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ID: 9260052
Magnet and robot:
(2) / 0015 09091 / Lamp drivers
(1) / 0015 09091 / Lamp driver
(2) / 0190 36315 / Magnet drivers
(1) / 0190 70060 / 4-Channel magnet driver
(1) / 0190 36315 / Magnet driver
(1) / 0010 09337 / Lamp module
(1) / 0100 09978 / Lamp module
(3) / - / Cassette assy
(1) / 1070058 / Storage elevator
(1) / 1009195 / P5000 Robot assy
(1) / 1009049 / -
(1) / 1076000 / P5000 Robot assy
(1) / - / P5000 Robot assy
(1) / 0010-76000 / Robot
(1) / - / Cylinder
Boards and Hard Disk Drive (HDD):
(1) / 0100 09224 / Expanded RS232 interconnect board
(1) / 0100 09138 / Robot interconnect board
(1) / 0100 09117 / Dio fuse board
(2) / 0100 09054 / Analog input boards
(2) / 0100 11001 / Analog output boards
(1) / 0190 76050 / Video controller board
(1) / 0100 20001 / System electronics interface board
(2) / 0100 11002 / Digital I/O boards
(1) / 0100 00396 / Analog I/O board
(3) / 0100 09054 / Analog input boards
(4) / 0190 09368 / Video boards
(2) / 0100 11001 / Analog output boards
(1) / 0100 20100 / Analog in/out put board
(2) / 0100 09117 / Dio fuse boards
(1) / 0100 09006 / Intelligent interface board
(1) / 0100 20001 / Storage elevator interlock
(1) / 0100 09146 / Center finder sensor board
(2) / 0100 09134 / Dio fuse boards
(1) / 0100 09145 / RS232 Video interconnect board
(7) / 0100 00084 / Cap sensor amp boards
(1) / 0100 09123 / Wafer sensor board
(28) / - / boards
(1) / 0100 09137 / Encoder interface board
(1) / 907957-002 / -
(1) / 0100-16004 / Final signal interface
(1) / 0100-00162 / Exp I/O distribution board assy
(1) / 0100-09099 / Chamber interconnect board assy
(1) / - / -
(1) / - / -
(1) / KCB150-454 / Mini controller dc power supply
(1) / - / -
(15) / 0100-09117 / Assy PCB dio fuse boards
(20) / 0100-09099 / PCB Assy chamber interconnect boards
(2) / 0100-09017 / CH Interconnect boards
(10) / 0100-09162 / Manometer select boards
(8) / 0100-00003 / Stepper drive PCB VME cards
(6) / 0100-09134 / PCB Assy dido fuses
(3) / 0100-09137 / Assy encoders interface PCB
(1) / 0100-09131 / PCB DWG Fluid overfill board assy
(2) / 0100-09086 / Stepper power drive boards
(2) / 0100-00171 / -
(1) / 0100-09094 / Materials box heater control board
(1) / 0100-09040 / SSR AC Control
(1) / 0100-38019 / Injector valve heater control board
(1) / 0100-09037 / Remote wiring distribution board
(1) / 0100-00165 / PCB Serial sideboard assy
(1) / 0100-76124 / Digital I/O board
(1) / 0100-20003 / Digital I/O board
(9) / 0100-11002 / Digital I/O cards
(5) / 0100-09362 / DPA Dido piggy-back boards
(2) / 0100-09123 / Wafe sensor boards
(1) / 0100-09253 / Manometer select board
(2) / 0100-09138 / Robot interconnect boards
(1) / 0100-09023 / Mini DI/DO board
(1) / 0100-76124 / Digital I/O board
(1) / 0100-09056 / Center finder PCB assy with CMOS chip
(1) / 0100-09022 / Mini AI board
(5) / 0100-00014 / Opto detects
(4) / 0100-09112 / Thermal electric driver boards
(5) / 0100-09108 / PCB assembly, LVL, sensor boards
(1) / 0100-09114 / Gas panel board
(1) / 0100-09153 / Gas panel board
(1) / 0100-09071 / I/O breakout board
(3) / 0100-09011 / AI MUX Current senses
(4) / 0100-00008 / TC Gauges
(1) / 0100-09172 / 8-Channel emission / Laser endpoint board
(1) / 0100-09009 / Buffer I/O
(2) / 0100-09102 / Controller distribution boards
(3) / - / 86 Stepping motor drives
(3) / 0100-00011 / Chopper drivers P.W.B
(3) / 0100-09237 / Dual freq wiring interconnect boards
(3) / 0100-09106 / Expanded gas panel interface boards
(1) / 0100-09107 / TEOS Gas interface board
(1) / 0100-09018 / Video interconnect board
(2) / 0100-09031 / Remote gas panel boards
(5) / 0100-09029 / Turbo interconnects
(3) / 0100-09058 / Operator control panel boards
(3) / 0100-09156 / PCB assy, RF match controls
(4) / 0100-09020 / Fuse boards
(1) / 0100-09081 / Dry vacuum distribution board
(1) / 0100-09115 / Assy PCB gas panel analog
(1) / 0100-38032 / E Chuck controller
(1) / 0100-01652 / HDPCVD 300 mm AP gas panel distribution assy
(2) / 0100-09076 / PCB Assy, brake interconnects
(1) / 0100-13024 / PCB Assy, interface processor distribution
(1) / 0100-09264 / 486 PC Interface board
(1) / 0100-09110 / Mini pilter board
(1) / 0100-09079 / Robot motor-sensor interconnect board
(1) / 0100-09069 / Contactor interlock board
(3) / 0100-09104 / Contactor interlocks
(2) / 0100-09027 / AC Inter connect boards
(3) / 0100-09103 / AC Inter connect boards
(1) / 0100-11000 / Analog input board
(1) / 0190-05996 / Analog IO board
(1) / 0190-05997 / Analog IO board
(1) / 0100-00825 / Analog IO board
(3) / - / Printed circuit board bay pneumatics
(2) / 0100-09127 / Loader interconnect boards
(1) / 0100-09010 / System electronics backplane board
(2) / 0100-09224 / Expanded RS232 interconnect boards
(1) / 0100-09012 / Power backplane PCB precision
(1) / 0100-09161 / Expanded RS232 interconnect board
(1) / 0100-76181 / PCB Assy 5000 wiring distribution board
(1) / 0100-09008 / Pneumatic control board
(1) / 89 903061-001 / Multi-channel serial data switch
(2) / 82 12A-24041-51 / -
(1) / SBC-188 / CPU Board
(1) / - / P5000 Signal tower
(2) / 81 902468-001 / WJ951 Output cards
(2) / 83 ZT8820B / PCB Memory modules
(1) / 0100-70019 / Controller distribution WPS board
(1) / 76 800046C / CPU Board
(1) / 76 800046B / CPU Board
(1) / 88 30000354 / Serial adapter card
(2) / 77 10026-100 / -
(3) / 0100-35180 / DPA System distribution boards
(1) / 80 979922-001 / WJ996 Auxiliary board
(1) / 84 LD H-S1-3 / Motor drive board
(1) / 0100-09003 / WPCB assy, 7710 VME
(1) / - / SV21 CPU
(1) / 0190-00318 / VGA B.D
(1) / 0100-09196 / E-Chuck controller
(1) / - / Memory slot
(2) / - / -
(9) / 3514-700-0 / Flow controllers
(1) / 0100-09362 / DPA Dido piggy-back board
(4) / ST34520N / Hard disk driver
(1) / MPF3102AT / Hard disk driver
(1) / MS3002GN / 2-GBYTE SCSI Flash disk
(1) / - / Hard Disk Driver (HDD)
(1) / AC23200-00LC / IDE Hard driver
(1) / Sony MPF-920 / Floppy disk driver
(1) / - / Hard Disk Driver (HDD)
(1) / FD-235HF / Floppy Disk Driver (FDD)
(1) / 1002402-1K / Precision 5000 Board
(5) / - / Disket
(1) / 0150-70002 / Disk controller cable
(2) / - / Hard Disk Driver (HDD)
(1) / 193077C7-00 / Floppy Disk Driver (FDD)
(1) / 562-531-4804 / Hard Disk Driver (HDD)
(1) / MS3002N / SSD 2-GBYTE SCSI Flash disk
(1) / - / Hard Disk Driver (HDD)
(1) / 0190-09667 / SV21 CPU
Chamber parts:
(1) / 0010 09340 / Susceptor lift
(1) / 0010 09341 / Wafer lift
(2) / 0010 09019 / Throttel valves
(1) / 0010 09340W / Susceptor lift
(1) / 0020 09132 / Enclosure lift I/O valve
(1) / CRB80-180 / Rotary actuator
(1) / CRB80-180-XJN / Rotary actuator
(2) / 0040 75082 / Adapters
(1) / C5347-9212M / Stepping motor
(1) / 0020-34695 / Super-E Cathode liner (Magnet)
(1) / - / Turbo cooling line
(1) / - / -
(4) / 44136-6697 / Powerises
(1) / 0020-38663 / L/L Extend adapter
(1) / - / L/L Extend adapter
(3) / - / Oriental chambers
(2) / - / Ceramic rings
(1) / PH265-05B-C12 / Oriental motor
(1) / - / -
(1) / 1120-01071 / OPT Bifurcated board
(1) / 0190-09134 / Wave optics
(1) / PH265-05B-C12 / Oriental motor 2-Phase vexta stepper
(4) / C5347-9212M / Motor-encoder assy robots
(2) / PH264-01B-C11 / Vexta 2-Phase stepping motor assy
(1) / M21NRXD-LSS / Steping motor with brake
(1) / P2HNRXF-LSS / Steping motor with brake
(1) / 0190-09472 / End point detector
(1) / 37693 / -
(1) / 0190-35742 / Over-pressure switch
(1) / - / MKS INSTRUMENTS Pressure switch
(2) / - / Susceptors, 8"-6"
(4) / - / Shower heads
(1) / - / Hot box, 3-Phase
(1) / - / Hot box, 4-Phase
Valve, gauge and filter:
(1) / 122AA 00002EB / Baratron gauge
(2) / WG3NS6RR2 / Inline gas filters
(3) / WG3NS8RR2 / Inline gas filters
(1) / GLFPF6101VM4 / Fall filter
(1) / SS-BNV51 / Valve
(1) / 46360 / Pressure gauge
(1) / - / -
(1) / SS-BNA211-C / Valve
(92) / H-ZGRT-4, NI / Gaskets (1/4)
(52) / CGTR-04-NI / Gaskets (1/4)
(11) / UN4GR / Gaskets (1/4)
(4) / UN8GR / Gaskets (1/2)
(10) / NGT08R / Gaskets (1/2)
(830) / UJR-6.35RE / Gaskets (1/4)
(7) / UJR-9.52RE / Gaskets (1/2)
(1) / 1203666 / Baratron 10torr (MKS)
(1) / 000230838 / Baratron 10torr (MKS)
(1) / 000838753 / Baratron 10torr (MKS)
(1) / - / -
(1) / SS-4BMG-VCR / Needle valve
(1) / - / TC Gauge
(2) / - / Vacuum gauges
(1) / MA02114 / Thermocouple vacuum gauge
(1) / CA94010 / Thermocouple vacuum gauge
(5) / 4560-0217 / V/V (Veriflo division)
(4) / AP1006S-2PW / Regulators (AD Tech)
(1) / AP1001S-3P-44 / Regulator (AD Tech)
(1) / AP100-SX-2PW / Regulator (AD Tech)
(1) / 5401-4017 / Regulator
(1) / GJ002003F / Regulator
(1) / 1739-3200 / Gas line
(6) / 45600196 / V/V (Veriflo division)
(2) / 6LV-DAFR4-P / V/V (Swagelok)
(1) / 620240 / V/V (Nupro)
(5) / 45400894 / V/V (Veriflo division)
(17) / 43800734 / Regulators
(27) / 316L-P / V/V (Fujilcin)
(1) / AP1601S-ZA / Regulator (AD Tech)
(1) / SS-DLFR4-PX / V/V (Swagelok)
(1) / SS-DLFR4-PX / V/V (Nupro)
(2) / 3800-01173 / Regulators (Veriflo)
(4) / 6LVV-DPLVR4 / V/V (Swagelok)
(1) / SS-4BK-V51 / Regulator (Swagelok)
(1) / SS-4BK-V51 / Regulator (Nupro)
(1) / 316L-P / Bellows V/V (KSK)
(1) / 506326001 / V/V (Swagelok)
(1) / 426576 / V/V (Swagelok)
(1) / 0190-36237 / Injection (Stec)
(3) / IV-2410AV / Injection (Stec)
(4) / SS-4MG-VCR / V/V (Swagelok)
(1) / SS-1GF2 / V/V (Swagelok)
(1) / SS-DLV51 / V/V (Swagelok)
(1) / SS-BNVCR4-C / V/V (Swagelok)
(1) / SS-4BY-V35-1C / V/V (Swagelok)
(1) / SS-4BY-V35-1C / V/V (Nupro)
(1) / SS-4BMG-VCR / V/V (Nupro)
(2) / 0224-44145 / Gas lines
(3) / 42600719 / Diaphragm valves
(1) / - / Hoke valve
(1) / VDW214 / Solenoid valve
(2) / LF-A40M-A-EVD / Liquid mass flow meters 7g/min TEOS
(1) / - / -
(3) / TC531 18039 / Thermocouples (TC) vacuum gauge
(2) / RMB-85D-SSV / Water flow meters
(4) / 127AA-00100B / MKS Baratron
(1) / 122ba-01000eb / Baratron pressure transducer 1000 torr
(1) / 122AA-00002EB / MKS Pressure transducer
(1) / 122BA-01000EB / MKS Baratron
(1) / 627A-14974 / MKS INSTRUMENTS Baratron
(1) / 122BA-00100BB / Pressure transducer, 100 torr
(2) / SMC NVJ3443Y / Valves, SOL/PILOT, base
(2) / VJ3243Y-5LOZ / Valves, SOL/PILOT, base
(1) / NVJ3240Y-5MOZ / Valve, SOL/PILOT, base
(1) / YPC SF2101-IP / Solenoid valve
(1) / SMC SYJ3243 / Base mounted 5-Port 2 position double solenoid valve
(1) / SMC VXA3 / Tire valve regulator air operation valve
(1) / - / Solenoid valve
(1) / - / Solenoid valve
(1) / - / Solenoid valve
(1) / - / Solenoid valve
(1) / - / Solenoid valve
(1) / - / -
(5) / - / -
(1) / SS-4MG-VCR / -
(8) / - / -
(1) / - / -
(1) / - / TC Vacuum gauge
(1) / - / -
(3) / Type 0531 / TC Vacuum gauge
(1) / - / Convectron gauge
(3) / - / -
Bracket and cover:
(1) / 0010 09201 / 5000 Platform thru-the-wall monitor
(1) / 0010 75085 / Base thru-wall mon precision 5000
(1) / 11764601 / Valve bracket
(1) / 0020 18713 / Valve bracket
(1) / 0020 18656 / Valve bracket
(1) / - / Tm cover
(1) / - / Cover
(1) / - / Cover, actuator, loadlock, P5000
(1) / - / Cover
(1) / 0020 13088 / Bracket plate for hard driver
(1) / 0020 09586 / Crank window
(3) / - / Brackets
(3) / 0020 09359 / Chamber interconnect board cover, sensor brackets
(5) / - / Brackets
(1) / - / Cover
(2) / 0020 70053 / Window lower upper
(1) / 0020 09807 / Edge plate fixed panel
(2) / 0021 36054 / L/L Brackets
(1) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(1) / 0020-10371 / Cover
(1) / 0020-05240 / Cover
(2) / 0020-10649 / Covers
(2) / 0020-10667 / -
(6) / - / -
(12) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(8) / 0020 09359 / Covers
(1) / 0020 10661 / Cover
(1) / 0020 10661 / Cover
(2) / 0020 10690 / Covers
(1) / 0020 10228 / Cover
(1) / 0020 10229 / Cover
(2) / 0020 09428 / Covers
(1) / 0040 32646 / Generator cover
(1) / 0040 32646 / Generator cover
(1) / 0040 32645 / Generator cover
(1) / 0020 04146 / Upper FAC cover
(1) / 0020 70462-A / Cover
(2) / 0020 09763 / E Touche covers
(2) / 0020 09763 / C PMP covers
(1) / 0020 10552 / C Cover
(1) / 0020-09320 / D Cover
(1) / 0020-10161 / A Cover
(6) / 0020-09359 / A Covers
(4) / 0020-09806 / E Covers
(1) / 0020-09628 / B Cover
(1) / 0020-70055 / A(502) Cover
(2) / 0200-7055 / A(301) Covers
(1) / 0200-20602 / Cover (002)
(4) / 0020-10649 / Covers
(5) / 0020-09818 / Covers
(1) / 0020-70099 / Cover
(1) / 0020-70098 / Cover
(2) / 0020-10973 / Covers
(2) / 0015-09019 / -
(1) / 0015-09012 / -
(4) / 0020-09898 C / -
(3) / 0020-09899 (D) / -
(4) / 0244-46160 / -
(1) / 0020-10229 / -
(1) / 0020-10228 / -
(2) / 0020-04145 / -
(2) / 0020-09577 / -
(3) / 0020-10668 / -
(1) / 0020-09444 / -
(1) / 0020-10367 / -
(1) / 0040-09560 / -
(1) / 0020-20558 / -
(1) / 0020-09566 / -
(1) / 0020-09558 / -
(1) / 0040-76242 / -
(1) / 0020-70091 / -
(1) / 0021-01918 / -
(1) / 0020-75759 / -
(1) / 16-00065-02 / -
(1) / 10826700 / -
(1) / 0020-09284 / -
(1) / 0020-04149 / -
(1) / 0040-09055 / -
(1) / 0020-09650 / -
(1) / 0020-10436 / -
(1) / 0020-70139 / -
(1) / 0020-23633 / -
(1) / 0020-23631 / -
(1) / 1176-4601 / -
(16) / - / V/V Brackets
(1) / 19946K / V/V Bracket
(1) / 0021-02684 / V/V Bracket
(4) / 0021-02683 / V/V Brackets
(2) / 11444600 / V/V Brackets
(3) / 0021-36821 / V/V Brackets
(2) / 1176-4600 / V/V Brackets
(14) / 4890095 / Sensor brackets
(1) / 0020-09150 / -
(1) / 0020-09558-B-LEO / -
(1) / 0040-01108 002 / -
(1) / 0040-09098C / -
(1) / - / -
(1) / - / -
(1) / - / -
(13) / - / -
(4) / - / -
(1) / - / -
(1) / 714-240507-001 / -
(1) / 0020-09359 / Enclosure, Chamber interconnect PCB
(1) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(1) / - / -
(1) / 0020-09577 / -
(2) / - / -
(2) / 0020-10664B / -
(1) / 0020-09816A / -
(1) / 0020-09723B /
(1) / - / -
(1) / 0224-43951 / BKT, TEOS Upper line support
(8) / 0020-10975 / -
(6) / 0020-10973 / Chamber clamps SACVD
(1) / 0020-10552 C / Panneau
(1) / 0010-09233 / -
(1) / 0020-10552 C / Panneau
(1) / 0020-70699 A / -
(8) / 0020-10566 / -
(2) / - / -
(1) / - / -
(1) / - / -
Sensor and fuse:
(5) / PP10-S / Fuses (7.5A), P5000
(5) / PP11-4-0218 / Fuses (4A) P5000
(4) / PP11-4-0103 / Fuses (10A) P5000
(5) / PP11-4-0640 / Fuses (15A) P5000
(1) / PFW720-UIB990257 / Flow switch
(12) / - / Cap sensors
(2) / ET-S500ND / Sensors
(1) / 902343008 / Flow sensor
(1) / 184948 / Flow switch (GEMS)
(4) / - / Fiber sensor cables
AC Rack and RF Rack:
(1) / - / Switchboard
(1) / - / Power connect
(1) / C320KGS22 / Base auxiliary contacts
(2) / C320KGS32 / Base auxiliary contacts
(6) / A1238H11BT / Fans
(3) / UF-12B11 / Fans
(2) / SP1202524H / Fans
(1) / SJ1225HA1 / Fan
(1) / SJ1238HA1 / Fan
(2) / EC12025H24SA / Fans
(1) / BP1202512H / Fan
(1) / MULTIFAN 8312 / Fan
(1) / A31668-16 / Fan
(1) / 001076036 / Mini controller
(1) / CRMC-FX4820T / CD Room (MITSUMI)
(1) / 93BB-1CD0-0PBT / Watlow temperature controller
(2) / 4606X / Fans
(1) / F0800-G-3 / Fan
(1) / UES17H115S29 / Fan
(1) / EHD-14K / Circuit breaker (480VAC)
(1) / VSF75-24 / Power supply
(4) / CU-AL / Circuit 1poie units (20A)
(5) / CU-AL / Circuit 1poie units (15A)
(2) / 1289C3QGQ7 / Circuit s
(4) / CE15FN3Y1 / Contactors
(1) / S82K-05024 / Power supply
(1) / LIS-31-12 / Regulated power supply
(5) / LIS-71-15 / Regulated power supplies
(1) / - / -
(1) / 0950-3646 / Power supply liteon
(1) / - / Main AC Rack
(1) / - / RF Delta generator rack AMZ-401
(1) / H3CA-A / Time delay ray
(1) / H3CA-8 / -
(1) / Lg SMC-20P / Magnetic contactor green series SMC20P
(2) / CA3-60-N-11 / Precher + schuh CA3-60-N-11 contactors
(2) / AM3-A3-A / 3-Pole breakers
(2) / W92X11-2-20 / 2-Pole circuit breakers
(1) / A015850 / Magnetic contactor
(1) / 3TB40 10-OA / Contactor
(2) / 4NCOFO / SC-O Contactor with shutdown setting
(1) / 2NC1Q0 / Electrical contactor
(10) / 10E 3RT1017 / Siemens sirius motors
(1) / - / 2P, 20A, Contactor
(10) / - / 1P, 20A, Contactors
(18) / - / 1P, 15A, Contactors
(6) / - / 3P, 50A, Contactors
(4) / - / 3P, 60A, Contactors
(2) / - / 3P, 40A, Contactors
(30) / - / 3P, 15A, Contactors
(4) / - / 3P, 25A, Contactors
(9) / - / 3P, 20A, Contactors
(3) / - / 3P, 30A, Contactors
(1) / - / Cutler hammer
(3) / - / Cutlers hammers
(1) / - / Terminal block
(2) / - / -
(1) / 1433552 / Power distribution block
(1) / 0200-19005 / -
(3) / 1261C66G08 / On / Off trip switch mechanism handle of circuit breakers
(6) / 0190-10028 / RF Generators
LL and TM:
(2) / - / Carrier plates
(5) / - / Monitors
(3) / 0010 09103 / Monitor bases
(1) / - / Slot storage elevator
(1) / - / Slot storage elevator
(1) / 0040-09595 / ASP Hoop
(1) / 030129 / Seal door (VALQUA)
(4) / - / L/L Cover doors
(1) / - / Wafer blade
(8) / - / -
(4) / - / Slit doors
(2) / - / Slit doors
(4) / - / -
(1) / 0020-70080 / L/L
(1) / - / -
(4) / - / Lifter endure, PVD Sputter
(1) / - / -
(1) / - / -
(1) / - / -
(1) / CDSL-J-469 / -
(4) / HOOP BRAKET / -
(2) / - / -
(2) / 15-00501-00 / Indexer robots
(1) / - / Keyboard
(1) / - / -
(5) / - / Monitor covers
Cables:
(5) / 0150 36784 / Cables (MFC)
(2) / - / Cables
(1) / 0150-76063 / VP7 Cable
(2) / 0140-70026 B / P1 Cables
(1) / 0150-09916 / J5 DI/O Fuse board cable
(3) / 0150-09242 / Cables
(1) / 0150-75197 / Cable
(1) / 0150-75198 / Cable
(2) / 0226-30746 / Flow switch cables
(1) / 0140-09205 / Cables
(2) / 0140-09707 / -
(1) / 0140-36042 / -
(1) / 0140-09647 / -
(1) / 0140-09065 / -
(2) / 0226-48118 / -
(1) / 0140-09170 / -
(1) / 0140-09471 / -
(1) / 0140-09065 / -
(1) / 0140-09170 / -
(1) / 0150-09018 / -
(1) / 0150-09019 / -
(1) / 0150-00238 / -
(1) / 0150-09054 / -
(1) / 0140-35240 / -
(1) / 0150-09183 / -
(1) / 0150-09202 / -
(1) / 0140-09238 / -
(1) / 0140-09005 / -
(1) / 0150-09054 / -
(1) / 0140-09650 / -
(1) / 0140-09006 / -
(2) / 0140-09007 / -
(1) / 0140-09004 / -
(1) / 0140-09006 / -
(1) / 0140-09005 / -
(1) / 0150-00236 / -
(1) / 0150-09057 / -
(1) / 0150-09241 / -
(1) / 0140-09498 / -
(1) / 0140-76019 / -
(1) / 0140-09230 / -
(1) / 0150-09054 / -
(1) / 0150-09421 / -
(1) / 0150-09242 / -
(1) / 0150-09421 / -
(1) / 0150-09921 / -
(1) / 015038910 / Heater cable
(3) / - / -
(1) / 0150-09203 / -
(1) / 0226-30746 / -
(1) / - / -
(1) / 0150-09143 / DC Power jumper to remote PCB
(1) / 03-00049-00 / -
(1) / - / -
(1) / 0150-36598 / -
(2) / 0150-10673 / -
(1) / 0150-36698 / Cable and connector
(1) / 0150-06185 / Cable and connector
(1) / 0150-36784 / Cable and connector
(1) / 0150-09054 / Assy, cable RF Match
(3) / 02-00343-02,03,04 / Harness assy
(1) / 0150-75068 / Cable, assy motor-encoder
(1) / 02-00343-01 / -
(1) / 0140-70002 / Harn assy detector / Emitter
(6) / 0150-02454 / -
(7) / - / -
(1) / - / -
(1) / 0150-09241 / Shielded ozone monitor
(1) / 0150-09018 / Flat cable chamber INT C 40 POS
(1) / 0150-10404 / PCB Ozonator
(1) / 0150-09053 / Ribbon cable remote power box
(1) / 0150-09889 / Cable and connector
(1) / 0150-09068 / Flat cable, turbo control
(1) / 0150-09019 / Flt cable, chamber INT D 40 POS
(1) / 0150-09005 / -
(1) / 0150-35616 / Cable
(1) / 0150-35615 / Cable, EV manifold
(1) / 03-023303-00 / -
(1) / 0150-09046 / Wassy cable dist
(1) / 0150-09202 / Cable and connector
(1) / 0150-00244 / -
(1) / 0150-00243 / -
(1) / 0150-00245 / -
(1) / 0150-00242 / -
(1) / 0150-00246 / -
(1) / 0150-00247 / -
(1) / 0150-09202 / TEOS Control to panel
(1) / 0150-00273 / -
(2) / 0150-00296 / Cable and connectors
(1) / 0140-09000 / Harness, system electrical
(1) / 0140-00150 / Cable and connector
(1) / 0150-00240 / Cable and connector
(1) / 150-09023 / Video MTR system
(1) / 0150-09057 / RF Generator
(1) / 0150-09053 / Ribbon cable
(1) / 0150-09016 / Flat cable A40 POS
(1) / 0150-09236 / -
(1) / 0150-70002 / Cable flat assy SCSI 50P extended
(1) / 0140-00156 / -
(1) / 0150-09033 / Assy cable system video
(1) / 0150-09236 / Disc controller
(1) / 0150-00296 / Cable and connector
(1) / 0150-09241 / -
(1) / 8400-0647 / Fixed interface
(1) / 0150-10011 / SACVD Exp. RS232 interconnect
(1) / 0150-09500 / Expanded AI cable
(2) / 0620-01713 / -
(1) / - / -
(2) / 0140-70093 / Dry vacuum pump interfaces
(2) / 0150-10248 / Cable and connectors
(1) / 0150-09681 / Integrated end point power
(1) / 0150-10011 / SACVD Exp. RS232 interconnect
(1) / 0150-76006 / -
(1) / 0150-09708 / 50' Remote video
(1) / 0150-35740 / -
(1) / - / -
(1) / 0226-31530,31525 / -
(2) / 0150-76234 / Cable and connectors
(4) / 0150-75041 / EMC comp, cable PROC INTFC, pump
(1) / 0150-09918 / Ozonator PCB and 5000
(5) / 0150-09106 / Assy cable remotes 50 ft
(1) / 0150-09241 / Chamber purge AFC
(6) / 0150-35227 / Chamber purges AFC
(1) / 03-00143-02 / -
(1) / 0150-76193 / -
(1) / 0140-76016 / DC Chamber misc cable RS232 wafer orienter
(6) / 0150-09807 / Modified wafer position sens
(2) / 03-00098-00 / P2-EXT-Disk
(2) / 0140-10034 / Press Trans HRN 11-13
(6) / 0140-09996 / Press XDCR Seriplex
(3) / 0140-10034 / Pressure transducers
(7) / 0140-10035 / I/O Expansion, chambers
(4) / 0150-76186 / Pump EMC comp cable assemblies
(1) / 0140-09087 / Lamp / Mag control
(1) / 0150-09033 / System video
(1) / 0150-76175 / Operator panel
(1) / 0150-20075 / Emo interconnect
(2) / 0150-09027 / Heat exchange interfaces
(1) / 0150-09054 / RF Match
(1) / EVNPS04-0025 / -
(1) / 0150-09104 / RS232 Liq source cable
(1) / - / -
(1) / 0190-70030 / Blade vacuum sense VCR FTG SUNX DPX-200
(1) / 0190-09133 / Close decreasing tor
(1) / 0226-31525 / -
(1) / 0150-09032 / Assy cable ozonator
(2) / 0150-18074 / Eto microwave control, chambers
(1) / 0150-36131 / NESLAB Control 75 ft EMC
(1) / 0150-10598 / Cable, communications, DPA
(1) / 0226-31017 / -
(1) / 0150-18050 / ETO Microwave control cable
(1) / 0150-09047 / Assy ribbon cable
(1) / 0140-09044 / Harness, loader door open
(1) / 0140-09143 / Harness load chamber
(2) / 0140-09004 / Harness chamber inters
(1) / 0140-09027 / Harness chamber a, b slit
(1) / 0150-09193 / Assy cable, sys electronic AC power/ chopper
(1) / 0150-09046 / Wassy cable dist
(1) / 0140-09005 / Harness chamber inter
(1) / 0226-09045 / -
(1) / 0150-09019 / Assy, flt cable, chamber INT D 40 POS
(5) / 0150-09367 / -
(1) / 0150-09183 / Cable assy set gas to remote
(1) / - / -
(1) / 0150-09190 / -
(1) / 0150-09192 / -
(1) / 0150-70016 / Cable assy encoder if
(1) / 0150-70031 / Stepper 2-Phase reversal, 29 pos
(1) / 0140-16017 / -
(2) / 0140-09542 / Temp switch mag coil interlocks
(2) / 0150-10248 / -
(1) / 0140-09205 / -
(1) / 0140-09982.A / Harness assy, TC interlock
(1) / 0225-09247 / CES RF Interlock switch with harness
(1) / 0150-09203 / Harness assembly gas panel power jumper
(2) / 0140-09102 / Harness status lights 50
(3) / 0140-70002 / Harness assy detectors / Emitter
(2) / 0140-09160 / Harness assembly standard vacuum pumps
(4) / 0140-09007 / Harnesses
(1) / 0140-09152 / Harness assy cassette handler interface ,
(1) / 0150-09023 / Video MTR system
(1) / 0140-09031 / Cassette position
(2) / 0140-09247 / -
(1) / 0140-09006 / Harness, chamber inconnect
(1) / 0150-09247 / -
(1) / 0150-09145 / N2 final valve cable
(1) / 0150-09018 / Flat cable chamber INT C40 POS
(1) / 0150-09196 / Assy cable system TCS
(1) / 0150-09068 / Turbo control
(1) / 0225-30846 / -
(1) / 0140-09049 / -
(1) / 0140-09417 / Harness power, external, TEOS temp control
(2) / 0150-09701 / Dual freq int, panels
(2) / 0140-09063 / Harness front PNL-EMO
(1) / - / -
(1) / 0150-20836 / Cable assy PVD CH HTR WTR
(1) / 0150-09099 / Harness assy limit SWITC
(1) / 0140-09090 / Harness assy lamps / Mag controls
(1) / 0140-09103 / Harness assy current converter
(1) / 0140-09106 / Harness assy current transducer
(1) / 0150-09921 / Cables assy ozonator N2 MFC and dual freq
(1) / 0140-09042 / Harness, slit, I/O and STOR elevator
(1) / 0150-09242 / -
(1) / 0140-70024 / -
(1) / 0150-09202 / Panel cable assembly TEOS control
(2) / 0226-10037 / -
(1) / 0150-10595 / -
(2) / - / -
(3) / 0226-43701 / Cable with INTLK, RF adapter
(1) / 0150-00314 / Cable assy
(1) / - / -
(1) / 0150-09707 / Cable, ash, 5ft remote video
(1) / 0150-09921 / Assy ozonator N2 MFC and dual freq
(1) / 0150-09033 / Assy cable system video
(1) / 0150-09054 / Assy, cable RF match
(1) / 0140-09200 / -
(1) / 0090-76106 / Thermal circuit breakers
(1) / 0150-09240 / Cable assy, RF generator
(1) / 0140-09160 / Harness assembly standard vacuum pump
(1) / 0150-04078 / -
(1) / 0140-00144 / Harness assy, power / Fuse, orienter
(1) / 03-00310-01 / Cable assy
(1) / 0140-70004 / Harness loader discontact
(4) / 0150-10253 / Cable extension suction valve heater channels
(1) / 0140-09063 / Harness front PNL-EMO
(4) / 0150-36237 / Cable, CRF Generator, remote controls
(1) / 0140-35761 / -
(1) / 0150-09488 / Cable, ASH, extended RS-232 interconnect
(4) / 0150-37074 / Cable assy
Connector and robot parts:
(1) / - / Hanshin compressor
(1) / DH-5 / Air dryer
(1) / HAC-20A / After cooler
(2) / - / -
(2) / 0020 31283 / -
(47) / 37104-2165-000 FL 100 / E-Con mini clamp w/m plug blue
(89) / - / Molex connectors (2P, Male)
(27) / - / Molex connectors (2P, Female)
(20) / - / Molex connectors (4P,9P,Male and female)
(41) / DS1033-09MBNSISS / D-Sub plugs (9P, Male)
(42) / DS1033-09FBNSISS / D-Sub plugs (9P, Female)
(1) / - / D-Sub plug (37P, Male)
(1) / - / D-Sub plug (37P, Female)
(6) / 5199906 / Gender changers (25P)
(1) / 5190481 / Gender changers (25P)
(1) / - / 4-pin Crimp terminal
(1) / - / PG 250 REC
(1) / CE025012-BLUE / Terminal
(1) / - / Crimp terminal
(1) / - / Crimp terminal
(12) / HDES-5600 E06 / Devices
(1) / 020010666 / Cover, cable set
(1) / 9545005(D) / -
(1) / 9717005(D) / -
(1) / 0020-30000 / Clamp, pin ADJ, WB
(1) / - / 29 Slot E/V Housing
(6) / 815001-404 / -
(2) / 004001239 / -
(10) / - / Springs
(1) / - / Leveler
(1) / - / Hubbellock
(5) / LR300 4100 / Display, powers
(2) / - / -
(2) / PDK-004A-OWG / IEE Electronic display
(1) / 9905177-1 / -
(1) / 0090-00084 / Sensor assy, dual spill sensor
(1) / 00-908124 / Stator generator OEM
(1) / 10-042679-00 / -
(1) / 16-00494-00 / -
(1) / F03-16PE-517 / -
(4) / CS10-34CU-E / Capacities proximity
(1) / 0140-09422 / Ampule over-temp interlock
(1) / JSR-S100N 8100N / -
(1) / 997869-001 / -
(2) / 213001 / Water Base fluid 1/4" NPT 0.150-0.850 GPM
(1) / F442103 / Aux air
(1) / 1350EPC9ADD1A / Flowmeter flow meter
(2) / - / Hubbellock locking connector bodies
(1) / SY05-126822 / -
(1) / 0010-76535 / Pneumatic logic box tilt cassette
(2) / 0020-30586 / -
(1) / - / Jacket
(1) / - / 24V, DC 2W
(1) / - / S/E Inter lock
(1) / - / Operator assist system
Pump, chiller and piping:
(1) / - / Air flow switch
(1) / 253B 11102 / Exhaust throttle valve
(1) / 253B 15004 / Exhaust throttle valve
(1) / 253B 14997 / Exhaust throttle valve
(1) / 0050 76889 / Pump piping
(1) / - / Pump piping
(1) / 0050 76884 / Pump piping
(2) / - / Pump piping
(4) / 0050 27394 / Pump piping
(4) / - / Pump piping
(1) / 0050 10529 / Pump piping
(4) / - / Pump piping
(1) / 0050 76032 / Pump piping
(1) / - / Pump piping
(1) / 0050 06101 / Pump piping
(2) / 0050 26652 / Pump piping
(1) / - / Pump piping
(2) / - / Reducers
(7) / 0040 09716 / -
(1) / ASM 122 D / He detector
(1) / 0010-30063 / Hot analyzer
(3) / 0010-30063 / Hot analyzer
(1) / 0100-30230 / Hot analyzer
(1) / 0010-30229 / Hot analyzer
(1) / 0040-09020 / Duct exhaust
MFC:
(2) / 2321853 / MFC CH3F (50 SCCM)
(2) / 347781 / MFC O2 (20 SCCM)
(3) / 2320754 / MFC N2 (100 SCCM)
(1) / 2256499 / MFC SF6 (50 SCCM)
(2) / 34D000 / MFC CF4 (100 SCCM)
(1) / 2346387 / MFC SF6 (50 SCCM)
(2) / 015051 / MFC CHF3 (100 SCCM)
(2) / 3412869719 / MFC C4F8 (30 SCCM)
(2) / 3030-08692 / MFC AR (5000 SCCM)
(1) / 3030-6666 / MFC O2 (20 SLM)
(1) / 3030-09567 / MFC HE (2000 SCCM)
(1) / 3030-07413 / MFC O2 (5000 SCCM)
(2) / 3030-09410 / MFC NF3 (3000 SCCM)
(2) / 2354983 / MFC C4F8 (30 SCCM)
(1) / 2322857 / MFC AR (500 SCCM)
(6) / 1660-100009 / MFC N2 (5 SLM)
(5) / 1660-100159 / MFC O2 ( 3 SLM)
(2) / 1660-100415 / MFC HE (3.5 SLM)
(1) / 1660-100006 / MFC N2 (1 SLM)
(4) / 1640A-14387 / MFC O2 (6000 SCCM)
(2) / 0002-93698 / MFC (MKS)
(1) / - / MFC
(1) / - / MFC
(1) / - / MFC
Applicator and block:
(2) / 004004390001 / Handle with gloved hands
(1) / 004004390002 / Handle with gloved hands
(1) / 002110666 / Block gas / WTR Chamber
(1) / W403174201 / -
(1) / 5200CVD / HDP-CVD RPSC Applicator
(1) / 5200CVD / RPSC Applicator
(1) / 5200CVD / RPSC Applicator
(1) / D13604 / GHz Coupling
(1) / D13604 / GHz Coupling
(1) / D13604 / GHz Coupling
(1) / D13604 / GHz Coupling
(1) / 0020-09549B / Adapter.
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