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ID#: 30959

Hersteller:

VARIAN

Modell:

3180

Wafer Größe:

4"

Ausstattungsmerkmale:

magnetron sputtering system configured for 4" wafers, System is fully automated, cassette-to-cassette, and has high throughput, Equipped with 3 targets and an RF-sputter etch module for in-situ substrate cleaning prior to sputtering, as-is.
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