Benutzt VARIAN 3290STQ #9134775 zu verkaufen

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ID#: 9134775

Hersteller:

VARIAN

Modell:

3290STQ

Wafer Größe:

6"

Ausstattungsmerkmale:

Sputtering system, 6"
Entity target configuration:
Process station #2: ALSICU

Process station cathode configuration:
Station #2: Quantum(Ratating magnet)

Heater configuration:
Heater type (All Station): DC BIAS
Heater controller(AII station): Eurotherm 808 x 1, Eurotherm 3508 x 2

Power supply configuration:
Outer PSU station #2: AE PINNACLE 12 KW
Outer PSU station #3: AE PINNACLE 12 KW
Outer PSU station #4: AE PINNACLE 12 KW

System vacuum configuration:
Compressor: Model 9600
8R Cryo pump: Yes
Water pump: No

Software configuration:
User's guide: ECS 3000
Version: 96.204.10U1
Floppy drive: 3.5"
Double cassette loading: Yes.
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