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STS / CPX
Modell
Multiplex
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STS / CPX Multiplex #293586003

STS / CPX

Multiplex

PECVD System, 4"-8" Gases: N2, N2O, NH3, SiH4, CF4, O2 Temperature range: 0-300°C EDWARDS QDP80 wit
49
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STS / CPX Multiplex #293725291

STS / CPX

Multiplex

Etcher, 4" Material used: Gas Gas box QDP80 Pump 900 Turbo pump Chiller RF No ESC Throttle valve Bac
89
STS / CPX Multiplex #293601086

STS / CPX

Multiplex

Advanced Oxide Etcher (AOE) Loadlock module, 4" AOE Chamber module LEYBOLD Mag-Lev Turbo pump: 2000
167
STS / CPX Multiplex #9399677

STS / CPX

Multiplex

ICP Etcher Controller Operating desk.
151
STS / CPX Multiplex #9162410

STS / CPX

Multiplex

ICP AOE system, 4" Load lock Previously used for oxide, pyrex, quartz etching Process gases plumbed:
142
STS / CPX Multiplex #9145668

STS / CPX

Multiplex

Cluster ICP etcher, 8″ Brooks VCE4 and Mtr5 robot C033 Cluster handler (2) Temperature controlled li
149
STS / CPX Multiplex #9145667

STS / CPX

Multiplex

ICP Etcher (1) Chamber: Poly / Oxide (1) Transfer chamber (1) Vacuum cassette loadlock (2) Process
133
STS / CPX Multiplex #9119434

STS / CPX

Multiplex

Cluster ICP etcher, 8″ (3) Chambers Turbo on the wafer handler C033 Cluster handler (2) Temperature
140
STS / CPX Multiplex #9145738

STS / CPX

Multiplex

High rate deep silicon ICP etcher, 6" Multiplex atmospheric cassette system (MACS) Advanced silicon
134