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ID#: 9225158

Hersteller:

MRC

Modell:

Eclipse

Jahrgang:

2009

Wafer Größe:

8"

Ausstattungsmerkmale:

Sputtering system, 8"
Chamber 1: Process: ALSI
Chamber 2: Process: TI
Chamber 3: Process: AL

Sputter chamber 1 / 2 / 3:
Type, 8"
DC Power: AE
Cryo pump: CTI 8F

RF Chamber:
Process: Hard etch
RF Power: AE
Cryo pump: CTI 8F

Main frame:
Robot type, 8"
Alignment
Load lock cryopump: CTI Onboard 8

Compressor:
Type 1: (2) 9600
Type 2: SUZUKI

EBARA A10S Dry pump

System monitor:
Front panel
Remote control

2009 vintage.
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