Benutzt LEYBOLD HERAEUS ZV 1200 #154093 zu verkaufen

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ID#: 154093

Hersteller:

LEYBOLD HERAEUS

Modell:

ZV 1200

Ausstattungsmerkmale:

Vertical sputtering system Continuous substrate flow ability Carrier return track Built-on Twin-mag with AE MF Generator Substrate size is 700x750mm Modules: (2) Atmospheric (4) Transport (short mod) (2) Process (long mod), up to 12 cathodes Roots / rough pumps per module: WS2000 / D65 TMP1500 turbo Process modules have (2) turbo pumps Vacuum sensors: IM110 and Thermovac TM220 and Penningvac 411.
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