Benutzt DENTON VACUUM Explorer 14 #9194873 zu verkaufen

ID#: 9194873

Hersteller:

DENTON VACUUM

Ausstattungsmerkmale:

Auto turbo high vacuum DC sputtering system
With graphic user interface
Touch screen control

Valves: Manual / Automatic operation
Pumps
Graphical interface: Fixture rotation
Stainless construction
Turbo pump with roughing pump
Micrometer gas-bleed valve
Gas control: Gas isolation valve
Chamber: 14" H x 14" W x 14" D

Sputter source:
RF / DC Capability
Variable source to substrate distance
Clamp / Bond target compatibility
(2) Elector-pneumatic sources
PLC: Open / Close operation
Substrate stage: Omni rotating fixture plate, 6"

Sputter power supply:
SORENSEN DCS Series power supply (1.0 kW, 600 VDC)
DC Switch to shunt output of SORENSEN DCS power supply to (2) cathodes

Power supply: 1.0 kW, 600 VDC.
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