Gebraucht LAM RESEARCH Spare parts for Etcher #293585559 zu verkaufen

Qty / Part number / Description (1) / 796-098150-002 / Slit valve heated (1) / 853-460938-001 / Strip WVD heated line (3) / FC-2900 MEP5 / MYKROLIS, MFC N2 (2) SLM (2) / 796-006238-002 / Controller, throttle valve, low pressure (3) / 99283-R1 / VAT 64 Rotary feedthrough (1) / 853-011053-002 / Assy, manometer weldment tree (1) / 796-091975-001 / Turbo angle valve (1) / 839-460152-006 / MW lower electrode, stripper chamber (1) / 716-330892-007 / Plate, shower head (1) / 715-011664-006 / Gap lower electrode (1) / 718-094523-282 / ESC Electrode, 8" (2) / NTT 204 / Range 250 psia 4 - 20 ma press transducer (1) / SS-44 F6 / SWAGELOK Hand valve 2 way 3/8 NPT (2) / 796-092371-001 / ISO Valve rebuild kit (1) / UNIT UFC-1661 / Cl 300 SCCM Hos (1) / UNIT UFC-1661 / CHF3 100 SCCM Hos (1) / UNIT UFC-1660 / He 200 SCCM HIU (1) / 716-460216-002 / MW Ring Focus, 8" STP (2) / 839-330268-001 / 90° Penning gauge (1) / 772-096269-901 / Regulator micro SST VCR (3) / 796-092468-001 / Valve pressure release adjust, 3 - 50 psig (1) / 515-093934-003 / Tool gas ring, RMV (1) / 515-432084-001 / Alignm tool VCE4 (1) / 853-073116-200 / Cool PM ESC (3) / 770-430124-001 / Double acting air cylinder / double rod, low temperature (2) / 853-331021-001 / L Window 94/96 (3) / 715-032012-004 / Plate, window, chamber, A6 (3) / 715-031984-003 / Frame, chamber, window (2) / 716-011009-001 / Window, quartz (2) / 716-031052-001 / Window, quartz, HTD endpoint (2) / 839-031054-010 / Retainer, universal window (4) / 839-011039-005 / Retainer, window (3) / 713-240548-001 / Electrode protector ESC (1) / 713-441645-001 / Electrode protector ESC cover (1) / VC-4900 VR / MYKROLIS MFC H2O 1000 SCCM (1) / 853-023537-001 / ISO Valve (1) / SS-FL4 RM4 RF4-72 / Flex gas delivery line (2) / 853-370361-001 / RF Cable (6) / 715-330745-003 / HSG Bellow (2) / 666-390164-002 / Temperature sensor, J Type (2) / 715-330394-010 / Bracket chamber lin 9600 PTX (1) / 853-012176-006 / Arm holder, ELL, 6" (1) / 853-017640-002 / Shuttle arm motor (3) / 853-015982-001 / TCP Manual tune box (3) / 853-015030-001 / Mini match manual tune box (1) / 853-012566-001 / Shuttle spatula arm (3) / 839-031766-001 / 4-Pin lifter bellow (2) / 715-330746-002 / BSR Rod plunger (2) / 853-031764-004 / 4-Pin cylinder (4) / 716-011981-001 / Clamp pin (2) / 770-093262-001 / Pneumatic cylinder 1- 1/8 bore (5) / 663-091343-001 / Battery backup SSO / Throttle (1) / 770-090142-001 / Air cylinder double rod end 4-pin (1) / 853-017163-101 / RF Sensor box (6) / 839-330743-002 / BSR Bellow (15) / 853-330282-600 / RF Sensor box GND Ring cap 96 PTX (1) / 768-093959-001 / VAC Switch 75 torr (2) / 839-430126-003 / Wafer lifter (2) / 853-370871-002 / VCI Kit (1) / 853-330476-002 / Assy ESC RF Filter 9600 SE (2) / 810-017012-002 / HB PCB (1) / 810-017095-010 / MB PCB (1) / 810-0170001-001 / I/O MB (2) / 723-550543-001 / Align spacer viewport (1) / 515-540061-008 / Fixture align Wafer XPRT, 8" A4 (1) / 810-000355-001 / Cool stat PCB (1) / 644-093172-004 / Cable 4 pole 50 A type A (1) / 713-550535-001 / Viewport align quartz (1) / 715-073073-003 / Cool station ESC base plate (1) / 796-094747-002 / VCE ISO Valve (1) / 796-094595-222 / Valve, throttle, belt drive (2) / 839-014911-901 / Valve (1) / HY200 3437 0560 AG04 / VAT 64 Motor (1) / 796-094363-002 / Valve LPV-40 C0V5 Viton (1) / 766-009866-080 / ISO Valve bellow NW80 assy kit (1) / 839-024446-100 / Weldment He cooling hi conductance (2) / 839-024445-100 / Weldment He line (1) / 718-098591-001 / Pendulum seal plate hard anodized (2) / 716-330891-002 / Window TCP Quartz 96PTX (4) / 853-331025-001 / Assy top cover 94/96 (1) / 853-461152-001 / WVD Rect tank (2) / 715-073071-002 / Cool station 3 pin holder (2) / 839-460039-001 / Bellow (2) / 678-008922-001 / DC Heater (5) / 770-062346-001 / Air cylinder (7) / 716-360075-001 / ISO Valve insulated jacket (1) / 865-097951-001 / MW CPS Buss module (2) / 810-017008-001 / Assy PCB temp sensor (4) / 790-098547-001 / MW Applicator kit (3) / 644-099462-001 / Relay SSR 25 A (3) / 768-095214-002 / VAC Switch 400 torr 10 RA (1) / 839-460038-001 / Weldment bellow feedthru (1) / 853-494888-003 / Assy cable hal over temp signal (2) / 853-017936-001 / Assy cable RF match (2) / 768-098564-002 / Water flow switch (3) / 715-461238-001 / MW Stand off baf stripper (2) / 678-092469-002 / Turbo jacket (3) / 853-032946-003 / Assy harn heater ISO angle valve (3) / 716-360075-001 / ISO Angle valve insulated jacket (2) / 853-370173-001 / Assy harn heat exchanger 1000l (4) / 715-330778-001 / BSR Ring bellows (1) / 853-494961-002 / Assy GFI XFMR MTA Connection (1) / 853-360224-001 / Assy harn heat exchanger (1) / 839-073081-001 / Bellow (1) / 853-017410-003 / Assy cable lower match (1) / 853-460080-001 / Assy tilt switch split chamber (9) / 715-460041-002 / Cool station pin (1) / 853-330535-002 / Assy harn over temp switch 9600xx (7) / 853-034112-006 / Temeparture sensor (1) / 853-494468-001 / Temeparture sensor, J Type (1) / 853-494468-002 / Temeparture sensor, J Type (1) / 666-390164-001 / Temeparture sensor, J Type, encap, 8" (6) / 752-004083-001 / 0.125 x 1.875 Shaft prec (2) / 853-017633-008 / Assy optical sensor (4) / 853-017633-009 / Assy optical sensor (2) / 853-370726-001 / Assy heater CRTG 150w with cord (2) / 853-494788-001 / Assy heater slit valve 150 W (2) / 853-494433-010 / Assy heater CRTG mf (2) / 853-494433-011 / Assy heater CRTG (4) / 853-031499-001 / Assy heater CRTG 150 W (3) / 853-491882-013 / Assy heater CRTG 150 W, 13" (3) / 853-330316-019 / Assy heater CRTG 100 W, 19" (3) / 853-330316-028 / Assy heater CRTG 100 W, 28" (3) / 853-330316-042 / Assy heater CRTG 100 W, 42" (2) / 853-460972-001 / Assy retained encpsltd al hsng, 18" (1) / 796-093088-005 / Pendulum VAT Controller 64pm 3c 00 (2) / 853-494432-010 / Heater mass flow assy (1) / 714-347431-001 / Screen vacuum port (1) / 810-017003-001 / Assy PCB Dip (1) / 810-000355-002 / Interface PCB cool station (2) / 799-550618-001 / PCB T1/T2 Motor mag 7 (2) / 770-062336-001 / Air cylinder, 1 8/16A 40 STK (1) / 685-097951-001 / Bass module (1) / 799-550734-001 / Emitter safety kit door VCE (1) / 853-550032-001 / Assy seal LT SCE (2) / 713-550500-001 / Insulator, feedthru, VCE-4 (1) / 676-094241-001 / Assy, motor (3) / 739-550223-001 / Seal, lip (3) / 739-550096-001 / Seal, elgtloylite spring, 5/8" ID rotate (1) / 853-550095-001 / Radial motor assembly (2) / 799-432042-XXX / End effector, 6" (1) / - / Assy PCB Personality board (1) / 799-550530-001 / Assy, wafer rotate module (3) / 853-015060-001 / Temperature sensor (1) / 685-098604-012 / Pen lt bft ca tif switch (2) / 714-440309-001 / Gate valve insert (1) / - / Penning gauge weld (1) / 001-1386-02 / Assy radial axis motor (6) / 001-9077-01 / Quartz, window (1) / 001-1957-03 / Lower limit switch (1) / 001-9608-01 / Ring up seal spacer (3) / 677-090499-001 / Fan 39 CFM DC (2) / 716-074512-002 / Pin lifter loadlock (1) / 001-1383-06 / Motor (4) / 714-4324-13 / Drive belt (1) / 002-2112-01 / Assy onto sensor array vice 4 tilt (2) / 001-1959-01 / Home sensor (1) / 713-442067-001 / Gate valve cover (1) / 799-550755-001 / Viewport window kit CHT VCE (8) / 849-432142-001 / Effector pad (1) / 713-432060-001 / Aligned viewport acrylic (1) / 001-4187-01 / PCB (2) / 001-1957-02 / Assy PCB redial axis sensor (2) / 001-1863-03 / Assy CMD cable (8) / 842-092162-001 / Kit rebuild valve pad O-Ring (4) / 839-014929-900 / ELL N2 Basllast weldment (1) / 810-017001-001 / Assy, PCB, I/O, mthbd (1) / 714-031053-001 / Screen, window, HTD endpoint (1) / 853-23537-001 / - (1) / 853-017640-02 / - (3) / 716-330352-001 / Insulator, HTD, endpoint (4) / 739-098594-001 / Locking ring seal kit (1) / 715-460089-001 / Plate chm blackoff (2) / NTT204 / Press transducer 250 psia MYKROLIS (1) / 853-011094-102 / Monochromator (2) / 685-097073-600 / Computer (1) / - / MYKROLIS Pressure transducer NTT204 - 250PSI (1) / - / SWAGELOK SS-44F6 2 way 3/8 valve (1) / 796-09237-001 / Turbo ISO angle valve (1) / SS-44F6 / SWAGELOK Hand valve 2 WAY 3/8 NPT (1) / - / Harmonic arm drive (5) / 715-030319-001 / GND Ring cap 96 PTX (1) / SS-FL4RM4RF4-72 / Flex gas delivery line (1) / 853-025835-001 / H20 Vapor 1000 SCCM with controller (1) / - / Penning gauge weld (1) / VC-4900VR / MYKROLIS MFC H2O 1000 SCCM (1) / - / Assy PCB personality board.