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ID#: 9095769

Hersteller:

VEECO

Modell:

Spector

Jahrgang:

~2001

Ausstattungsmerkmale:

Dual ion beam deposition system
Application: DWDM Filter
Target: (3) Round target
Target Materials: (1) Ta and (2) SiO2
Rotation: High Speed Fixture, Internal Control
Heater: Yes
RGA: No
OMS: Yes with Agilent Laser
Modified OMS computer

Pumping System:
CTI CRY-400 On-Board
CTI 9600 Compressor
Mechanical Pump

~2001 vintage.
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