Benutzt MRC 943 #9199346 zu verkaufen

ID#: 9199346

Hersteller:

MRC

Modell:

943

Ausstattungsmerkmale:

Sputtering system

System hardware:
MRC Load lock assembly

CTI CT-8 Cryo pump:
Load lock
Process chamber

(3) SIERRA Scientific planar 5"x15" cathodes
(3) Target shielding sets
ADVANCED ENERGY MDX-10 DC Power supply: 10 kW
MRC Hivac valve
With MRS throttle valve assembly
(3) MKS MFC
MKS 390 Baratron assembly
MRC Hydraulic system

ENI OEM-12A RF Generator
ENI Matchwork 10 RF Matching unit

Rack hardware:
GOULD / MODICON PLC Controller
GP-303 IG Controller
MKS 252 Throttle valve controller
MKS 247 MFC Controller (4-Channels)
(5) GP-275 Convectrons
TCR DC Voltage power supply (MRC Rail bias)
ADVANCED ENERGY MDX-10 DC Power supply.
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