Benutzt OERLIKON / BALZERS / EVATEC LLS EVO #9167459 zu verkaufen

This OERLIKON / BALZERS / EVATEC LLS EVO has been sold.

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ID#: 9167459

Modell:

LLS EVO

Jahrgang:

2000

Ausstattungsmerkmale:

Sputtering system
Decontamination necessary: No

Software version:
V10 R20 WWIF - version :1.8.0.0.
Gembox - version: 1.9.0.0.
Windows 7 upgrade (Retrofit) raid system
MFC: Unit 200sccm AR 20sccm N2
RF Etching device
RGA PFEIFFER
Lifting device
Generators: AE Pinnacle 12KW
Huttinger PFG 1600RF

Included:
EDWARDS IQDP80+QMB500
Grey room serves panel

POLYCOLD 552HC
Single circle
Vaqflexlines with 6mtr

(2) CTI Cryo pumps
(8) Fan boards with 9600 compressor

System run: Inert gases
Chamber: Seminorm (8 x 4” or 6 x 6”)

Not included:
Targets

(5) Cathodes

2000 vintage.
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