Gebraucht NEXX Nimbus 354 XP #293740405 zu verkaufen

Sputtering deposition system, 8"-12" GENMARK GPR Robot Porta 300 Loadport Magnetrons: Pentagon Type standard (4) Positions: Ti and (3) Cu Type: M4 Load lock: NESLAB HX75 Liquid chiller GRANVILLE-PHILLIPS Mini-convection gauge pressure measurement Etching chamber: Dual (ICP + CCP) RF etcher High vacuum: CTI On Board 8F CRYO Pump Gas supply: AR-MFC (200 SCCM) Generator: COMDEL CDX-2000 13,56 / RF Generator, 2 MHz, 2000 W Pressure measurement: GRANVILLE-PHILLIPS Mini-convection gauge MKS BARATRON Gauge GRANVILLE-PHILLIPS Ion gauge Deposition chamber: Targets: TI and (3) Cu targets (766 x 88 mm) High vacuum: (2) CTI On Board 8F CRYO Pump Gas supply: AR-MFC (200 SCCM) Generator: AE Pinnacle 10 kW DC Generator Cross chamber: Cooling water chiller: AFFINITY / LYDALL FWA-050L Rough vacuum: EDWARDS iH-600 dry pump CTI-CRYOGENICS 9600 Compressor 2008 vintage.