Benutzt ACCUSPUTTER AW 4450 #9201786 zu verkaufen

ID#: 9201786

Hersteller:

ACCUSPUTTER

Modell:

AW 4450

Wafer Größe:

8"

Ausstattungsmerkmale:

Sputtering system, 8"
Wafer loading: Manual
With load lock
Cathodes: (3) Delta shapes / (4) Circle shapes
Sputter methods: RF / DC
Diode / MAGNETRON
Gas lines: 1~3 MFC

Options:
Gas lines with MFC
N2
O2
Customized

Lamp tower alarm with buzzer:
Mechanical pump / Dry pump for process chamber and load lock
Independent mechanical pump / Dry pump for process chamber
Chiller for cooling plates and table
Turbo pump for load lock
Load lock lamp heating function: Up to 200°C
Chamber lamp heating function: Up to 300°C
Plasma etch function
Bias function
Co sputter function
Reactive sputter function

Main frame
28" Diameter SST chamber top plate with ports and cathodes:
Configuration I II
Cathode shape Circle Delta
Cathode size 8" Delta
Cathode quantity 1 to 4 1 to 3

Sputter power supply:
Configuration I II III
DC Power 5 kW 10 kW -
RF Power 1kW 2 kW 3 kW
Pulse DC power 5 kW 10 kW -

Process chamber:
8" Diameter x 12" High stainless steel cylinder with 6"
CF Flange view port and load lock port
28" Diameter stainless steel base plate
11/2" Air operated roughing isolation valve
Air operated gas inlet valve
Air operated vent valve
11/2" Blanked-off leak check port
Removable deposition shields
23" Diameter, 3-position water cooled annular substrate
Table with variable speed motorized table drive
Full circle shutter and vane shutter
Chain drive pallet carrier transport
Heavy duty electric hoist

Load lock:
30" x 28" x 8" Stainless steel load lock chamber
Aluminum cover
Chain drive pallet carrier transport
2" Air operated roughing isolation valve
Air operated vent valve
23" Diameter molybdenum annular substrate pallet
Elevator for pallet up and down function

Vacuum systems for process chamber:
(2) Stage cryo pumps
With 1000 l/s pumping speed for air
Includes:
Chevron
Water cooled compressor and lines
Automatic regeneration controller
Plumbing kit, 71/2"
Aluminum air operated gate valve: 6" ASA
Air operated venetian blind throttling valve
Mechanical pump or dry pump for process: 36.7 Cfm
Chamber and load lock

Gas line with MFC
Ar, 200 SCCM, customized
Power box: AC 380 V / 208 V / 3 Phase.
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