cap, pressure, 100-150mm (1) / 0020-81549 / Spacer (1) / 0020-89025 / Reflector (2) / 0020-92560 / Screws (3) / 0020-95175 / Gaskets, graphite (2) / 0020-98329 / Clamps, plate (8) / 0021-00043 / Rf shield covers (1) / 0021-00043 / Rf shield cover (4) / 0021-00098 / Housings, busing throttle, dps 550" st (15) / 0021-00098 / Bushings, dps throttle valve (2) / 0021-00280 / Liners, slit (6) / 0021-00488 / Covers (1) / 0021-01285 / Reflector (1) / 0021-01550 / Pin, ceramic (1) / 0021-01569 / Blocker plate (1) / 0021-01730 / Lid, multi slot cool down (2) / 0021-02951 / Shafts (6) / 0021-03095 / Screws, centering (3) / 0021-03488 / Face plates, 200 mm (1) / 0021-03878 / Flap, anodized (1) / 0021-03977 / Cover, safety interlock (3) / 0021-04249 / Inner cup coils (2) / 0021-06923 / Clamps, base, flex gas line dz ihc (1) / 0021-06924 / Clamp (4) / 0021-08612 / Pedestal covers (1) / 0021-09004 / Shield, protective mxp (1) / 0021-09016 / Wafer transfer lid, mxp+ (12) / 0021-09069 / Sleeves (18) / 0021-09069 / Sleeves (16) / 0021-09070 / Washers (1) / 0021-09077 / Adapter (9) / 0021-09097 / Plates, liner alignment, vespel (2) / 0021-09098 / Separation rings (1) / 0021-09426 / Bracket, al recessed endpoint (3) / 0021-09434 / Actuators, rf safety (1) / 0021-09453 / Cleaning tool, poly tv (1) / 0021-09458 / Housing, inner cooling dps poly (1) / 0021-09724 / Strap, rf (1) / 0021-09724 / Strap, rf (42) / 0021-09771 / Screws, vespel (1) / 0021-09780 / Thermal foil (3) / 0021-09836 / Gaskets (1) / 0021-09836 / Gasket pedestal simplified, poly etch (26) / 0021-09836 / Gasket pedestal simplified poly etchers (1) / 0021-09875 / Collar ring, shower head 200 mm (2) / 0021-09902 / Gaskets, thermal esc, web (1) / 0021-09947 / Housing, tc amp box, dxz (1) / 0021-09948 / Cover, tc amp dxz (4) / 0021-09956 / Handles (2) / 0021-10019 / Covers, bolt, thin ped, esc (5) / 0021-10134 / Sleeves, extended (3) / 0021-10140 / Doors, slit valves (1) / 0021-10213 / Mxp+ wafer transfer (1) / 0021-10261 / Enclosure (8) / 0021-10418 / Plates (1) / 0021-10545 / C-clamp (1) / 0021-10585 / Tc plate asp (16) / 0021-10597 / Retainers, O-Rings (1) / 0021-10602 / Base, simple cathode (1) / 0021-10642 / Feedthru, he housing (1) / 0021-10642 / Feedthru, he housing (1) / 0021-10693 / Insert, slit valve (4) / 0021-10797 / Clamps, outer cooling coil (5) / 0021-11098 / Support cushions (1) / 0021-11297 / Cover, outer clamp (4) / 0021-12323 / Clamps (10) / 0021-18193 / Flags, heater lift producer (5) / 0021-18226 / Upper hard stops.