Benutzt VARIAN 3290 #9157043 zu verkaufen

ID#: 9157043

Hersteller:

VARIAN

Modell:

3290

Wafer Größe:

6"

Ausstattungsmerkmale:

Sputtering system, 6"
P/N: 983-4353
TiW, AlCu, Hard etch
CTI-Cryogenics On-Board (8) cryopumps
V200-A & V200 turbo pump
(2) MKS 250B controllers
FLUKE 1722A Instrument controller
FLUKE 8840A Multimeter
Wide range thin film monitor
Sputtering power supply
Vacuum system controller
880RS Vacuum ionization gauge
RF Matching controller
Cassette motor control
Temp monitor
Dual CTI-Cryogenics On-Board controller
Pfeiffer DCU controller
MKS vacuum controller
Multi-range DC sputtering power supply
(2) Interlock status display
(2) Deposition source control
RFPP RF10S RF generator
(3) CPI CPW-12/480 power supply
(1) AC Power transformer/conditioner
3 Phase, 480 V, 22 A, 60 Hz.
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