Benutzt MRC 822 #9039130 zu verkaufen

ID#: 9039130

Hersteller:

MRC

Modell:

822

Ausstattungsmerkmale:

Sputterspheres
With load lock

Includes:
(3) Diode targets, 8"
Spherical chamber, 19"
Sputters up to (3) materials without breaking the vacuum
CTI 8 Cryo pump with SC compressor
LEYBOLD D-60 Mechanical pump
ENI OEM-6 RF Generator, 1.25 kW
Sputter etch
GP-280 IG controller
VARIAN TC controller
Load locked system
Pallet, 8"
Complete set of manuals

Eye-level control console:
Forward and reflected power meters
Two peak-to-peak meters
Remote power control
Multi-range sputter timer
Sputter button
Pirani gauge

Modes of operation:
Diode deposition: RF Diode, RF Bias
Magnetron deposition: DC and RF
Reactive sputtering
Sputter etching

RF System:
Voltage stabilization
RF Matching network
Auto tuning

Vacuum
Dual loadlock: two pallet mode, three pallet mode
Semi-automatic operation speeds
DC Magnetron power supply: Model: S3016

80-100 psi air, 60-90 psi water, 3 GPM
208 V, 50 Amp, 50/60 Hz, 3 Phase.
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