Gebraucht NOVELLUS Chambers for Concept 2 Speed #9409213 zu verkaufen

8" Chamber A and B: IOC Version: 4.1 PFEIFFER TMH 1600PC Turbo vacuum pump Match network: TRAZAR AMU Pedestal lift type: Concentric cylinder Input location (Gas, PCW, CDA): Bottom Throttle type: MKS 153D Dome type: Top cool dome Manometer: MKS 100 mm Torr Typan 10 Torr Gas / MFC / MFC Size / MFC Area SiH4 / MFC4 / 200 SCCM / FC7800CD He / MFC5 / 1 SLM / - H2 / MFC8 / 2 SLM / FC7800CD O2 / MFC2 / 500 SCCM / FC7800CD Ar / MFC1 / 500 SCCM / FC7800CD NF3 / MFC3 / 1 SLM / FC7800CD NF3 / MFC7 / 300 SCCM / - 2000 vintage.