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TEL / TOKYO ELECTRON Telius SP 308QS #9213296

TEL / TOKYO ELECTRON

Telius SP 308QS

Deep trench silicon etchers 12" FOUP (4) Chambers (SCCM) (5) Loader ports Load locker modules GEW30
95
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TEL / TOKYO ELECTRON Telius SP 308QS #116765

TEL / TOKYO ELECTRON

Telius SP 308QS

Deep trench silicon etchers (4) Chambers (SCCM) Load locker modules Capacitively coupled module cham
78
TEL / TOKYO ELECTRON Telius SP 308QS #9267844

TEL / TOKYO ELECTRON

Telius SP 308QS

Deep trench silicon etcher FACE 1 (Controller) FACE 2 (Controller) (4) Chambers (4) Gas boxes QUARTZ
51
TEL / TOKYO ELECTRON Telius SP 308QS #9267847

TEL / TOKYO ELECTRON

Telius SP 308QS

Deep trench silicon etcher, 12" (5) Load ports Outgas station FACE 1 (Controller) FACE 2 (Controller
57
TEL / TOKYO ELECTRON Telius SP 308QS #9267845

TEL / TOKYO ELECTRON

Telius SP 308QS

Deep trench silicon etcher, 12" (5) Load ports Outgas station FACE 1 (Controller) FACE 2 (Controller
61
TEL / TOKYO ELECTRON Telius SP 308QS #9267846

TEL / TOKYO ELECTRON

Telius SP 308QS

Deep trench silicon etcher, 12" (5) Load ports Outgas station FACE 1 (Controller) FACE 2 (Controller
62